KR100493486B1 - 개선된 전도층 엣칭방법 및 장치 - Google Patents
개선된 전도층 엣칭방법 및 장치 Download PDFInfo
- Publication number
- KR100493486B1 KR100493486B1 KR10-1999-7008438A KR19997008438A KR100493486B1 KR 100493486 B1 KR100493486 B1 KR 100493486B1 KR 19997008438 A KR19997008438 A KR 19997008438A KR 100493486 B1 KR100493486 B1 KR 100493486B1
- Authority
- KR
- South Korea
- Prior art keywords
- etching
- conductive
- layer
- path
- conductive layer
- Prior art date
Links
- 238000005530 etching Methods 0.000 title claims abstract description 173
- 238000000034 method Methods 0.000 title claims abstract description 56
- 239000000758 substrate Substances 0.000 claims abstract description 39
- 238000012545 processing Methods 0.000 claims abstract description 17
- 239000004065 semiconductor Substances 0.000 claims abstract description 14
- 230000004888 barrier function Effects 0.000 claims description 38
- 238000009616 inductively coupled plasma Methods 0.000 claims description 29
- 239000000460 chlorine Substances 0.000 claims description 22
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 11
- 229910052731 fluorine Inorganic materials 0.000 claims description 11
- 239000011737 fluorine Substances 0.000 claims description 11
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 9
- 229910052801 chlorine Inorganic materials 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 229910052721 tungsten Inorganic materials 0.000 claims description 7
- 239000010936 titanium Substances 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010410 layer Substances 0.000 description 166
- 239000000463 material Substances 0.000 description 41
- 239000007789 gas Substances 0.000 description 29
- 229920002120 photoresistant polymer Polymers 0.000 description 23
- 239000012790 adhesive layer Substances 0.000 description 21
- 235000012431 wafers Nutrition 0.000 description 20
- 239000001307 helium Substances 0.000 description 15
- 229910052734 helium Inorganic materials 0.000 description 15
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 15
- 230000008569 process Effects 0.000 description 15
- 238000001816 cooling Methods 0.000 description 12
- 229910052782 aluminium Inorganic materials 0.000 description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 11
- 230000001965 increasing effect Effects 0.000 description 10
- 238000001020 plasma etching Methods 0.000 description 10
- 238000000710 polymer precipitation Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000002708 enhancing effect Effects 0.000 description 7
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 239000006117 anti-reflective coating Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 230000006641 stabilisation Effects 0.000 description 4
- 238000011105 stabilization Methods 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910018594 Si-Cu Inorganic materials 0.000 description 2
- 229910008465 Si—Cu Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000005389 semiconductor device fabrication Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910018125 Al-Si Inorganic materials 0.000 description 1
- 229910018182 Al—Cu Inorganic materials 0.000 description 1
- 229910018520 Al—Si Inorganic materials 0.000 description 1
- BSYNRYMUTXBXSQ-UHFFFAOYSA-N Aspirin Chemical compound CC(=O)OC1=CC=CC=C1C(O)=O BSYNRYMUTXBXSQ-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910017758 Cu-Si Inorganic materials 0.000 description 1
- 229910017931 Cu—Si Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000013626 chemical specie Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000567 combustion gas Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76885—By forming conductive members before deposition of protective insulating material, e.g. pillars, studs
