JPWO2024157863A5 - - Google Patents

Info

Publication number

JPWO2024157863A5

JPWO2024157863A5 JP2024573006A JP2024573006A JPWO2024157863A5 JP WO2024157863 A5 JPWO2024157863 A5 JP WO2024157863A5 JP 2024573006 A JP2024573006 A JP 2024573006A JP 2024573006 A JP2024573006 A JP 2024573006A JP WO2024157863 A5 JPWO2024157863 A5 JP WO2024157863A5

Authority

JP

Japan

Prior art keywords

conductive

thickness direction

semiconductor device

semiconductor

conductive columnar

Prior art date

2024-01-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss