Classifications

• • C—CHEMISTRY; METALLURGY
  • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
  • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
  • C09K3/00—Materials not provided for elsewhere
  • C09K3/14—Anti-slip materials; Abrasives
  • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
  • C09K3/1463—Aqueous liquid suspensions
• • C—CHEMISTRY; METALLURGY
  • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
  • C09G—POLISHING COMPOSITIONS; SKI WAXES
  • C09G1/00—Polishing compositions
  • C09G1/02—Polishing compositions containing abrasives or grinding agents
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
  • H10P52/40—Chemomechanical polishing [CMP]
  • H10P52/402—Chemomechanical polishing [CMP] of semiconductor materials
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
  • H10P90/12—Preparing bulk and homogeneous wafers
  • H10P90/129—Preparing bulk and homogeneous wafers by polishing

Definitions

• the present invention relates to polishing compositions.
• This application claims priority based on Japanese Patent Application No. 2021-167127 filed on October 12, 2021, the entire contents of which are incorporated herein by reference.
• Precise polishing using polishing compositions is performed on the surfaces of materials such as metals, semi-metals, non-metals, and their oxides.
• the surface of a silicon wafer used as a component of a semiconductor device or the like is generally finished to a high-quality mirror surface through a lapping process (rough polishing process) and a polishing process (precise polishing process).
• the polishing process typically includes a preliminary polishing process (preliminary polishing process) and a final polishing process (final polishing process).
• Patent Document 1 is cited as a technical document relating to a polishing composition that is mainly used for polishing semiconductor substrates such as silicon wafers.
• a polishing composition that has a polishing ability for efficiently polishing an object to be polished is used.
• the polishing of semiconductor substrates such as silicon wafers and other substrates described above utilizes the mechanical polishing action of abrasive grains and the chemical polishing action (alkali etching) of basic compounds. can be demonstrated.
• a polishing composition with high processing power is preferable because it can improve manufacturing efficiency and cost effectiveness.
• the polishing composition used for polishing the substrate includes, for example, a polishing composition used in a finish polishing step (particularly a finish polishing step for semiconductor substrates such as silicon wafers and other substrates).
• a polishing composition used in a finish polishing step particularly a finish polishing step for semiconductor substrates such as silicon wafers and other substrates.
• the ability to achieve high quality surfaces can be sought.
• the surface quality of the polished surface can be improved by adding an additive such as a water-soluble polymer or a surfactant to the polishing composition and protecting the substrate with the additive.
• Patent Document 1 discloses a polishing composition containing colloidal silica, ammonia and a water-soluble polymer (hydroxyethyl cellulose).
• the use of the additive may lead to a decrease in processing power and, in turn, a decrease in production efficiency.
• polishing composition that can improve the polishing rate regardless of the presence or absence of water-soluble polymers or surfactants. Furthermore, if a polishing composition capable of improving the polishing rate while maintaining the quality of the polished surface is realized, it would be practically beneficial, and would be particularly beneficial in, for example, the finish polishing step.
• the present invention was created under the above background, and aims to provide a novel composition suitable for polishing.
• a polishing composition containing silica particles as abrasive grains, a basic compound, and water.
• the polishing composition further contains an inorganic acid ammonium salt.
• the inorganic acid ammonium salt contains a divalent or higher inorganic acid.
• An ammonium salt in which the inorganic acid has a valence of 2 or more tends to provide a better polishing rate.
• the inorganic acid ammonium salt includes an ammonium phosphate salt.
• ammonium phosphate As the inorganic acid ammonium salt, a better polishing rate can be achieved.
• the polishing composition further comprises at least one water-soluble polymer.
• a water-soluble polymer in the polishing composition, the surface quality (for example, haze) after polishing can be improved.
• the composition containing a water-soluble polymer can improve the polishing rate while maintaining the quality of the polished surface.
• the inorganic acid ammonium salt contained in the polishing composition can contribute to the improvement of the polishing rate without impairing the effect of using the water-soluble polymer (effect of improving the quality of the polished surface).
• the polishing composition contains two or more types of water-soluble polymers.
• the polishing composition disclosed herein it is possible to maintain both surface quality and improve the polishing rate with a composition containing two or more types of water-soluble polymers.
• the polishing composition contains a polyvinyl alcohol-based polymer as the water-soluble polymer.
• a polishing composition containing a polyvinyl alcohol-based polymer facilitates obtaining a high-quality polished surface. For example, haze can be effectively improved by using a combination of a polyvinyl alcohol-based polymer and another water-soluble polymer as the water-soluble polymer.
• the polishing composition contains a nitrogen atom-containing polymer as the water-soluble polymer.
• a polishing composition containing a nitrogen atom-containing polymer facilitates obtaining a high-quality polished surface. For example, haze can be effectively improved by using a combination of a nitrogen atom-containing polymer and another water-soluble polymer as the water-soluble polymer.
• the polishing composition further comprises at least one surfactant.
• Haze can be reduced by including a surfactant in the polishing composition.
• the composition containing a surfactant can improve the polishing rate while maintaining the quality (specifically, haze) of the polished surface.
• the inorganic acid ammonium salt contained in the polishing composition can contribute to improving the polishing rate without impairing the action of the surfactant.
• the polishing composition contains two or more nonionic surfactants as surfactants.
• the haze reduction effect can be exhibited more effectively.
• the polishing composition disclosed herein can be preferably used for polishing silicon wafers.
• a high-quality silicon wafer surface can be efficiently achieved by polishing a silicon wafer using the polishing composition.
• the polishing composition disclosed herein contains silica particles as abrasive grains.
• Silica particles as abrasive grains serve to mechanically polish the surface of the object to be polished.
• the polishing rate can be improved based on the mechanical polishing action of the abrasive grains.
• silica particles include colloidal silica, fumed silica, and precipitated silica.
• a silica particle can be used individually by 1 type or in combination of 2 or more types.
• the use of colloidal silica is particularly preferred because it facilitates obtaining a polished surface with excellent surface quality after polishing.
• colloidal silica for example, colloidal silica produced from water glass (sodium silicate) by the ion exchange method or alkoxide colloidal silica (colloidal silica produced by hydrolytic condensation reaction of alkoxysilane) is preferably employed. be able to.
• Colloidal silica can be used individually by 1 type or in combination of 2 or more types.
• the true specific gravity of silica constituting the silica particles is preferably 1.5 or more, more preferably 1.6 or more, and still more preferably 1.7 or more.
• the upper limit of the true specific gravity of silica is not particularly limited, it is typically 2.3 or less, for example 2.2 or less.
• a value measured by a liquid replacement method using ethanol as a replacement liquid can be employed.
• the average primary particle size of the abrasive grains is not particularly limited, it is preferably 5 nm or more, more preferably 10 nm or more, from the viewpoint of polishing rate and the like. From the viewpoint of obtaining a higher polishing effect (for example, effects such as reduction of haze and removal of defects), the average primary particle size is preferably 15 nm or more, more preferably 20 nm or more (eg, more than 20 nm). From the viewpoint of scratch prevention, the average primary particle size of the abrasive grains is preferably 100 nm or less, more preferably 50 nm or less, and even more preferably 45 nm or less.
• the average primary particle size of the abrasive grains may be 43 nm or less, less than 40 nm, less than 38 nm, less than 35 nm, or less than 32 nm. well, even less than 30 nm.
• the specific surface area can be measured using, for example, a surface area measuring device manufactured by Micromeritex under the trade name “Flow Sorb II 2300”.
• the average secondary particle size of abrasive grains is not particularly limited, and can be appropriately selected from a range of, for example, about 15 nm to 300 nm. From the viewpoint of improving the polishing rate, the average secondary particle size is preferably 30 nm or more, more preferably 35 nm or more. In some aspects, the average secondary particle size may be, for example, 40 nm or more, 42 nm or more, or preferably 44 nm or more. In addition, the average secondary particle diameter is usually advantageously 250 nm or less, preferably 200 nm or less, and more preferably 150 nm or less. In some preferred embodiments, the average secondary particle size is 120 nm or less, more preferably 100 nm or less, still more preferably 70 nm or less, for example 60 nm or less, or 50 nm or less.
