KR0166101B1 - 정전방전 보호회로의 트랜지스터 및 그 제조방법 - Google Patents

정전방전 보호회로의 트랜지스터 및 그 제조방법 Download PDF

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Publication number
KR0166101B1
KR0166101B1 KR1019930021959A KR930021959A KR0166101B1 KR 0166101 B1 KR0166101 B1 KR 0166101B1 KR 1019930021959 A KR1019930021959 A KR 1019930021959A KR 930021959 A KR930021959 A KR 930021959A KR 0166101 B1 KR0166101 B1 KR 0166101B1
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KR
South Korea
Prior art keywords
semiconductor substrate
region
drain
gate
source
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Expired - Lifetime
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KR1019930021959A
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English (en)
Korean (ko)
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KR950012705A (ko
Inventor
이우봉
오세준
여태정
고재완
구영모
Original Assignee
김주용
현대전자산업주식회사
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Priority to KR1019930021959A priority Critical patent/KR0166101B1/ko
Priority to JP6253096A priority patent/JP2556959B2/ja
Priority to DE4437759A priority patent/DE4437759C2/de
Priority to US08/326,880 priority patent/US5545572A/en
Priority to TW083109849A priority patent/TW253074B/zh
Publication of KR950012705A publication Critical patent/KR950012705A/ko
Priority to US08/652,949 priority patent/US5907174A/en
Application granted granted Critical
Publication of KR0166101B1 publication Critical patent/KR0166101B1/ko
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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/60—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
    • H10D89/601—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
    • H10D89/811—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using FETs as protective elements

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Semiconductor Integrated Circuits (AREA)
KR1019930021959A 1993-10-21 1993-10-21 정전방전 보호회로의 트랜지스터 및 그 제조방법 Expired - Lifetime KR0166101B1 (ko)

Priority Applications (6)

Application Number Priority Date Filing Date Title
KR1019930021959A KR0166101B1 (ko) 1993-10-21 1993-10-21 정전방전 보호회로의 트랜지스터 및 그 제조방법
JP6253096A JP2556959B2 (ja) 1993-10-21 1994-10-19 静電放電消去回路のトランジスターおよびその製造方法
DE4437759A DE4437759C2 (de) 1993-10-21 1994-10-21 Transistor für einen Schutzschaltkreis gegenüber elektrostatischer Entladungen und Verfahren zu seiner Herstellung
US08/326,880 US5545572A (en) 1993-10-21 1994-10-21 Method for fabricating electrostatic discharge protecting transistor
TW083109849A TW253074B (enExample) 1993-10-21 1994-10-24
US08/652,949 US5907174A (en) 1993-10-21 1996-05-24 Electrostatic discharge protecting transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019930021959A KR0166101B1 (ko) 1993-10-21 1993-10-21 정전방전 보호회로의 트랜지스터 및 그 제조방법

Publications (2)

Publication Number Publication Date
KR950012705A KR950012705A (ko) 1995-05-16
KR0166101B1 true KR0166101B1 (ko) 1999-01-15

Family

ID=19366327

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930021959A Expired - Lifetime KR0166101B1 (ko) 1993-10-21 1993-10-21 정전방전 보호회로의 트랜지스터 및 그 제조방법

Country Status (5)

Country Link
US (2) US5545572A (enExample)
JP (1) JP2556959B2 (enExample)
KR (1) KR0166101B1 (enExample)
DE (1) DE4437759C2 (enExample)
TW (1) TW253074B (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0955496A (ja) * 1995-08-17 1997-02-25 Oki Electric Ind Co Ltd 高耐圧ｍｏｓトランジスタ及びその製造方法
JPH09129871A (ja) * 1995-10-31 1997-05-16 Nkk Corp Ｍｏｓトランジスタおよびその製造方法
KR100402672B1 (ko) * 1995-10-31 2004-06-04 텍사스 인스트루먼츠 인코포레이티드 CMOS/BiCMOS기술에서ESD방지를위한집적화된횡형구조
KR100211539B1 (ko) * 1995-12-29 1999-08-02 김영환 반도체소자의 정전기방전 보호장치 및 그 제조방법
KR100498587B1 (ko) * 1997-06-30 2005-09-15 주식회사 하이닉스반도체 반도체소자의필드트랜지스터형성방법
US6355508B1 (en) 1998-09-02 2002-03-12 Micron Technology, Inc. Method for forming electrostatic discharge protection device having a graded junction
KR100332472B1 (ko) * 1998-10-28 2002-09-05 주식회사 하이닉스반도체 정전기보호회로를구비한반도체장치의제조방법
US6051456A (en) * 1998-12-21 2000-04-18 Motorola, Inc. Semiconductor component and method of manufacture
US6063672A (en) * 1999-02-05 2000-05-16 Lsi Logic Corporation NMOS electrostatic discharge protection device and method for CMOS integrated circuit
US6777784B1 (en) * 2000-10-17 2004-08-17 National Semiconductor Corporation Bipolar transistor-based electrostatic discharge (ESD) protection structure with a heat sink
US6552879B2 (en) 2001-01-23 2003-04-22 International Business Machines Corporation Variable voltage threshold ESD protection
US6717219B1 (en) * 2002-04-12 2004-04-06 National Semiconductor Corporation High holding voltage ESD protection structure for BiCMOS technology
US6873017B2 (en) * 2003-05-14 2005-03-29 Fairchild Semiconductor Corporation ESD protection for semiconductor products
JP5165321B2 (ja) 2007-09-28 2013-03-21 オンセミコンダクター・トレーディング・リミテッド 静電気破壊保護素子、静電気破壊保護回路、半導体装置および半導体装置の製造方法
US7723823B2 (en) * 2008-07-24 2010-05-25 Freescale Semiconductor, Inc. Buried asymmetric junction ESD protection device
CN118216006A (zh) * 2021-11-26 2024-06-18 索尼半导体解决方案公司 高频集成电路及电子设备
US12610592B2 (en) 2022-11-17 2026-04-21 Globalfoundries U.S. Inc. Structure with buried doped region and methods to form same

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2611338C3 (de) * 1976-03-17 1979-03-29 Siemens Ag, 1000 Berlin Und 8000 Muenchen Feldeffekttransistor mit sehr kurzer Kanallange
US4128439A (en) * 1977-08-01 1978-12-05 International Business Machines Corporation Method for forming self-aligned field effect device by ion implantation and outdiffusion
JPS5673468A (en) * 1979-11-21 1981-06-18 Toshiba Corp Mos type semiconductor device
US4400711A (en) * 1981-03-31 1983-08-23 Rca Corporation Integrated circuit protection device
JPS5862067A (ja) * 1981-10-08 1983-04-13 Canon Electronics Inc ワイヤドツトヘツド
JPS58162067A (ja) * 1982-03-23 1983-09-26 Nec Corp 絶縁ゲ−ト型電界効果トランジスタの製造方法
JPS6050960A (ja) * 1983-08-30 1985-03-22 Toshiba Corp 半導体装置
US4605980A (en) * 1984-03-02 1986-08-12 Zilog, Inc. Integrated circuit high voltage protection
US4734752A (en) * 1985-09-27 1988-03-29 Advanced Micro Devices, Inc. Electrostatic discharge protection device for CMOS integrated circuit outputs
JPH0712060B2 (ja) * 1987-07-02 1995-02-08 日本電気株式会社 相補型ｍｏｓデバイスの入力保護装置
US5019888A (en) * 1987-07-23 1991-05-28 Texas Instruments Incorporated Circuit to improve electrostatic discharge protection
US4990976A (en) * 1987-11-24 1991-02-05 Nec Corporation Semiconductor device including a field effect transistor having a protective diode between source and drain thereof
US5162888A (en) * 1989-05-12 1992-11-10 Western Digital Corporation High DC breakdown voltage field effect transistor and integrated circuit
JPH0471275A (ja) * 1990-07-12 1992-03-05 Seiko Epson Corp 半導体装置
KR920007171A (ko) * 1990-09-05 1992-04-28 김광호 고신뢰성 반도체장치
DE4118441A1 (de) * 1991-06-05 1992-12-10 Siemens Ag Schaltungsanordnung zum schutz gegen ueberspannungen an eingaengen integrierter mos-schaltkreise
JPH0536909A (ja) * 1991-07-29 1993-02-12 Nec Corp 半導体集積回路
US5371395A (en) * 1992-05-06 1994-12-06 Xerox Corporation High voltage input pad protection circuitry
EP0598146A1 (en) * 1992-11-16 1994-05-25 ALCATEL BELL Naamloze Vennootschap Protection device against electrostatic discharges

Also Published As

Publication number Publication date
US5545572A (en) 1996-08-13
JP2556959B2 (ja) 1996-11-27
KR950012705A (ko) 1995-05-16
DE4437759C2 (de) 2002-02-21
TW253074B (enExample) 1995-08-01
DE4437759A1 (de) 1995-04-27
JPH07202196A (ja) 1995-08-04
US5907174A (en) 1999-05-25

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