KR100475265B1 - 리이드프레임과그것을사용한반도체장치및그제조방법 - Google Patents

리이드프레임과그것을사용한반도체장치및그제조방법 Download PDF

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Publication number
KR100475265B1
KR100475265B1 KR1019970008685A KR19970008685A KR100475265B1 KR 100475265 B1 KR100475265 B1 KR 100475265B1 KR 1019970008685 A KR1019970008685 A KR 1019970008685A KR 19970008685 A KR19970008685 A KR 19970008685A KR 100475265 B1 KR100475265 B1 KR 100475265B1
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South Korea
Prior art keywords
semiconductor chip
support
lead
inner lead
tip
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Expired - Fee Related
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KR1019970008685A
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English (en)
Korean (ko)
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KR970067736A (ko
Inventor
시게키 다나카
아츠시 후지사와
소우이치 나가노
츠기히코 히라노
료이치 오타
다카후미 곤노
겐이치 다테베
도시아키 오카모토
Original Assignee
히타치 홋카이 세미콘덕터 가부시키가이샤
가부시끼가이샤 히다치 세이사꾸쇼
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Publication of KR970067736A publication Critical patent/KR970067736A/ko
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Publication of KR100475265B1 publication Critical patent/KR100475265B1/ko
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  • Engineering & Computer Science (AREA)
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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Lead Frames For Integrated Circuits (AREA)
  • Wire Bonding (AREA)
KR1019970008685A 1996-03-18 1997-03-14 리이드프레임과그것을사용한반도체장치및그제조방법 Expired - Fee Related KR100475265B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP6042196 1996-03-18
JP96-60421 1996-03-18
JP9008964A JPH09312375A (ja) 1996-03-18 1997-01-21 リードフレーム、半導体装置及び半導体装置の製造方法
JP97-8964 1997-01-21

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KR1020040022788A Division KR100473261B1 (ko) 1996-03-18 2004-04-02 반도체장치

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KR970067736A KR970067736A (ko) 1997-10-13
KR100475265B1 true KR100475265B1 (ko) 2005-07-01

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Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6692989B2 (en) * 1999-10-20 2004-02-17 Renesas Technology Corporation Plastic molded type semiconductor device and fabrication process thereof
JPH11274196A (ja) * 1998-03-26 1999-10-08 Seiko Epson Corp 半導体装置の製造方法およびモールドシステム並びに半導体装置
KR100350046B1 (ko) * 1999-04-14 2002-08-24 앰코 테크놀로지 코리아 주식회사 리드프레임 및 이를 이용한 방열판이 부착된 반도체패키지
US6975021B1 (en) * 1999-09-03 2005-12-13 Micron Technology, Inc. Carrier for substrate film
JP2001230360A (ja) * 2000-02-18 2001-08-24 Hitachi Ltd 半導体集積回路装置およびその製造方法
US7199477B1 (en) * 2000-09-29 2007-04-03 Altera Corporation Multi-tiered lead package for an integrated circuit
JP2002134674A (ja) * 2000-10-20 2002-05-10 Hitachi Ltd 半導体装置およびその製造方法
TW462120B (en) * 2000-11-10 2001-11-01 Siliconware Precision Industries Co Ltd Tape carrier type semiconductor package structure
JP2002176131A (ja) * 2000-12-08 2002-06-21 Hitachi Ltd 半導体装置の製造方法
JP3812447B2 (ja) * 2002-01-28 2006-08-23 富士電機デバイステクノロジー株式会社 樹脂封止形半導体装置
KR100477020B1 (ko) * 2002-12-16 2005-03-21 삼성전자주식회사 멀티 칩 패키지
US7239024B2 (en) * 2003-04-04 2007-07-03 Thomas Joel Massingill Semiconductor package with recess for die
US20050230821A1 (en) * 2004-04-15 2005-10-20 Kheng Lee T Semiconductor packages, and methods of forming semiconductor packages
US7511364B2 (en) * 2004-08-31 2009-03-31 Micron Technology, Inc. Floating lead finger on a lead frame, lead frame strip, and lead frame assembly including same
US7388283B2 (en) * 2005-02-04 2008-06-17 Avago Technologies Ecbu Ip Pte Ltd Method and device for integrating an illumination source and detector into the same IC package that allows angular illumination with a common planar leadframe
JP2006278407A (ja) * 2005-03-28 2006-10-12 Renesas Technology Corp 半導体装置の製造方法
US8110913B2 (en) * 2007-06-29 2012-02-07 Stats Chippac Ltd. Integrated circuit package system with integral inner lead and paddle
US7750444B2 (en) * 2008-05-19 2010-07-06 Powertech Technology Inc. Lead-on-chip semiconductor package and leadframe for the package
US9337240B1 (en) * 2010-06-18 2016-05-10 Altera Corporation Integrated circuit package with a universal lead frame
CN102332441B (zh) * 2010-07-12 2014-05-14 无锡华润安盛科技有限公司 一种高线位封装形式的引线框及其封装结构
US8450841B2 (en) * 2011-08-01 2013-05-28 Freescale Semiconductor, Inc. Bonded wire semiconductor device
US8841758B2 (en) * 2012-06-29 2014-09-23 Freescale Semiconductor, Inc. Semiconductor device package and method of manufacture
JP6100648B2 (ja) 2013-08-28 2017-03-22 ルネサスエレクトロニクス株式会社 半導体装置及び半導体装置の製造方法
CN108735701B (zh) * 2017-04-13 2021-12-24 恩智浦美国有限公司 具有用于包封期间的毛刺缓解的虚设引线的引线框架
US12400992B2 (en) * 2022-06-01 2025-08-26 Nanya Technology Corporation Semiconductor device with supporter against which bonding wire is disposed and method for preparing the same
US20230395558A1 (en) * 2022-06-01 2023-12-07 Nanya Technology Corporation Semiconductor device with supporter against which bonding wire is disposed