• the average secondary particle size refers to the particle size (volume average particle size) measured by the dynamic light scattering method.
• the average secondary particle size of abrasive grains can be measured, for example, by a dynamic light scattering method using a product name "Nanotrack UPA-UT151” manufactured by Nikkiso Co., Ltd.
• the shape (outer shape) of the silica particles may be spherical or non-spherical.
• specific examples of non-spherical particles include peanut-shaped (that is, peanut shell-shaped), cocoon-shaped, confetti-shaped, and rugby ball-shaped particles.
• abrasive grains in which most of the particles are peanut-shaped or cocoon-shaped can be preferably employed.
• the average value of the major axis/minor axis ratio (average aspect ratio) of the silica particles is theoretically 1.0 or more, preferably 1.05 or more, and more preferably 1.1 or more. is. A higher polishing rate can be achieved by increasing the average aspect ratio.
• the average aspect ratio of the abrasive grains is preferably 3.0 or less, more preferably 2.0 or less, and still more preferably 1.5 or less from the viewpoint of reducing scratches.
• the shape (outer shape) and average aspect ratio of silica particles can be grasped, for example, by electron microscope observation.
• each particle image Draw the smallest rectangle that bounds the .
• the value obtained by dividing the length of the long side (value of the major axis) by the length of the short side (value of the minor axis) is the ratio of the major axis to the minor axis (aspect ratio ).
• the average aspect ratio can be obtained by arithmetically averaging the aspect ratios of the predetermined number of particles.
• the polishing composition disclosed herein may contain abrasive grains other than silica particles (hereinafter also referred to as "non-silica abrasive grains") to the extent that the effects of the present invention are not significantly hindered.
• non-silica abrasive grains include inorganic particles, organic particles, and organic-inorganic composite particles.
• inorganic particles include oxide particles such as alumina particles, cerium oxide particles, chromium oxide particles, titanium dioxide particles, zirconium oxide particles, magnesium oxide particles, manganese dioxide particles, zinc oxide particles, and red iron oxide particles; silicon nitride particles , nitride particles such as boron nitride particles; carbide particles such as silicon carbide particles and boron carbide particles; diamond particles; carbonates such as calcium carbonate and barium carbonate.
• organic particles include polymethyl methacrylate (PMMA) particles and poly(meth)acrylic acid particles (here, (meth)acrylic acid is a generic term for acrylic acid and methacrylic acid.) , polyacrylonitrile particles, and the like. Such abrasive grains may be used singly or in combination of two or more.
• the technology disclosed here can be preferably implemented in a mode using substantially only silica particles as abrasive grains. From such a point of view, the proportion of silica particles in the total amount of abrasive grains is appropriately 90% by weight or more, preferably 95% by weight or more, more preferably 98% by weight or more (for example, 99 to 100% by weight). .
• the content of abrasive grains (typically silica particles) in the polishing composition is not particularly limited, and is, for example, 0.01% by weight or more, preferably 0.05% by weight or more, more preferably 0 0.10% by weight or more, more preferably 0.15% by weight or more. Higher polishing rates can be achieved by increasing the abrasive content.
• the above content is suitably 10% by weight or less, preferably 7% by weight or less, more preferably 5% by weight or less, still more preferably 2% by weight or less, and may be, for example, 1% by weight or less. It may be 0.5% by weight or less, or 0.4% by weight or less. Thereby, a higher quality surface can be realized.
• the abrasive grain content described above can be preferably employed in an embodiment in which the polishing composition is used in the form of a polishing liquid (working slurry).
• the polishing composition disclosed herein contains a basic compound.
• a basic compound refers to a compound that dissolves in water and has the function of raising the pH of an aqueous solution.
• the object to be polished can be efficiently polished by its chemical polishing action (alkali etching).
• Examples of basic compounds include organic or inorganic basic compounds containing nitrogen, basic compounds containing phosphorus, alkali metal hydroxides, alkaline earth metal hydroxides, various carbonates and hydrogen carbonates, and the like. can be used, but does not include the inorganic acid ammonium salts described below.
• nitrogen-containing basic compounds include quaternary ammonium compounds, ammonia, amines (preferably water-soluble amines), and the like.
• basic compounds containing phosphorus include quaternary phosphonium compounds. Such a basic compound can be used individually by 1 type or in combination of 2 or more types.
• alkali metal hydroxides include potassium hydroxide and sodium hydroxide.
• carbonates or hydrogencarbonates include potassium hydrogencarbonate, potassium carbonate, sodium hydrogencarbonate, sodium carbonate and the like.
• Specific examples of amines include methylamine, dimethylamine, trimethylamine, ethylamine, diethylamine, triethylamine, ethylenediamine, monoethanolamine, N-( ⁇ -aminoethyl)ethanolamine, hexamethylenediamine, diethylenetriamine, triethylenetetramine, and anhydrous piperazine.
• quaternary phosphonium compound examples include quaternary phosphonium hydroxides such as tetramethylphosphonium hydroxide and tetraethylphosphonium hydroxide.
• quaternary ammonium salts such as tetraalkylammonium salts and hydroxyalkyltrialkylammonium salts
• the anionic component in such quaternary ammonium salts can be, for example, OH ⁇ , F ⁇ , Cl ⁇ , Br ⁇ , I ⁇ , ClO 4 ⁇ , BH 4 ⁇ and the like.
• Examples of the above quaternary ammonium compounds include quaternary ammonium salts in which the anion is OH- , ie quaternary ammonium hydroxides.
• quaternary ammonium hydroxides include hydroxides such as tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, tetrapentylammonium hydroxide and tetrahexylammonium hydroxide.
• tetraalkylammonium; hydroxyalkyltrialkylammonium hydroxide such as 2-hydroxyethyltrimethylammonium hydroxide (also referred to as choline);
• At least one basic compound selected from alkali metal hydroxides, quaternary ammonium hydroxides and ammonia can be preferably used.
• tetraalkylammonium hydroxide eg, tetramethylammonium hydroxide
• ammonia is particularly preferred.
• the content of the basic compound in the polishing composition is not particularly limited. From the viewpoint of improving the polishing rate, etc., it is usually appropriate to make the above content 0.0005% by weight or more, preferably 0.001% by weight or more, and 0.003% by weight or more. is more preferred. Also, from the viewpoint of improving surface quality (for example, reducing haze), etc., the above content is suitably less than 0.1% by weight, preferably less than 0.05% by weight, and preferably less than 0.03% by weight. % (for example, less than 0.025% by weight, more preferably less than 0.01% by weight). In addition, when using a combination of 2 or more types of basic compounds, the said content points out the total content of 2 or more types of basic compounds. These contents can be preferably applied to the contents in the polishing liquid (working slurry) supplied to the substrate, for example.
• the polishing composition disclosed herein contains an inorganic acid ammonium salt in addition to the silica abrasive grains and the basic compound.
• the inorganic acid ammonium salt refers to a salt of an inorganic acid as an anion and ammonium as a cation.
• the action of improving the polishing rate by the inorganic acid ammonium salt can be effectively exhibited even when the surface to be polished is protected by the presence of a water-soluble polymer, a surfactant, or the like. or a surfactant, the polishing rate can be improved while maintaining the polished surface quality (for example, low haze value) obtained by the water-soluble polymer or the like.
• An inorganic acid ammonium salt can be used individually by 1 type or in combination of 2 or more types.
• the valence of the inorganic acid contained in the inorganic acid ammonium salt is 1 or more, preferably 2 or more, more preferably 3 or more. A higher polishing rate tends to be obtained as the valence of the inorganic acid increases.
• the number of ammonium cations contained in the inorganic acid ammonium salt can correspond to the valence of the inorganic acid. Therefore, the number of ammonium cations contained in one molecule of the inorganic acid ammonium salt is 1 or more, preferably 2 or more, and more preferably 3 or more.
• inorganic acids contained in inorganic acid ammonium salts include hydrohalic acid (e.g., hydrochloric acid, hydrobromic acid, hydroiodic acid, hydrofluoric acid), nitric acid, sulfuric acid, sulfurous acid, thiosulfuric acid, carbonic acid, silicic acid, boric acid, phosphoric acid, phosphonic acid, phosphinic acid and the like.
