KR100252313B1 - 범프가 제공된 전자부품의 제조장치 및 제조방법 - Google Patents

범프가 제공된 전자부품의 제조장치 및 제조방법 Download PDF

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Publication number
KR100252313B1
KR100252313B1 KR1019960021937A KR19960021937A KR100252313B1 KR 100252313 B1 KR100252313 B1 KR 100252313B1 KR 1019960021937 A KR1019960021937 A KR 1019960021937A KR 19960021937 A KR19960021937 A KR 19960021937A KR 100252313 B1 KR100252313 B1 KR 100252313B1
Authority
KR
South Korea
Prior art keywords
head
workpiece
solder ball
solder balls
solder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019960021937A
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English (en)
Korean (ko)
Other versions
KR970004986A (ko
Inventor
마사오 히다카
Original Assignee
모리시타 요이찌
마쯔시다덴기산교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 모리시타 요이찌, 마쯔시다덴기산교 가부시키가이샤 filed Critical 모리시타 요이찌
Publication of KR970004986A publication Critical patent/KR970004986A/ko
Application granted granted Critical
Publication of KR100252313B1 publication Critical patent/KR100252313B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01—Manufacture or treatment
    • H10W70/05—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
    • H10W70/093—Connecting or disconnecting other interconnections thereto or therefrom, e.g. connecting bond wires or bumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00—Tools, devices or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/06—Solder feeding devices; Solder melting pans
    • B23K3/0607—Solder feeding devices
    • B23K3/0623—Solder feeding devices for shaped solder piece feeding, e.g. preforms, bumps, balls, pellets, droplets
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3465—Application of solder
    • H05K3/3478—Application of solder preforms; Transferring prefabricated solder patterns
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H10W72/536—Shapes of wire connectors the connected ends being ball-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H10W72/5363—Shapes of wire connectors the connected ends being wedge-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)
KR1019960021937A 1995-06-19 1996-06-18 범프가 제공된 전자부품의 제조장치 및 제조방법 Expired - Fee Related KR100252313B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP95-151579 1995-06-19
JP15157995A JP3158966B2 (ja) 1995-06-19 1995-06-19 バンプ付電子部品の製造装置および製造方法

Publications (2)

Publication Number Publication Date
KR970004986A KR970004986A (ko) 1997-01-29
KR100252313B1 true KR100252313B1 (ko) 2000-04-15

Family

ID=15521610

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960021937A Expired - Fee Related KR100252313B1 (ko) 1995-06-19 1996-06-18 범프가 제공된 전자부품의 제조장치 및 제조방법

Country Status (5)

Country Link
US (1) US5831247A (https=)
JP (1) JP3158966B2 (https=)
KR (1) KR100252313B1 (https=)
CN (1) CN1123066C (https=)
TW (1) TW302596B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101762644B1 (ko) * 2016-06-27 2017-07-28 (주) 에스에스피 인라인 방식으로 리워크를 수행하는 반도체 패키지 제조 시스템 및 방법