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07231007A (ja) * 1994-02-15 1995-08-29 Toshiba Corp 半導体装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59105349A (ja) * 1982-12-08 1984-06-18 Hitachi Ltd 集積回路装置
JP2637247B2 (ja) * 1989-09-12 1997-08-06 株式会社東芝 樹脂封止型半導体装置
US4992628A (en) * 1990-05-07 1991-02-12 Kyocera America, Inc. Ceramic-glass integrated circuit package with ground plane
JPH04162556A (ja) * 1990-10-25 1992-06-08 Mitsubishi Electric Corp リードフレーム及びその製造方法
US5245214A (en) * 1991-06-06 1993-09-14 Northern Telecom Limited Method of designing a leadframe and a leadframe created thereby
US5510649A (en) * 1992-05-18 1996-04-23 Motorola, Inc. Ceramic semiconductor package having varying conductive bonds
JPH0837252A (ja) * 1994-07-22 1996-02-06 Nec Corp 半導体装置
US5818114A (en) * 1995-05-26 1998-10-06 Hewlett-Packard Company Radially staggered bond pad arrangements for integrated circuit pad circuitry
JPH0945723A (ja) * 1995-07-31 1997-02-14 Rohm Co Ltd 半導体チップおよびこの半導体チップを組み込んだ半導体装置ならびにその製造方法
US5691567A (en) * 1995-09-19 1997-11-25 National Semiconductor Corporation Structure for attaching a lead frame to a heat spreader/heat slug structure
US5905299A (en) * 1996-01-05 1999-05-18 Texas Instruments, Inc. Thermally enhanced thin quad flatpack package
US5771157A (en) * 1996-03-08 1998-06-23 Honeywell, Inc. Chip-on-board printed circuit assembly using aluminum wire bonded to copper pads

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07231007A (ja) * 1994-02-15 1995-08-29 Toshiba Corp 半導体装置

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KR100473261B1 (ko) 2005-03-14
US6265762B1 (en) 2001-07-24
KR970067736A (ko) 1997-10-13
JPH09312375A (ja) 1997-12-02
CN1595646A (zh) 2005-03-16
MY121618A (en) 2006-02-28
CN100359678C (zh) 2008-01-02
CN1156910C (zh) 2004-07-07
TW347585B (en) 1998-12-11
CN1164127A (zh) 1997-11-05

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