• inorganic acid ammonium salts are preferably nitric acid, sulfuric acid, carbonic acid, or phosphoric acid salts, and particularly preferably phosphoric acid salts (that is, ammonium phosphate salts).
• Ammonium contained in inorganic acid ammonium salts can typically be in the form of inorganic ammonium cations (NH 4 + ).
• inorganic acid ammonium salts include ammonium chloride, ammonium borate, ammonium borofluoride, ammonium nitrate, ammonium sulfate, ammonium amidosulfate, ammonium persulfate, ammonium carbonate, ammonium hydrogen carbonate, ammonium dihydrogen phosphate, diammonium hydrogen phosphate, phosphorus triammonium acid, ammonium hypophosphite, ammonium sulfide and the like.
• ammonium nitrate, ammonium carbonate, ammonium hydrogen carbonate, ammonium sulfate, and ammonium phosphate are preferable, and ammonium phosphate is more preferable.
• ammonium phosphate salts ammonium dihydrogen phosphate and triammonium phosphate are particularly preferred, and triammonium phosphate is most preferred.
• the content of the inorganic acid ammonium salt in the polishing composition is not particularly limited, and can be set so that the effect of its use can be appropriately exhibited.
• the content of the inorganic acid ammonium salt can be, for example, 0.0001% by weight or more, and from the viewpoint of improving the polishing rate, it is suitably 0.0005% by weight or more, preferably 0.001% by weight or more, More preferably 0.003% by weight or more, still more preferably 0.005% by weight or more, may be 0.007% by weight or more, may be 0.010% by weight or more, or may be 0.015% by weight or more Well, it may be 0.020% by weight or more.
• the content of the inorganic acid ammonium salt may be, for example, 5% by weight or less, 1% by weight or less, or 0.3% by weight or less.
• the content of the inorganic acid ammonium salt is preferably 0.1% by weight or less, more preferably 0.05% by weight or less, and even more preferably 0.05% by weight or less. is 0.3% by weight or less, and may be 0.02% by weight or less, or may be 0.01% by weight or less (eg, less than 0.01% by weight).
• These contents can be preferably applied to the contents in the polishing liquid (working slurry) supplied to the object to be polished, for example.
• the content of the inorganic acid ammonium salt is the amount of the water-soluble polymer contained in the polishing composition (two or more water-soluble polymers If included, it can be specified by a relative relationship with the total amount thereof).
• the ratio (C IAAS /C WSP ) of the content of the inorganic acid ammonium salt (C IAAS ) to the content of the water-soluble polymer (C WSP ) in the polishing composition is, for example, 0.5 on a weight basis.
• the polishing rate by the inorganic acid ammonium salt may be 1 or more, 1.5 or more, or 2 or more.
• the ratio (C IAAS /C WSP ) is, for example, 30 or less, preferably 10 or less, more preferably 3 or less, may be 1 or less, or may be 0.7 or less on a weight basis.
• the content of the inorganic acid ammonium salt is the amount of surfactant contained in the polishing composition (when two or more surfactants are contained, their total amount).
• the ratio (C IAAS /C S ) of the inorganic acid ammonium salt content (C IAAS ) to the surfactant content (C S ) in the polishing composition is, for example, 0.1 on a weight basis. From the viewpoint of effectively exhibiting the effect of improving the polishing rate by the inorganic acid ammonium salt, it is preferably 1 or more, more preferably 3 or more, may be 5 or more, may be 10 or more, and may be 15 or more. It's okay.
• the ratio (C IAAS /C S ) is, for example, 100 or less, preferably 50 or less, more preferably 30 or less, or may be 10 or less, or 7 or less on a weight basis.
• the polishing composition preferably contains at least one water-soluble polymer.
• the water-soluble polymer can be useful for protecting the substrate surface, improving the wettability of the substrate surface after polishing, and the like.
• the surface quality for example, haze
• a composition containing an ammonium salt of an inorganic acid and a water-soluble polymer can improve the polishing rate while maintaining the quality of the polished surface.
• the water-soluble polymer is a compound containing a hydroxyl group, a carboxyl group, an acyloxy group, a sulfo group, an amide structure, an imide structure, a quaternary ammonium structure, a heterocyclic structure, a vinyl structure, etc. in the molecule.
• water-soluble polymers examples include cellulose derivatives, starch derivatives, polymers containing oxyalkylene units, polyvinyl alcohol-based polymers, and polymers containing nitrogen atoms.
• the water-soluble polymer may be a polymer derived from natural products or a synthetic polymer. The water-soluble polymer may be used singly or in combination of two or more.
• polymers derived from natural products are used as water-soluble polymers.
• Polymers derived from natural products include cellulose derivatives and starch derivatives. Natural product-derived polymers may be used singly or in combination of two or more.
• cellulose derivatives are used as water-soluble polymers.
• cellulose derivatives are polymers containing ⁇ -glucose units as main repeating units.
• Specific examples of cellulose derivatives include hydroxyethylcellulose (HEC), hydroxypropylcellulose, hydroxyethylmethylcellulose, hydroxypropylmethylcellulose, methylcellulose, ethylcellulose, ethylhydroxyethylcellulose, carboxymethylcellulose and the like.
• HEC hydroxyethylcellulose
• a cellulose derivative may be used individually by 1 type, and may be used in combination of 2 or more type.
• a starch derivative is used as the water-soluble polymer.
• Starch derivatives are polymers containing ⁇ -glucose units as main repeating units, such as pregelatinized starch, pullulan, carboxymethyl starch, cyclodextrin, and the like.
• a starch derivative may be used individually by 1 type, and may be used in combination of 2 or more type.
• synthetic polymers are used as water-soluble polymers.
• the effects of the technology disclosed herein are preferably exhibited in embodiments in which a synthetic polymer is used as the water-soluble polymer.
• Synthetic polymers may be used singly or in combination of two or more.
• a polymer containing oxyalkylene units is used as the water-soluble polymer.
• polymers containing oxyalkylene units include polyethylene oxide (PEO), block copolymers of ethylene oxide (EO) and propylene oxide (PO) or butylene oxide (BO), and random copolymers of EO and PO or BO. etc. are exemplified.
• block copolymers of EO and PO or random copolymers of EO and PO are preferred.
• Block copolymers of EO and PO can be diblock copolymers, triblock copolymers, or the like, comprising PEO blocks and polypropylene oxide (PPO) blocks.
• the triblock copolymers include PEO-PPO-PEO type triblock copolymers and PPO-PEO-PPO type triblock copolymers.
• PEO-PPO-PEO type triblock copolymers are usually more preferred.
• copolymer is used to comprehensively refer to various copolymers such as random copolymers, alternating copolymers, block copolymers, and graft copolymers, unless otherwise specified. be.
• the molar ratio (EO/PO) of EO and PO constituting the copolymer is It is preferably greater than 1, more preferably 2 or more, and even more preferably 3 or more (eg, 5 or more).
• a polyvinyl alcohol-based polymer is used as the water-soluble polymer. According to the composition containing the polyvinyl alcohol-based polymer, it is easy to improve the polishing rate while maintaining the surface quality after polishing.
• a polyvinyl alcohol-based polymer refers to a polymer containing a vinyl alcohol unit (hereinafter also referred to as "VA unit”) as a repeating unit. Polyvinyl alcohol-based polymer may be used alone or in combination of two or more. The polyvinyl alcohol-based polymer may contain only VA units as repeating units, or may contain repeating units other than VA units (hereinafter also referred to as "non-VA units”) in addition to VA units.
• the polyvinyl alcohol-based polymer may be a random copolymer containing VA units and non-VA units, a block copolymer, an alternating copolymer or a graft copolymer.
• the polyvinyl alcohol-based polymer may contain only one type of non-VA unit, or may contain two or more types of non-VA units.
• the polyvinyl alcohol-based polymer may be unmodified polyvinyl alcohol (non-modified PVA) or modified polyvinyl alcohol (modified PVA).
• the unmodified PVA is a repeating unit (—CH 2 —CH(OCOCH 3 )—) of a structure produced by hydrolyzing (saponifying) polyvinyl acetate and vinyl-polymerizing vinyl acetate, and other than VA units.
