KR101074927B1 - 공동부를 갖는 회로 기판 및 그 제조 방법 - Google Patents

공동부를 갖는 회로 기판 및 그 제조 방법 Download PDF

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Publication number
KR101074927B1
KR101074927B1 KR1020090028940A KR20090028940A KR101074927B1 KR 101074927 B1 KR101074927 B1 KR 101074927B1 KR 1020090028940 A KR1020090028940 A KR 1020090028940A KR 20090028940 A KR20090028940 A KR 20090028940A KR 101074927 B1 KR101074927 B1 KR 101074927B1
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KR
South Korea
Prior art keywords
cavity
substrate
conductive foil
upper substrate
lower substrate
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KR1020090028940A
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English (en)
Korean (ko)
Other versions
KR20100073951A (ko
Inventor
고로 나리따
Original Assignee
가부시끼가이샤 엘리먼트 덴시
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Publication of KR20100073951A publication Critical patent/KR20100073951A/ko
Application granted granted Critical
Publication of KR101074927B1 publication Critical patent/KR101074927B1/ko

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/11—Printed elements for providing electric connections to or between printed circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48153—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being arranged next to each other, e.g. on a common substrate
    • H01L2224/48195—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being arranged next to each other, e.g. on a common substrate the item being a discrete passive component
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/146—Mixed devices
    • H01L2924/1461—MEMS

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
KR1020090028940A 2008-12-22 2009-04-03 공동부를 갖는 회로 기판 및 그 제조 방법 KR101074927B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008324910A JP4859253B2 (ja) 2008-12-22 2008-12-22 空洞部を有する回路基板、その製造方法およびそれを用いた回路装置の製造方法
JPJP-P-2008-324910 2008-12-22

Publications (2)

Publication Number Publication Date
KR20100073951A KR20100073951A (ko) 2010-07-01
KR101074927B1 true KR101074927B1 (ko) 2011-10-18

Family

ID=42495178

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090028940A KR101074927B1 (ko) 2008-12-22 2009-04-03 공동부를 갖는 회로 기판 및 그 제조 방법

Country Status (4)

Country Link
JP (1) JP4859253B2 (ja)
KR (1) KR101074927B1 (ja)
CN (1) CN101764105B (ja)
TW (1) TWI371993B (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8519542B2 (en) * 2010-08-03 2013-08-27 Xilinx, Inc. Air through-silicon via structure
US8754529B2 (en) * 2011-03-28 2014-06-17 Miradia, Inc. MEMS device with simplified electrical conducting paths
TWI431742B (zh) * 2011-04-27 2014-03-21 Unimicron Technology Corp 線路板製造方法及基層線路板
KR101828063B1 (ko) 2011-05-17 2018-02-09 삼성전자주식회사 반도체 장치 및 그 형성방법
JP5668664B2 (ja) 2011-10-12 2015-02-12 船井電機株式会社 マイクロホン装置、マイクロホン装置を備えた電子機器、マイクロホン装置の製造方法、マイクロホン装置用基板およびマイクロホン装置用基板の製造方法
JP2016048768A (ja) * 2014-08-28 2016-04-07 日立化成株式会社 配線板及び半導体装置の製造方法
CN114466512B (zh) * 2021-12-24 2023-08-22 江苏普诺威电子股份有限公司 Mems埋容埋阻封装载板及其制作工艺

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11214819A (ja) * 1998-01-28 1999-08-06 Sony Corp 配線板及びその製造方法
US7166910B2 (en) * 2000-11-28 2007-01-23 Knowles Electronics Llc Miniature silicon condenser microphone
JP2002237682A (ja) * 2001-02-08 2002-08-23 Cmk Corp 部品実装用凹部を備えた多層プリント配線板及びその製造方法
JP2002290032A (ja) * 2001-03-24 2002-10-04 Ngk Spark Plug Co Ltd 配線基板の製造方法
JP4899269B2 (ja) * 2001-08-09 2012-03-21 株式会社村田製作所 電子部品ユニットおよびその製造方法
JP3941463B2 (ja) * 2001-11-06 2007-07-04 凸版印刷株式会社 多層プリント配線板の製造方法
CN1901758A (zh) * 2005-07-19 2007-01-24 青岛歌尔电子有限公司 电容式硅传声器
JP2007150514A (ja) * 2005-11-25 2007-06-14 Matsushita Electric Works Ltd マイクロホンパッケージ
JP2007250608A (ja) * 2006-03-14 2007-09-27 Element Denshi:Kk 中空部を有する回路基板、その製造方法およびそれを用いた回路装置の製造方法
JP4844294B2 (ja) * 2006-08-30 2011-12-28 パナソニック株式会社 複合配線基板
KR100817075B1 (ko) * 2006-11-09 2008-03-26 삼성전자주식회사 멀티스택 패키지 및 그 제조 방법

Also Published As

Publication number Publication date
TW201026171A (en) 2010-07-01
JP2010147955A (ja) 2010-07-01
CN101764105A (zh) 2010-06-30
TWI371993B (en) 2012-09-01
JP4859253B2 (ja) 2012-01-25
CN101764105B (zh) 2012-06-06
KR20100073951A (ko) 2010-07-01

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