JPWO2023063027A5 - - Google Patents
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- Publication number
- JPWO2023063027A5 JPWO2023063027A5 JP2023555053A JP2023555053A JPWO2023063027A5 JP WO2023063027 A5 JPWO2023063027 A5 JP WO2023063027A5 JP 2023555053 A JP2023555053 A JP 2023555053A JP 2023555053 A JP2023555053 A JP 2023555053A JP WO2023063027 A5 JPWO2023063027 A5 JP WO2023063027A5
- Authority
- JP
- Japan
- Prior art keywords
- polishing composition
- composition according
- water
- inorganic acid
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims 13
- 229920003169 water-soluble polymer Polymers 0.000 claims 5
- -1 inorganic acid ammonium salt Chemical class 0.000 claims 3
- 229920000642 polymer Polymers 0.000 claims 2
- 239000004094 surface-active agent Substances 0.000 claims 2
- 239000004372 Polyvinyl alcohol Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000006061 abrasive grain Substances 0.000 claims 1
- ZRIUUUJAJJNDSS-UHFFFAOYSA-N ammonium phosphates Chemical compound [NH4+].[NH4+].[NH4+].[O-]P([O-])([O-])=O ZRIUUUJAJJNDSS-UHFFFAOYSA-N 0.000 claims 1
- 150000007514 bases Chemical class 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 150000007522 mineralic acids Chemical class 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 125000004433 nitrogen atom Chemical group N* 0.000 claims 1
- 239000002736 nonionic surfactant Substances 0.000 claims 1
- 229920002451 polyvinyl alcohol Polymers 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021167127 | 2021-10-12 | ||
| PCT/JP2022/034908 WO2023063027A1 (ja) | 2021-10-12 | 2022-09-20 | 研磨用組成物 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023063027A1 JPWO2023063027A1 (https=) | 2023-04-20 |
| JPWO2023063027A5 true JPWO2023063027A5 (https=) | 2024-07-24 |
Family
ID=85987670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023555053A Pending JPWO2023063027A1 (https=) | 2021-10-12 | 2022-09-20 |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP4418306A4 (https=) |
| JP (1) | JPWO2023063027A1 (https=) |
| KR (1) | KR20240074866A (https=) |
| CN (1) | CN118103955A (https=) |
| TW (1) | TW202334339A (https=) |
| WO (1) | WO2023063027A1 (https=) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6050125U (ja) | 1983-09-14 | 1985-04-09 | 小島 義彦 | 箱のコ−ナ−補強金具 |
| JP4608196B2 (ja) * | 2003-09-30 | 2011-01-05 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
| JP2005244123A (ja) * | 2004-02-27 | 2005-09-08 | Fujimi Inc | 研磨用組成物 |
| US20130302984A1 (en) | 2011-01-26 | 2013-11-14 | Fujimi Incorporated | Polishing composition, polishing method using same, and substrate production method |
| US10730755B2 (en) * | 2015-03-31 | 2020-08-04 | Jgc Catalysts And Chemicals Ltd. | Silica-based composite fine-particle dispersion, method for producing same, and polishing slurry including silica-based composite fine-particle dispersion |
| JP7250530B2 (ja) * | 2018-03-15 | 2023-04-03 | 株式会社フジミインコーポレーテッド | 研磨用組成物、研磨用組成物の製造方法、研磨方法、および半導体基板の製造方法 |
| JP7234536B2 (ja) * | 2018-03-26 | 2023-03-08 | 三菱ケミカル株式会社 | シリカゾルの製造方法 |
| WO2020196370A1 (ja) * | 2019-03-26 | 2020-10-01 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
| JP7272990B2 (ja) | 2020-04-09 | 2023-05-12 | トヨタ自動車株式会社 | コラムカバーユニット |
-
2022
- 2022-09-20 KR KR1020247015291A patent/KR20240074866A/ko active Pending
- 2022-09-20 CN CN202280068329.4A patent/CN118103955A/zh active Pending
- 2022-09-20 JP JP2023555053A patent/JPWO2023063027A1/ja active Pending
- 2022-09-20 EP EP22880723.6A patent/EP4418306A4/en active Pending
- 2022-09-20 WO PCT/JP2022/034908 patent/WO2023063027A1/ja not_active Ceased
- 2022-10-07 TW TW111138237A patent/TW202334339A/zh unknown
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