• the degree of saponification of the non-modified PVA may be, for example, 60% or more, or from the viewpoint of water solubility, 70% or more, 80% or more, or 90% or more.
• Polyvinyl alcohol-based polymer contains VA unit, oxyalkylene group, carboxyl group, (di)carboxylic acid group, (di)carboxylic acid ester group, phenyl group, naphthyl group, sulfo group, amino group, hydroxyl group, amide group, imide modified PVA containing non-VA units having at least one structure selected from groups, nitrile groups, ether groups, ester groups, and salts thereof.
• non-VA units that can be contained in the modified PVA include, for example, repeating units derived from N-vinyl type monomers and N-(meth)acryloyl type monomers described later, repeating units derived from ethylene, and alkyl vinyl ether-derived units.
• the alkyl vinyl ether may be a vinyl ether having an alkyl group having 1 to 10 carbon atoms, such as propyl vinyl ether, butyl vinyl ether, 2-ethylhexyl vinyl ether.
• the vinyl ester of a monocarboxylic acid having 3 or more carbon atoms is a vinyl ester of a monocarboxylic acid having 3 or more and 7 or less carbon atoms, such as vinyl propanoate, vinyl butanoate, vinyl pentanoate, and vinyl hexanoate. obtain.
• an acetalized polyvinyl alcohol polymer is used as the polyvinyl alcohol polymer.
• the acetalized polyvinyl alcohol-based polymer include modified PVA in which a part of the VA units contained in the polyvinyl alcohol-based polymer is acetalized.
• Modified PVA acetalized PVA (ac-PVA)) in which some of the VA units contained in the polyvinyl alcohol-based polymer are acetalized reacts some of the hydroxyl groups of the polyvinyl alcohol-based polymer with an aldehyde compound or a ketone compound. and acetalization.
• an acetalized polyvinyl alcohol polymer is obtained by an acetalization reaction between a polyvinyl alcohol polymer and an aldehyde compound.
• the aldehyde compound has 1-7 carbon atoms, more preferably 2-7 carbon atoms.
• aldehyde compound examples include formaldehyde; linear or branched alkyl aldehydes such as acetaldehyde, propionaldehyde, n-butyraldehyde, isobutyraldehyde, t-butyraldehyde, and hexylaldehyde; or aromatic aldehydes; These may be used individually by 1 type, and may use 2 or more types together. In addition, excluding formaldehyde, one or more hydrogen atoms may be substituted with halogen or the like. Among them, linear or branched alkyl aldehydes are preferable because they have high solubility in water and are easy to acetalize. Aldehydes are more preferred.
• aldehyde compounds having 8 or more carbon atoms such as 2-ethylhexylaldehyde, nonylaldehyde, and decylaldehyde may be used.
• the acetalized polyvinyl alcohol-based polymer comprises a VA unit, which is a structural portion represented by the following chemical formula: —CH 2 —CH(OH)—; and an acetalized structure represented by the following general formula (1) unit (hereinafter also referred to as “VAC unit”).
• R is a hydrogen atom or a linear or branched alkyl group, and the alkyl group may be substituted with a functional group.
• R in formula (1) above is a hydrogen atom or a linear or branched alkyl group having 1 to 6 carbon atoms.
• R may be one of these, or may be a combination of two or more.
• R is preferably a linear or branched alkyl chain having 1 to 6 carbon atoms.
• the acetalization degree of the acetalized polyvinyl alcohol polymer can be 1 mol% or more, may be 5 mol% or more, preferably 10 mol% or more, and more preferably. 15 mol % or more, more preferably 20 mol % or more, particularly preferably 25 mol % or more (for example, 27 mol % or more).
• the acetalization degree of the acetalized polyvinyl alcohol polymer is preferably less than 60 mol%, more preferably 50 mol% or less, more preferably 40 mol% or less, and particularly preferably 35 mol% or less. (for example, 33 mol % or less).
• cation-modified polyvinyl alcohol into which a cationic group such as a quaternary ammonium structure is introduced may be used.
• a cationic group derived from a monomer having a cationic group such as diallyldialkylammonium salt, N-(meth)acryloylaminoalkyl-N,N,N-trialkylammonium salt is introduced. What was done is mentioned.
• the non-VA unit has a structural portion represented by the chemical formula: —CH 2 —CH(CR 5 (OR 8 )—CR 6 (OR 9 )—R 7 )— good too.
• R 5 to R 7 each independently represent a hydrogen atom or an organic group
• R 8 and R 9 each independently represent a hydrogen atom or R 10 —CO— (wherein R 10 represents an alkyl group ).
• modified PVA include modified PVA having a 1,2-diol structure in the side chain.
• the ratio of the number of moles of VA units to the number of moles of all repeating units constituting the polyvinyl alcohol polymer may be, for example, 5% or more, 10% or more, 20% or more, or 30% or more. .
• the ratio of the number of moles of the VA units may be 50% or more, 65% or more, 75% or more, or 80% or more, It may be 90% or more (eg, 95% or more, or 98% or more).
• Substantially 100% of the repeating units constituting the polyvinyl alcohol polymer may be VA units.
• substantially 100% means that the polyvinyl alcohol-based polymer does not contain non-VA units at least intentionally, typically the number of moles of non-VA units in the number of moles of all repeating units is less than 2% (eg, less than 1%), including 0%.
• the ratio of the number of moles of VA units to the number of moles of all repeating units constituting the polyvinyl alcohol polymer may be, for example, 95% or less, 90% or less, or 80% or less. , or 70% or less.
• the content of VA units (content on a weight basis) in the polyvinyl alcohol-based polymer may be, for example, 5% by weight or more, 10% by weight or more, 20% by weight or more, or 30% by weight or more.
• the content of the VA unit may be 50% by weight or more (for example, more than 50% by weight), 70% by weight or more, or 80% by weight or more ( For example, 90% by weight or more, 95% by weight or more, or 98% by weight or more).
• Substantially 100% by weight of the repeating units constituting the polyvinyl alcohol-based polymer may be VA units.
• substantially 100% by weight refers to at least intentionally not containing non-VA units as repeating units constituting the polyvinyl alcohol-based polymer, typically non-VA units in the polyvinyl alcohol-based polymer is less than 2% by weight (for example, less than 1% by weight).
• the content of VA units in the polyvinyl alcohol-based polymer may be, for example, 95% by weight or less, 90% by weight or less, 80% by weight or less, or 70% by weight or less. .
• the polyvinyl alcohol-based polymer may contain multiple polymer chains with different VA unit contents in the same molecule.
• the polymer chain refers to a portion (segment) that constitutes a part of one molecule of polymer.
• a polyvinyl alcohol-based polymer has a polymer chain A containing more than 50% by weight of VA units and a polymer chain A containing less than 50% by weight of VA units (i.e., more than 50% by weight of non-VA units). ) and the polymer chain B in the same molecule.
• the polymer chain A may contain only VA units as repeating units, or may contain non-VA units in addition to VA units.
• the content of VA units in the polymer chain A may be 60% by weight or more, 70% by weight or more, 80% by weight or more, or 90% by weight or more. In some embodiments, the content of VA units in polymer chain A may be 95 wt% or more, or 98 wt% or more. Substantially 100% by weight of the repeating units constituting the polymer chain A may be VA units.
• the polymer chain B may contain only non-VA units as repeating units, or may contain VA units in addition to non-VA units.
• the content of non-VA units in polymer chain B may be 60% by weight or more, 70% by weight or more, 80% by weight or more, or 90% by weight or more. In some embodiments, the content of non-VA units in polymer chain B may be 95 wt% or greater, or 98 wt% or greater. Substantially 100% by weight of the repeating units constituting polymer chain B may be non-VA units.
• polyvinyl alcohol-based polymers containing polymer chain A and polymer chain B in the same molecule include block copolymers and graft copolymers containing these polymer chains.
• the graft copolymer may be a graft copolymer having a structure in which the polymer chain B (side chain) is grafted to the polymer chain A (main chain), and the polymer chain A (side chain) is attached to the polymer chain B (main chain). chain) may be graft copolymers.
• a polyvinyl alcohol-based polymer having a structure in which a polymer chain B is grafted onto a polymer chain A can be used.
