KR100512500B1 - 반도체 장치의 제조 방법 - Google Patents

반도체 장치의 제조 방법 Download PDF

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Publication number
KR100512500B1
KR100512500B1 KR10-2002-0054525A KR20020054525A KR100512500B1 KR 100512500 B1 KR100512500 B1 KR 100512500B1 KR 20020054525 A KR20020054525 A KR 20020054525A KR 100512500 B1 KR100512500 B1 KR 100512500B1
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KR
South Korea
Prior art keywords
solution
substrate
manufacturing
semiconductor device
pure water
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Expired - Fee Related
Application number
KR10-2002-0054525A
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English (en)
Korean (ko)
Other versions
KR20030022728A (ko
Inventor
고데라마사꼬
마쯔이요시따까
Original Assignee
가부시끼가이샤 도시바
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Publication of KR20030022728A publication Critical patent/KR20030022728A/ko
Application granted granted Critical
Publication of KR100512500B1 publication Critical patent/KR100512500B1/ko
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H01L21/0206—Cleaning during device manufacture during, before or after processing of insulating layers
    • H01L21/02063—Cleaning during device manufacture during, before or after processing of insulating layers the processing being the formation of vias or contact holes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
    • H01L21/02074—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a planarization of conductive layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/32115—Planarisation
    • H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/7684—Smoothing; Planarisation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR10-2002-0054525A 2001-09-11 2002-09-10 반도체 장치의 제조 방법 Expired - Fee Related KR100512500B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001275593A JP4057803B2 (ja) 2001-09-11 2001-09-11 半導体装置の製造方法
JPJP-P-2001-00275593 2001-09-11

Publications (2)

Publication Number Publication Date
KR20030022728A KR20030022728A (ko) 2003-03-17
KR100512500B1 true KR100512500B1 (ko) 2005-09-07

Family

ID=19100425

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2002-0054525A Expired - Fee Related KR100512500B1 (ko) 2001-09-11 2002-09-10 반도체 장치의 제조 방법

Country Status (5)

Country Link
US (1) US6992009B2 (enExample)
JP (1) JP4057803B2 (enExample)
KR (1) KR100512500B1 (enExample)
CN (1) CN1202558C (enExample)
TW (1) TW557483B (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7188630B2 (en) * 2003-05-07 2007-03-13 Freescale Semiconductor, Inc. Method to passivate conductive surfaces during semiconductor processing
US20040248405A1 (en) * 2003-06-02 2004-12-09 Akira Fukunaga Method of and apparatus for manufacturing semiconductor device
US7700477B2 (en) * 2004-02-24 2010-04-20 Panasonic Corporation Method for fabricating semiconductor device
US7939482B2 (en) * 2005-05-25 2011-05-10 Freescale Semiconductor, Inc. Cleaning solution for a semiconductor wafer
US20100273330A1 (en) * 2006-08-23 2010-10-28 Citibank N.A. As Collateral Agent Rinse formulation for use in the manufacture of an integrated circuit
WO2008106221A1 (en) * 2007-02-28 2008-09-04 Applied Materials, Inc. Methods and apparatus for cleaning a substrate edge using chemical and mechanical polishing
JP2009238896A (ja) * 2008-03-26 2009-10-15 Renesas Technology Corp 半導体集積回路装置の製造方法
CN102317773B (zh) 2009-01-23 2015-03-11 聚合物技术系统公司 具有一体生物传感器的诊断式多层干相测试条
JP5588786B2 (ja) * 2010-08-24 2014-09-10 出光興産株式会社 シリコンウェハ加工液およびシリコンウェハ加工方法
US8773072B2 (en) * 2011-08-29 2014-07-08 Aygis Ag Refuelable storage battery
KR20130084932A (ko) * 2012-01-18 2013-07-26 삼성전자주식회사 반도체 소자의 제조 방법
US8877075B2 (en) 2012-02-01 2014-11-04 Infineon Technologies Ag Apparatuses and methods for gas mixed liquid polishing, etching, and cleaning
CN109243976B (zh) 2013-01-11 2023-05-23 应用材料公司 化学机械抛光设备及方法
US10090396B2 (en) 2015-07-20 2018-10-02 Taiwan Semiconductor Manufacturing Company, Ltd. Method for fabricating metal gate devices and resulting structures

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030014123A (ko) * 2001-08-07 2003-02-15 가부시키가이샤 히타치세이사쿠쇼 반도체 집적 회로 장치의 제조 방법

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08126873A (ja) * 1994-10-28 1996-05-21 Nec Corp 電子部品等の洗浄方法及び装置
TW406329B (en) * 1998-04-30 2000-09-21 Ibm Method of cleaning semiconductor wafers after cmp planarization
JP4017029B2 (ja) 1998-11-16 2007-12-05 株式会社カネカ カバーレイ用接着剤およびカバーレイフィルム
WO2000044034A1 (en) * 1999-01-25 2000-07-27 Speedfam-Ipec Corporation Methods and cleaning solutions for post-chemical mechanical polishing
JP4127926B2 (ja) 1999-04-08 2008-07-30 株式会社荏原製作所 ポリッシング方法
US6468135B1 (en) 1999-04-30 2002-10-22 International Business Machines Corporation Method and apparatus for multiphase chemical mechanical polishing
US6569349B1 (en) * 2000-10-23 2003-05-27 Applied Materials Inc. Additives to CMP slurry to polish dielectric films

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030014123A (ko) * 2001-08-07 2003-02-15 가부시키가이샤 히타치세이사쿠쇼 반도체 집적 회로 장치의 제조 방법

Also Published As

Publication number Publication date
CN1202558C (zh) 2005-05-18
JP4057803B2 (ja) 2008-03-05
US6992009B2 (en) 2006-01-31
KR20030022728A (ko) 2003-03-17
TW557483B (en) 2003-10-11
CN1405838A (zh) 2003-03-26
US20030068888A1 (en) 2003-04-10
JP2003086675A (ja) 2003-03-20

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