KR100502557B1 - 게이트 절연체의 성막 방법, 게이트 절연체의 성막 장치및 클러스터 툴 - Google Patents

게이트 절연체의 성막 방법, 게이트 절연체의 성막 장치및 클러스터 툴 Download PDF

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KR100502557B1
KR100502557B1 KR10-2003-7003856A KR20037003856A KR100502557B1 KR 100502557 B1 KR100502557 B1 KR 100502557B1 KR 20037003856 A KR20037003856 A KR 20037003856A KR 100502557 B1 KR100502557 B1 KR 100502557B1
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housing wall
processing chamber
film
gas
dielectric constant
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KR20030051654A (ko
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기류히데키
다카하시츠요시
아오야마신타로
신리키히로시
이게타마사노부
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동경 엘렉트론 주식회사
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