• polymer chain B examples include a polymer chain whose main repeating unit is a repeating unit derived from an N-vinyl type monomer; a polymer chain whose main repeating unit is a repeating unit derived from an N-(meth)acryloyl type monomer. ;polymer chains whose main repeating units are repeating units derived from vinyl dicarboxylates such as fumaric acid, maleic acid and maleic anhydride; polymer chains; polymer chains having oxyalkylene units as main repeating units; and the like.
• the main repeating unit means a repeating unit containing more than 50% by weight unless otherwise specified.
• a suitable example of the polymer chain B is a polymer chain having an N-vinyl type monomer as the main repeating unit, that is, an N-vinyl polymer chain.
• the content of repeating units derived from the N-vinyl type monomer in the N-vinyl polymer chain is typically more than 50% by weight, may be 70% by weight or more, and may be 85% by weight or more. may be 95% by weight or more.
• Substantially all of the polymer chain B may be repeating units derived from an N-vinyl type monomer.
• examples of N-vinyl type monomers include monomers having a nitrogen-containing heterocyclic ring (eg, lactam ring) and N-vinyl chain amides.
• Specific examples of N-vinyllactam type monomers include N-vinylpyrrolidone, N-vinylpiperidone, N-vinylmorpholinone, N-vinylcaprolactam, N-vinyl-1,3-oxazin-2-one, N-vinyl- 3,5-morpholinedione and the like.
• Specific examples of N-vinyl chain amides include N-vinylacetamide, N-vinylpropionic acid amide, N-vinylbutyric acid amide and the like.
• Polymer chain B is, for example, an N-vinyl polymer chain in which more than 50% by weight (for example, 70% by weight or more, or 85% by weight or more, or 95% by weight or more) of the repeating units are N-vinylpyrrolidone units. obtain. Substantially all of the repeating units constituting the polymer chain B may be N-vinylpyrrolidone units.
• polymer chain B is a polymer chain whose main repeating unit is a repeating unit derived from an N-(meth)acryloyl-type monomer, that is, an N-(meth)acryloyl-based polymer chain.
• the content of repeating units derived from N-(meth)acryloyl type monomers in the N-(meth)acryloyl polymer chain is typically more than 50% by weight, and may be 70% by weight or more. It may be at least 95% by weight.
• Substantially all of the polymer chain B may be repeating units derived from N-(meth)acryloyl type monomers.
• examples of N-(meth)acryloyl-type monomers include linear amides having an N-(meth)acryloyl group and cyclic amides having an N-(meth)acryloyl group.
• chain amides having an N-(meth)acryloyl group include (meth)acrylamide; N-methyl(meth)acrylamide, N-ethyl(meth)acrylamide, N-propyl(meth)acrylamide, N-isopropyl ( meth)acrylamide, N-alkyl (meth)acrylamide such as Nn-butyl (meth)acrylamide; N,N-dimethyl (meth)acrylamide, N,N-diethyl (meth)acrylamide, N,N-dipropyl (meth)acrylamide ) N,N-dialkyl(meth)acrylamides such as acrylamide, N,N-diisopropyl(meth)acrylamide, N,N-di(n-but
• polymer chain B is a polymer chain containing an oxyalkylene unit as a main repeating unit, that is, an oxyalkylene-based polymer chain.
• the content of oxyalkylene units in the oxyalkylene-based polymer chain is typically greater than 50% by weight, and may be 70% by weight or more, may be 85% by weight or more, or may be 95% by weight or more. There may be. Substantially all of the repeating units contained in polymer chain B may be oxyalkylene units.
• oxyalkylene units include oxyethylene units, oxypropylene units, and oxybutylene units. Each such oxyalkylene unit may be a repeat unit derived from the corresponding alkylene oxide.
• the oxyalkylene unit contained in the oxyalkylene-based polymer chain may be of one type or of two or more types. For example, it may be an oxyalkylene polymer chain containing a combination of oxyethylene units and oxypropylene units. In the oxyalkylene-based polymer chain containing two or more types of oxyalkylene units, the oxyalkylene units may be random copolymers, block copolymers, or alternating copolymers of corresponding alkylene oxides. It may be a polymer or a graft copolymer.
• polymer chain B examples include polymer chains containing repeating units derived from alkyl vinyl ethers (for example, vinyl ethers having an alkyl group having 1 to 10 carbon atoms), monocarboxylic acid vinyl esters (for example, Examples thereof include polymer chains containing repeating units derived from 3 or more monocarboxylic acid vinyl esters), polymer chains introduced with cationic groups (for example, cationic groups having a quaternary ammonium structure), and the like.
• alkyl vinyl ethers for example, vinyl ethers having an alkyl group having 1 to 10 carbon atoms
• monocarboxylic acid vinyl esters for example, Examples thereof include polymer chains containing repeating units derived from 3 or more monocarboxylic acid vinyl esters
• polymer chains introduced with cationic groups for example, cationic groups having a quaternary ammonium structure
• the polyvinyl alcohol-based polymer as the water-soluble polymer in the technology disclosed herein is preferably modified polyvinyl alcohol, which is a copolymer containing VA units and non-VA units.
• the degree of saponification of the polyvinyl alcohol polymer as the water-soluble polymer is usually 50 mol% or more, preferably 65 mol% or more, more preferably 70 mol% or more, for example 75 mol% or more. In principle, the degree of saponification of the polyvinyl alcohol-based polymer is 100 mol % or less.
• a polymer containing nitrogen atoms is used as the water-soluble polymer.
• a polishing composition containing a nitrogen atom-containing polymer facilitates obtaining a high-quality polished surface.
• Non-limiting examples of polymers containing nitrogen atoms include polymers containing N-vinyl type monomer units; polymers containing N-(meth)acryloyl type monomer units; One of the nitrogen atom-containing polymers may be used alone, or two or more of them may be used in combination.
• an N-vinyl polymer can be used as the water-soluble polymer (polymer containing nitrogen atoms).
• N-vinyl type polymers include polymers containing repeat units derived from monomers having nitrogen-containing heterocycles (eg, lactam rings).
• examples of such polymers include homopolymers and copolymers of N-vinyllactam-type monomers (eg, copolymers in which the proportion of copolymerization of N-vinyllactam-type monomers is greater than 50% by weight), N-vinyl It includes homopolymers and copolymers of linear amides (for example, copolymers in which the copolymerization ratio of N-vinyl linear amides exceeds 50% by weight).
• N-vinyllactam type monomers that is, compounds having a lactam structure and an N-vinyl group in one molecule
• N-vinylpyrrolidone VP
• N-vinylpiperidone N-vinylmorpholinone
• N -vinylcaprolactam VC
• N-vinyl-1,3-oxazin-2-one N-vinyl-3,5-morpholinedione and the like.
• polymers containing N-vinyllactam type monomer units include polyvinylpyrrolidone, polyvinylcaprolactam, random copolymers of VP and VC, one or both of VP and VC and other vinyl monomers (e.g., acrylic monomers, vinyl ester-based monomers, etc.), block copolymers containing polymer chains containing one or both of VP and VC, alternating copolymers, graft copolymers, and the like.
• N-vinyl chain amides include N-vinylacetamide, N-vinylpropionic acid amide, N-vinylbutyric acid amide and the like.
• an N-(meth)acryloyl-type polymer can be preferably used as the water-soluble polymer (polymer containing nitrogen atoms).
• the effects of the technology disclosed herein can be more preferably realized in a composition containing an N-(meth)acryloyl type polymer.
• N-(meth)acryloyl type polymers include homopolymers and copolymers of N-(meth)acryloyl type monomers (typically, the copolymerization ratio of N-(meth)acryloyl type monomers is 50 wt. % of copolymers).
• Examples of N-(meth)acryloyl-type monomers include linear amides having an N-(meth)acryloyl group and cyclic amides having an N-(meth)acryloyl group.