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Drying Of Semiconductors (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/820,533 US5849641A (en) | 1997-03-19 | 1997-03-19 | Methods and apparatus for etching a conductive layer to improve yield |
US8/820,533 | 1997-03-19 | ||
US08/820,533 | 1997-03-19 | ||
PCT/US1998/005202 WO1998042020A1 (en) | 1997-03-19 | 1998-03-17 | Method for etching a conductive layer |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20000076337A KR20000076337A (ko) | 2000-12-26 |
KR100493486B1 true KR100493486B1 (ko) | 2005-06-03 |
Family
ID=25231067
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-1999-7008438A KR100493486B1 (ko) | 1997-03-19 | 1998-03-17 | 개선된 전도층 엣칭방법 및 장치 |
Country Status (8)
Country | Link |
---|---|
US (1) | US5849641A (ja) |
EP (1) | EP1010203B1 (ja) |
JP (1) | JP4451934B2 (ja) |
KR (1) | KR100493486B1 (ja) |
AT (1) | ATE252275T1 (ja) |
DE (1) | DE69819023T2 (ja) |
TW (1) | TW468226B (ja) |
WO (1) | WO1998042020A1 (ja) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6159861A (en) * | 1997-08-28 | 2000-12-12 | Nec Corporation | Method of manufacturing semiconductor device |
KR100257080B1 (ko) * | 1997-09-26 | 2000-05-15 | 김영환 | 반도체소자의제조방법 |
US6077762A (en) * | 1997-12-22 | 2000-06-20 | Vlsi Technology, Inc. | Method and apparatus for rapidly discharging plasma etched interconnect structures |
JP3819576B2 (ja) * | 1997-12-25 | 2006-09-13 | 沖電気工業株式会社 | 半導体装置及びその製造方法 |
US5939335A (en) | 1998-01-06 | 1999-08-17 | International Business Machines Corporation | Method for reducing stress in the metallization of an integrated circuit |
US6106663A (en) * | 1998-06-19 | 2000-08-22 | Lam Research Corporation | Semiconductor process chamber electrode |
US6248252B1 (en) * | 1999-02-24 | 2001-06-19 | Advanced Micro Devices, Inc. | Method of fabricating sub-micron metal lines |
TW573369B (en) * | 1999-03-31 | 2004-01-21 | Lam Res Corp | Improved techniques for etching an aluminum neodymium-containing layer |
US6383931B1 (en) * | 2000-02-11 | 2002-05-07 | Lam Research Corporation | Convertible hot edge ring to improve low-K dielectric etch |
US6387820B1 (en) * | 2000-09-19 | 2002-05-14 | Advanced Micro Devices, Inc. | BC13/AR chemistry for metal overetching on a high density plasma etcher |
DE10149736C1 (de) * | 2001-10-09 | 2003-04-17 | Infineon Technologies Ag | Verfahren zum Ätzen eines Metallschichtsystems |
US7244671B2 (en) * | 2003-07-25 | 2007-07-17 | Unitive International Limited | Methods of forming conductive structures including titanium-tungsten base layers and related structures |
KR100831572B1 (ko) * | 2005-12-29 | 2008-05-21 | 동부일렉트로닉스 주식회사 | 반도체 소자의 배선 형성방법 |
JP2007214171A (ja) * | 2006-02-07 | 2007-08-23 | Hitachi High-Technologies Corp | エッチング処理方法 |
US20100003828A1 (en) * | 2007-11-28 | 2010-01-07 | Guowen Ding | Methods for adjusting critical dimension uniformity in an etch process with a highly concentrated unsaturated hydrocarbon gas |
US8409937B2 (en) * | 2011-01-07 | 2013-04-02 | Eastman Kodak Company | Producing transistor including multi-layer reentrant profile |
CN106158724B (zh) * | 2015-03-24 | 2019-03-12 | 中芯国际集成电路制造(上海)有限公司 | 半导体结构的形成方法 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3994793A (en) * | 1975-05-22 | 1976-11-30 | International Business Machines Corporation | Reactive ion etching of aluminum |
FR2312114A1 (fr) * | 1975-05-22 | 1976-12-17 | Ibm | Attaque de materiaux par ions reactifs |
DE3071299D1 (en) * | 1979-07-31 | 1986-01-30 | Fujitsu Ltd | Dry etching of metal film |