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100268632B1 (ko) * 1996-03-08 2000-10-16 야마구치 다케시 범프형성방법 및 장치
NL1006366C2 (nl) * 1997-06-20 1998-12-22 Meco Equip Eng Werkwijze en inrichting voor het hechten van soldeerballen aan een substraat.
US6237219B1 (en) * 1998-03-05 2001-05-29 Matsushita Electric Industrial Co., Ltd. Method of mounting conductive ball
JP3076305B2 (ja) * 1998-06-23 2000-08-14 九州日本電気株式会社 半田ボール搭載装置およびその方法
JP3932501B2 (ja) * 1998-12-01 2007-06-20 澁谷工業株式会社 ボールマウント装置
JP4253748B2 (ja) 1998-12-25 2009-04-15 澁谷工業株式会社 半田ボール等の供給装置
JP3024113B1 (ja) * 1999-01-27 2000-03-21 株式会社日鉄マイクロメタル 金属球配列方法及び配列装置
JP4143788B2 (ja) 1999-08-04 2008-09-03 澁谷工業株式会社 ボールマウント装置及びマウント方法
SG97164A1 (en) * 2000-09-21 2003-07-18 Micron Technology Inc Individual selective rework of defective bga solder balls
JP3803556B2 (ja) * 2001-03-26 2006-08-02 日本電気株式会社 ボール転写装置およびボール整列装置
US7033842B2 (en) * 2002-03-25 2006-04-25 Matsushita Electric Industrial Co., Ltd. Electronic component mounting apparatus and electronic component mounting method
US7213738B2 (en) * 2002-09-30 2007-05-08 Speedline Technologies, Inc. Selective wave solder system
JP3959336B2 (ja) * 2002-11-08 2007-08-15 ユー・エム・シー・ジャパン株式会社 バンプボール圧着装置
US6983872B2 (en) * 2003-06-03 2006-01-10 Asm Assembly Automation Ltd. Substrate alignment method and apparatus
JP2005064205A (ja) * 2003-08-11 2005-03-10 Niigata Seimitsu Kk 回路基板の移載装置および移載方法、半田ボール搭載方法
WO2006027919A1 (en) * 2004-09-03 2006-03-16 Matsushita Electric Industrial Co., Ltd. Substrate edge part cleaning apparatus and substrate edge part cleaning method
US8222559B2 (en) * 2009-11-30 2012-07-17 Cheng Uei Precision Industry Co. Ltd. Automatic soldering machine
JP5951425B2 (ja) * 2011-10-04 2016-07-13 株式会社日立製作所 ハンダボール印刷装置
KR102270748B1 (ko) * 2013-11-07 2021-06-30 삼성전자주식회사 솔더볼 부착 장치, 솔더볼 부착 방법 및 이를 포함하는 반도체 패키지의 제조 방법
CN121694064A (zh) * 2023-09-15 2026-03-17 德州仪器公司 具有球附接体积控制的球安装设备

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0795554B2 (ja) * 1987-09-14 1995-10-11 株式会社日立製作所 はんだ球整列装置
GB2269335A (en) * 1992-08-04 1994-02-09 Ibm Solder particle deposition
JPH06310515A (ja) * 1993-04-22 1994-11-04 Hitachi Ltd 微小球体整列搭載方法
JP3303109B2 (ja) * 1993-05-31 2002-07-15 シチズン時計株式会社 半田ボール供給装置と供給方法
DE69322775T2 (de) * 1993-08-12 1999-07-22 International Business Machines Corp., Armonk, N.Y. Verfahren zur Inspektion vom Verbindungskugel-Satz eines intergrierten Schaltungsmoduls
US5652658A (en) * 1993-10-19 1997-07-29 View Engineering, Inc. Grid array inspection system and method
JP3290788B2 (ja) * 1993-12-14 2002-06-10 富士通株式会社 プリント基板の半田膜形成装置
US5431332A (en) * 1994-02-07 1995-07-11 Motorola, Inc. Method and apparatus for solder sphere placement using an air knife
US5540377A (en) * 1994-07-15 1996-07-30 Ito; Carl T. Solder ball placement machine
US5611491A (en) * 1995-02-27 1997-03-18 Hughes Aircraft Company Modular CO2 jet spray device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101762644B1 (ko) * 2016-06-27 2017-07-28 (주) 에스에스피 인라인 방식으로 리워크를 수행하는 반도체 패키지 제조 시스템 및 방법

Also Published As

Publication number Publication date
US5831247A (en) 1998-11-03
CN1142686A (zh) 1997-02-12
TW302596B (https=) 1997-04-11
JPH098172A (ja) 1997-01-10
KR970004986A (ko) 1997-01-29
JP3158966B2 (ja) 2001-04-23
CN1123066C (zh) 2003-10-01

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