• chain amides having an N-(meth)acryloyl group include (meth)acrylamide; N-methyl(meth)acrylamide, N-ethyl(meth)acrylamide, N-propyl(meth)acrylamide, N-isopropyl ( meth)acrylamide, N-alkyl (meth)acrylamide such as Nn-butyl (meth)acrylamide; N,N-dimethyl (meth)acrylamide, N,N-diethyl (meth)acrylamide, N,N-dipropyl (meth)acrylamide ) N,N-dialkyl(meth)acrylamides such as acrylamide, N,N-diisopropyl(meth)acrylamide, N,N-di(n-butyl)(meth)acrylamide;
• polymers containing linear amides having N-(meth)acryloyl groups as monomer units include homopolymers of N-isopropylacrylamide and copolymers of N-
• Examples of cyclic amides having an N-(meth)acryloyl group include N-acryloylmorpholine, N-acryloylthiomorpholine, N-acryloylpiperidine, N-acryloylpyrrolidine, N-methacryloylmorpholine, N-methacryloylpiperidine, N-methacryloyl pyrrolidine and the like.
• Examples of polymers containing cyclic amides having N-(meth)acryloyl groups as monomer units include acryloylmorpholine polymers (PACMO).
• acryloylmorpholine-based polymers include homopolymers of N-acryloylmorpholine (ACMO) and copolymers of ACMO (for example, copolymers in which the copolymerization ratio of ACMO exceeds 50% by weight).
• ACMO N-acryloylmorpholine
• the ratio of the number of moles of ACMO units to the number of moles of all repeating units is usually 50% or more, and 80% or more (for example, 90% or more, typically 95% or more). is appropriate.
• All repeating units of the water-soluble polymer may be substantially composed of ACMO units.
• the polishing composition contains, as water-soluble polymers, a first water-soluble polymer and a second water-soluble polymer different from the first water-soluble polymer.
• the types of the first water-soluble polymer and the second water-soluble polymer are not particularly limited, and the various water-soluble polymers described above can be used.
• a polymer containing nitrogen atoms eg, N-(meth)acryloyl type polymer
• a polymer containing nitrogen atoms e.g, N-(meth)acryloyl type polymer
• a polymer containing nitrogen atoms e.g, water-soluble polymers (non-nitrogen atom-containing polymers, eg, non-N-(meth)acryloyl-type polymers) different from N-(meth)acryloyl-type polymers) can be used.
• a polyvinyl alcohol-based polymer is used as the second water-soluble polymer, and a water-soluble polymer (non-polyvinyl alcohol-based polymer) different from the polyvinyl alcohol-based polymer is used as the first water-soluble polymer.
• a water-soluble polymer non-polyvinyl alcohol-based polymer
• both surface quality and polishing rate can be achieved at a higher level.
• the first water-soluble polymer a polymer containing a nitrogen atom (eg, N-(meth)acryloyl type polymer) is used, and a cyclic amide having an N-(meth)acryloyl group is used as a monomer unit Preferred are polymers comprising as and more preferred is PACMO.
• a modified or non-modified polyvinyl alcohol polymer is preferably used.
• the ratio of use of the first water-soluble polymer (e.g. nitrogen atom-containing polymer) and the second water-soluble polymer (e.g. polyvinyl alcohol-based polymer) is not particularly limited. .
• the ratio (C P1 /C P2 ) of the content (C P1 ) of the first water-soluble polymer to the content (C P2 ) of the second water-soluble polymer is suitably 0.1 or more on a weight basis, From the viewpoint of effectively exhibiting the effect of using the first water-soluble polymer, it is preferably 0.5 or more, more preferably 1 or more, and may be 2 or more (for example, 3 or more).
• the ratio (C P1 /C P2 ) is suitably 20 or less on a weight basis, and is preferably 10 or less and 5 or less from the viewpoint of effectively exhibiting the effect of using the second water-soluble polymer.
• the ratio (C P1 /C P2 ) may be By setting the ratio (C P1 /C P2 ) in the above range, the action of the first water-soluble polymer (for example, a polymer containing nitrogen atoms) and the second water-soluble polymer (for example, a polyvinyl alcohol-based polymer) It tends to perform well and provide high surface quality.
• the weight average molecular weight (Mw) of the water-soluble polymer is not particularly limited.
• the Mw of the water-soluble polymer may be, for example, about 200 ⁇ 10 4 or less, suitably about 150 ⁇ 10 4 or less, and preferably about 100 ⁇ 10 4 or less, or about It may be 50 ⁇ 10 4 or less.
• the Mw of the water-soluble polymer may be, for example, 0.2 ⁇ 10 4 or more, preferably 0.5 ⁇ 10 4 or more.
• Mw is suitably 1.0 ⁇ 10 4 or more, may be 2 ⁇ 10 4 or more, and may be, for example, 5 ⁇ 10 4 or more.
• the preferred molecular weight range of the water-soluble polymer compound may vary depending on the type of polymer used.
• the Mw of the cellulose derivative and starch derivative can each be about 200 ⁇ 10 4 or less, and 150 ⁇ 10 4 or less is suitable.
• the Mw may be about 100 ⁇ 10 4 or less, or about 50 ⁇ 10 4 or less (for example, about 30 ⁇ 10 4 or less).
• the Mw is, for example, about 0.2 ⁇ 10 4 or more, suitably about 0.5 ⁇ 10 4 or more, preferably about 1.0 ⁇ 10 4 or more. It is 10 4 or more, more preferably about 3.0 ⁇ 10 4 or more, still more preferably about 10 ⁇ 10 4 or more, and may be about 20 ⁇ 10 4 or more.
• Mw of the polyvinyl alcohol-based polymer can be 100 ⁇ 10 4 or less, preferably 60 ⁇ 10 4 or less. From the viewpoint of concentration efficiency, etc., the Mw may be 30 ⁇ 10 4 or less, preferably 20 ⁇ 10 4 or less, for example 10 ⁇ 10 4 or less, or 8 ⁇ 10 4 or less, It may be 5 ⁇ 10 4 or less, or 3 ⁇ 10 4 or less. As the Mw of the polyvinyl alcohol polymer becomes smaller, the dispersion stability of the polyvinyl alcohol polymer tends to improve. In addition, from the viewpoint of suitably protecting the polished surface and maintaining or improving the surface quality, Mw may be, for example, 0.2 ⁇ 10 4 or more, and is usually preferably 0.5 ⁇ 10 4 or more. .
• Mw is suitably 0.8 ⁇ 10 4 or more, preferably 1.0 ⁇ 10 4 or more, and may be 2 ⁇ 10 4 or more. It may be ⁇ 10 4 or more, for example, 4 ⁇ 10 4 or more, or 5 ⁇ 10 4 or more.
• the Mw of the nitrogen atom-containing polymer can be 100 ⁇ 10 4 or less, preferably 70 ⁇ 10 4 or less.
• the above Mw may be 60 ⁇ 10 4 or less, or may be 50 ⁇ 10 4 or less.
• Mw may be, for example, 1.0 ⁇ 10 4 or more, or may be 10 ⁇ 10 4 or more.
• Mw is suitably 20 ⁇ 10 4 or higher, preferably 30 ⁇ 10 4 or higher, for example 40 ⁇ 10 4 or higher.
• Mw of the water-soluble polymer a molecular weight calculated from a value based on aqueous gel permeation chromatography (GPC) (aqueous system, converted to polyethylene oxide) can be used.
• GPC gel permeation chromatography
• model name "HLC-8320GPC” manufactured by Tosoh Corporation may be used. Measurement can be performed, for example, under the following conditions. A similar method is adopted for the examples described later.
• a nonionic polymer can be preferably used as the water-soluble polymer from the viewpoint of reducing aggregates and improving washability.
• synthetic polymers can be preferably employed as water-soluble polymers.
• the polishing composition does not substantially use a polymer derived from a natural product as the water-soluble polymer.
• substantially not used means that the amount of the natural product-derived polymer used is typically 3 parts by weight or less, preferably 1 part by weight or less, relative to the total content of 100 parts by weight of the water-soluble polymer. It includes 0 parts by weight or below the detection limit.
• the content of the water-soluble polymer in the polishing composition is not particularly limited. For example, it can be 0.0001% by weight or more. From the viewpoint of haze reduction, etc., the content is preferably 0.0005% by weight or more, more preferably 0.001% by weight or more, still more preferably 0.002% by weight or more, for example 0.005% by weight or more. Further, from the viewpoint of polishing rate, etc., the content is preferably 0.2% by weight or less, more preferably 0.1% by weight or less, and 0.05% by weight or less (for example, 0.02% by weight).