US4373990A (en) * | 1981-01-08 | 1983-02-15 | Bell Telephone Laboratories, Incorporated | Dry etching aluminum |
JPS57170534A (en) * | 1981-04-15 | 1982-10-20 | Hitachi Ltd | Dry etching method for aluminum and aluminum alloy |
US4370196A (en) * | 1982-03-25 | 1983-01-25 | Rca Corporation | Anisotropic etching of aluminum |
JPS63238288A (ja) * | 1987-03-27 | 1988-10-04 | Fujitsu Ltd | ドライエツチング方法 |
US4838992A (en) * | 1987-05-27 | 1989-06-13 | Northern Telecom Limited | Method of etching aluminum alloys in semi-conductor wafers |
JPS6432633A (en) * | 1987-07-29 | 1989-02-02 | Hitachi Ltd | Taper etching method |
NL8902744A (nl) * | 1989-11-07 | 1991-06-03 | Koninkl Philips Electronics Nv | Werkwijze voor het aanbrengen van sporen uit aluminium of een aluminiumlegering op een substraat. |
DE3940083A1 (de) * | 1989-12-04 | 1991-06-13 | Siemens Ag | Verfahren zum anisotropen trockenaetzen von aluminium bzw. aluminiumlegierungen enthaltenden leiterbahnen in integrierten halbleiterschaltungen |
JP2673380B2 (ja) * | 1990-02-20 | 1997-11-05 | 三菱電機株式会社 | プラズマエッチングの方法 |
JP3170791B2 (ja) * | 1990-09-11 | 2001-05-28 | ソニー株式会社 | Al系材料膜のエッチング方法 |
US5211804A (en) * | 1990-10-16 | 1993-05-18 | Oki Electric Industry, Co., Ltd. | Method for dry etching |
US5185058A (en) * | 1991-01-29 | 1993-02-09 | Micron Technology, Inc. | Process for etching semiconductor devices |
DE4107006A1 (de) * | 1991-03-05 | 1992-09-10 | Siemens Ag | Verfahren zum anisotropen trockenaetzen von aluminium bzw. aluminiumlegierungen enthaltenden leiterbahnebenen in integrierten halbleiterschaltungen |
US5126008A (en) * | 1991-05-03 | 1992-06-30 | Applied Materials, Inc. | Corrosion-free aluminum etching process for fabricating an integrated circuit structure |
EP0535540A3 (en) * | 1991-10-02 | 1994-10-19 | Siemens Ag | Etching process for aluminium-containing coatings |
DE4136178A1 (de) * | 1991-11-02 | 1993-05-06 | Deutsche Thomson-Brandt Gmbh, 7730 Villingen-Schwenningen, De | Schaltung zur kontinuierlichen zoom-einstellung der bildbreite in einem fernsehempfaenger |
JPH06108272A (ja) * | 1992-09-30 | 1994-04-19 | Sumitomo Metal Ind Ltd | プラズマエッチング方法 |
JP3449741B2 (ja) * | 1992-11-26 | 2003-09-22 | 東京エレクトロン株式会社 | プラズマエッチング方法 |
US5387556A (en) * | 1993-02-24 | 1995-02-07 | Applied Materials, Inc. | Etching aluminum and its alloys using HC1, C1-containing etchant and N.sub.2 |
JP3317582B2 (ja) * | 1994-06-01 | 2002-08-26 | 菱電セミコンダクタシステムエンジニアリング株式会社 | 微細パターンの形成方法 |
US5783101A (en) * | 1994-09-16 | 1998-07-21 | Applied Materials, Inc. | High etch rate residue free metal etch process with low frequency high power inductive coupled plasma |
-
1997
- 1997-03-19 US US08/820,533 patent/US5849641A/en not_active Expired - Lifetime
-
1998
- 1998-03-17 DE DE69819023T patent/DE69819023T2/de not_active Expired - Fee Related
- 1998-03-17 WO PCT/US1998/005202 patent/WO1998042020A1/en active IP Right Grant
- 1998-03-17 EP EP98911722A patent/EP1010203B1/en not_active Expired - Lifetime
- 1998-03-17 JP JP54071698A patent/JP4451934B2/ja not_active Expired - Lifetime
- 1998-03-17 KR KR10-1999-7008438A patent/KR100493486B1/ko not_active IP Right Cessation
- 1998-03-17 AT AT98911722T patent/ATE252275T1/de not_active IP Right Cessation
- 1998-03-19 TW TW087104088A patent/TW468226B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE69819023T2 (de) | 2004-04-22 |
EP1010203B1 (en) | 2003-10-15 |
ATE252275T1 (de) | 2003-11-15 |
JP4451934B2 (ja) | 2010-04-14 |
DE69819023D1 (de) | 2003-11-20 |
JP2001517367A (ja) | 2001-10-02 |
US5849641A (en) | 1998-12-15 |
KR20000076337A (ko) | 2000-12-26 |
TW468226B (en) | 2001-12-11 |
WO1998042020A1 (en) | 1998-09-24 |
EP1010203A1 (en) | 2000-06-21 |
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