• polishing composition % or less, more preferably 0.015 wt% or less).
• polishing liquid working slurry
• the polishing composition disclosed herein may be implemented in a mode substantially free of water-soluble polymer.
• the content of the polyvinyl alcohol-based polymer in the polishing composition is particularly limited. not. From the viewpoint of improving the surface quality, etc., in some embodiments, the content may be, for example, 0.0001% by weight or more, usually 0.0005% by weight or more, and preferably 0. 001% by weight or more, and may be, for example, 0.002% by weight or more.
• the upper limit of the content of the polyvinyl alcohol-based polymer is not particularly limited, and may be, for example, 0.05% by weight or less. From the viewpoint of stability, polishing rate, washability, etc.
• the content of the polyvinyl alcohol polymer is preferably 0.03% by weight or less, more preferably 0.015% by weight. 0.01% by weight or less, more preferably 0.01% by weight or less.
• the polishing composition disclosed herein can be preferably practiced, for example, in a mode in which the polyvinyl alcohol polymer content is 0.008% by weight or less, 0.006% by weight or less, or 0.004% by weight or less. These contents can be preferably applied to the contents in the polishing liquid (working slurry) supplied to the substrate, for example.
• the content of the nitrogen atom-containing polymer in the polishing composition is not particularly limited. From the viewpoint of improving the surface quality, etc., in some embodiments, the content may be, for example, 0.0001% by weight or more, usually 0.0005% by weight or more, and preferably 0. It is 0.001% by weight or more, more preferably 0.002% by weight or more, still more preferably 0.003% by weight or more, and may be 0.005% by weight or more.
• the upper limit of the content of the nitrogen atom-containing polymer is not particularly limited, and can be, for example, 0.1% by weight or less.
• the content of the polymer containing nitrogen atoms is preferably 0.05% by weight or less, more preferably 0.02% by weight, from the viewpoint of stability, polishing rate, washability, etc. in the concentrated solution stage. % by weight or less, more preferably 0.01% by weight or less. These contents can be preferably applied to the contents in the polishing liquid (working slurry) supplied to the substrate, for example.
• the content of the water-soluble polymer (the total amount when two or more water-soluble polymers are included) can also be specified by the relative relationship with the abrasive grains (typically silica particles). .
• the content of the water-soluble polymer relative to 100 parts by weight of the abrasive grains can be, for example, 0.01 parts by weight or more, and from the viewpoint of haze reduction, etc., it is 0.01 part by weight. It is suitable to be 1 part by weight or more, preferably 0.5 parts by weight or more, more preferably 1 part by weight or more, still more preferably 3 parts by weight or more, and may be, for example, 4 parts by weight or more.
• the content of the water-soluble polymer relative to 100 parts by weight of the abrasive grains may be, for example, 50 parts by weight or less, or may be 30 parts by weight or less.
• the content of the water-soluble polymer with respect to 100 parts by weight of the abrasive grains is suitably 15 parts by weight or less, preferably 10 parts by weight. parts or less, may be 8 parts by weight or less, or may be 7 parts by weight or less.
• the content of the polyvinyl alcohol polymer in the polishing composition is (typically silica particles).
• the content of the polyvinyl alcohol-based polymer with respect to 100 parts by weight of the abrasive grains can be, for example, 0.01 parts by weight or more, and from the viewpoint of haze reduction, etc., it is 0.01 part by weight. It is suitable to be 1 part by weight or more, preferably 0.5 parts by weight or more, more preferably 1 part by weight or more.
• the content of the polyvinyl alcohol-based polymer relative to 100 parts by weight of the abrasive grains may be, for example, 50 parts by weight or less, or may be 30 parts by weight or less. From the viewpoint of the dispersion stability of the polishing composition, etc., in some embodiments, the content of the polyvinyl alcohol-based polymer with respect to 100 parts by weight of the abrasive grains is suitably 15 parts by weight or less, preferably 10 parts by weight. parts or less, more preferably 5 parts by weight or less, and may be 3 parts by weight or less.
• the content of the nitrogen atom-containing polymer in the polishing composition can also be specified by their relative relationship with abrasive grains (typically silica particles).
• abrasive grains typically silica particles.
• the content of the polymer containing nitrogen atoms with respect to 100 parts by weight of the abrasive grains can be, for example, 0.01 parts by weight or more, and from the viewpoint of haze reduction etc. It is suitable to be 0.1 parts by weight or more, preferably 0.5 parts by weight or more, more preferably 1 part by weight or more, and still more preferably 3 parts by weight or more.
• the content of the nitrogen atom-containing polymer relative to 100 parts by weight of the abrasive grains may be, for example, 50 parts by weight or less, or may be 30 parts by weight or less.
• the content of the nitrogen atom-containing polymer with respect to 100 parts by weight of the abrasive grains is suitably 15 parts by weight or less, preferably It is 10 parts by weight or less, and may be, for example, 5 parts by weight or less.
• the polishing composition preferably contains at least one surfactant.
• a surfactant in the polishing composition, haze on the surface of the object to be polished after polishing can be reduced more effectively.
• a composition containing an inorganic acid ammonium salt and a surfactant can improve the polishing rate while maintaining the quality (specifically, haze) of the polished surface.
• Any of anionic, cationic, nonionic and amphoteric surfactants can be used as surfactants.
• anionic or nonionic surfactants can be preferably employed. Nonionic surfactants are more preferable from the viewpoint of low foaming properties and ease of pH control.
• oxyalkylene polymers such as polyethylene glycol, polypropylene glycol, and polytetramethylene glycol; polyoxyethylene alkyl ethers, polyoxyethylene alkylphenyl ethers, polyoxyethylene alkylamines, polyoxyethylene fatty acid esters, polyoxyethylene glyceryl ether fatty acids
• Polyoxyalkylene derivatives e.g., polyoxyalkylene adducts
• esters and polyoxyethylene sorbitan fatty acid esters random type copolymers, alternating copolymers
• Surfactant can be used individually by 1 type or in combination of 2 or more types.
• nonionic surfactants include block copolymers (diblock type copolymers) of ethylene oxide (EO) and propylene oxide (PO), PEO (polyethylene oxide)-PPO (polypropylene oxide)-PEO type triblock copolymers, PPO-PEO-PPO type triblock copolymers, etc.), random copolymers of EO and PO, polyoxyethylene glycol, polyoxyethylene propyl ether, polyoxyethylene butyl ether, polyoxyethylene pentyl ether, polyoxyethylene hexyl ether, polyoxyethylene octyl ether, polyoxyethylene-2-ethylhexyl ether, polyoxyethylene nonyl ether, polyoxyethylene decyl ether, polyoxyethylene isodecyl ether, polyoxyethylene tridecyl ether, Polyoxyethylene lauryl ether, polyoxyethylene cetyl ether, polyoxyethylene stearyl ether, polyoxyethylene isostearyl ether, poly(ethylene
• preferred surfactants include block copolymers of EO and PO (especially PEO-PPO-PEO type triblock copolymers), random copolymers of EO and PO, and polyoxyethylene alkyl ethers (for example, polyoxyethylene decyl ether).
• polyoxyethylene alkyl ether those having an EO addition mole number of about 1 to 10 (for example, about 3 to 8) can be preferably used.
• two or more surfactants are used. By selecting and using a plurality of surfactants, an excellent haze improving effect can be obtained. Both of the two or more surfactants are preferably nonionic surfactants.
• the polishing composition contains, as surfactants, a first surfactant and a second surfactant different from the first surfactant.
• the types of the first surfactant and the second surfactant are not particularly limited, and various types of surfactants described above can be used.
• the first surfactant is a polyoxyethylene alkyl ether and the second surfactant is a block copolymer of EO and PO (e.g., a PEO-PPO-PEO type triblock copolymers) can be used.
• EO and PO e.g., a PEO-PPO-PEO type triblock copolymers
• the ratio of the first surfactant (e.g., polyoxyethylene alkyl ether) and the second surfactant (e.g., block copolymer of EO and PO) used is not particularly limited. .
• the ratio (C S1 /C S2 ) of the content (C S1 ) of the first surfactant to the content (C S2 ) of the second surfactant is suitably 0.1 or more on a weight basis. It is preferably 0.3 or more, more preferably 0.5 or more, and still more preferably 1 or more (for example, more than 1) from the viewpoint of effectively exerting the effect of using the surfactant.
• the above ratio (C S1 /C S2 ) is suitably 20 or less on a weight basis, preferably 10 or less, more preferably 10 or less, from the viewpoint of effectively exhibiting the effect of using the second surfactant. It is 5 or less, and may be 3 or less.
• the ratio (C S1 /C S2 ) in the above range, the first surfactant (eg polyoxyethylene alkyl ether) and the second surfactant (eg block copolymer of EO and PO) The action tends to be exhibited favorably and a high surface quality can be obtained.
• the molecular weight of the surfactant is, for example, less than 1 ⁇ 10 4 , preferably 9,500 or less from the viewpoint of filterability and washability, and may be, for example, less than 9,000.
• the molecular weight of the surfactant is usually 200 or more from the viewpoint of surface activity, and preferably 250 or more (for example, 300 or more) from the viewpoint of haze reduction effect.
• a more preferable range of the molecular weight of the surfactant may vary depending on the type of the surfactant. For example, when polyoxyethylene alkyl ether is used as a surfactant, its molecular weight is, for example, preferably less than 2000, more preferably 1900 or less (eg less than 1800), even more preferably 1500 or less.
• the weight average molecular weight thereof may be, for example, 500 or more, 1000 or more, or even 1500 or more. It may be 2000 or more, or even 2500 or more.
• the upper limit of the weight average molecular weight is, for example, less than 1 ⁇ 10 4 , preferably 9,500 or less.
• the molecular weight of the surfactant the molecular weight calculated from the chemical formula may be adopted, or the value of the weight average molecular weight (water-based, polyethylene glycol conversion) obtained by GPC may be adopted.
• the molecular weight calculated from the chemical formula it is preferable to adopt the molecular weight calculated from the chemical formula, and in the case of the block copolymer of EO and PO, it is preferable to adopt the weight average molecular weight obtained by the above GPC.
• the content of the surfactant in the polishing composition contains a surfactant
• the content of the surfactant in the polishing composition can be, for example, 0.00001% by weight or more from the viewpoint of detergency. From the viewpoint of haze reduction, etc., the content is preferably 0.0001% by weight or more, more preferably 0.0005% by weight or more, and still more preferably 0.001% by weight or more.
• the content is preferably 0.1% by weight or less, more preferably 0.01% by weight or less, and 0.005% by weight or less (for example, 0.002% by weight). % or less, more preferably 0.0015% by weight or less).
• these contents can be preferably applied to the contents in the polishing liquid (working slurry) supplied to the substrate, for example.
• the polishing composition disclosed herein may be implemented in a mode in which it does not substantially contain a surfactant.
• the content of the surfactant (the total amount when two or more surfactants are included) can also be specified by the relative relationship with the abrasive grains (typically silica particles).
• abrasive grains typically silica particles
• the content of the surfactant with respect to 100 parts by weight of the abrasive grains is suitably 0.001 parts by weight or more, preferably 0.01 parts by weight or more, and 0.1 part by weight. It is more preferably at least parts by weight, and may be at least 0.5 parts by weight.
• the polishing composition disclosed herein can be preferably implemented in a mode containing at least one water-soluble polymer and at least one surfactant.
• a more excellent haze reduction effect can be achieved by using a water-soluble polymer and a surfactant in combination.
• the technology disclosed herein by using an inorganic acid ammonium salt in a composition containing a water-soluble polymer and a surfactant as described above, the polishing rate can be increased while maintaining an excellent haze reduction effect. can be improved.
• the ratio of the water-soluble polymer content (the total amount when two or more types are included) and the surfactant content (the total amount when two or more types are included) is not particularly limited.
• the ratio (C WSP /C S ) of the water-soluble polymer content (C WSP ) to the surfactant content (C S ) is, on a weight basis, for example, 0.01 or more, preferably 0.05 or more. Appropriate. From the viewpoint of effectively exerting the effect of using the water-soluble polymer, the ratio (C WSP /C S ) is preferably 0.1 or more (for example, more than 0.1), more preferably 0.5 or more, and It is preferably 1 or more (eg, greater than 1), may be 3 or more, or may be 5 or more. Also, the above ratio (C WSP /C S ) is, for example, 200 or less, preferably 100 or less, on a weight basis.
• the ratio (C WSP /C S ) is preferably 70 or less, more preferably 50 or less, still more preferably 30 or less, and 15 or less. , or 10 or less.
• ion-exchanged water deionized water
• pure water ultrapure water
• distilled water distilled water
• the water used preferably has a total transition metal ion content of, for example, 100 ppb or less, in order to avoid as much as possible inhibition of the functions of other components contained in the polishing composition.
• the purity of water can be increased by removing impurity ions using an ion exchange resin, removing foreign substances using a filter, and performing operations such as distillation.
• the polishing composition disclosed herein may, if necessary, further contain an organic solvent (lower alcohol, lower ketone, etc.) that can be uniformly mixed with water.
• 90% by volume or more of the solvent contained in the polishing composition is preferably water, and more preferably 95% by volume or more (eg, 99 to 100% by volume) is water.
• the polishing composition disclosed herein contains, for example, organic acids, organic acid salts, inorganic acids, inorganic acid salts, chelating agents, preservatives, antifungal agents, etc., to the extent that the effects of the present invention are not significantly hindered.
• Known additives that can be used in a polishing composition may be further contained as necessary.
• organic acid and its salt and the inorganic acid and its salt can be used singly or in combination of two or more.
• organic acids include fatty acids such as formic acid, acetic acid and propionic acid, aromatic carboxylic acids such as benzoic acid and phthalic acid, itaconic acid, citric acid, oxalic acid, tartaric acid, malic acid, maleic acid, fumaric acid, and succinic acid.
• organic acids examples include alkali metal salts (sodium salt, potassium salt, etc.) and ammonium salts of organic acids.
• inorganic acids examples include hydrochloric acid, phosphoric acid, sulfuric acid, phosphonic acid, nitric acid, phosphinic acid, boric acid, carbonic acid, and the like.
• inorganic acid salts include alkali metal salts (sodium salts, potassium salts, etc.) of inorganic acids.
• the above chelating agents may be used singly or in combination of two or more.
• the chelating agents include aminocarboxylic acid-based chelating agents and organic phosphonic acid-based chelating agents.
• Suitable examples of chelating agents include, for example, ethylenediaminetetrakis(methylenephosphonic acid), diethylenetriaminepenta(methylenephosphonic acid) and diethylenetriaminepentaacetic acid.
• the antiseptic and antifungal agents include isothiazoline compounds, paraoxybenzoic acid esters, phenoxyethanol, and the like.
• the polishing composition disclosed herein is preferably substantially free of oxidizing agents.
• the polishing composition contains an oxidizing agent
• the surface of the substrate is oxidized to form an oxide film, thereby reducing the polishing rate.
• the oxidizing agent include hydrogen peroxide (H 2 O 2 ), sodium persulfate, ammonium persulfate, sodium dichloroisocyanurate and the like.
• the fact that the polishing composition does not substantially contain an oxidizing agent means that it does not contain an oxidizing agent at least intentionally.
• a trace amount for example, the molar concentration of the oxidizing agent in the polishing composition is 0.0005 mol / L or less, preferably 0.0001 mol / L or less, more preferably 0.00005 mol/L or less, particularly preferably 0.00001 mol/L or less
• the oxidizing agent is inevitably contained in the concept of the polishing composition substantially free of the oxidizing agent.
• the pH of the polishing composition disclosed herein is not particularly limited, and an appropriate pH can be adopted depending on the substrate and the like.
• the pH of the polishing composition is suitably 8.0 or higher, preferably 8.5 or higher, more preferably 9.0 or higher.
• the pH of the polishing composition increases, the polishing rate tends to improve.
• the pH of the polishing composition is usually appropriate to be 12.0 or less. , preferably 11.0 or less, more preferably 10.8 or less, even more preferably 10.5 or less.
• the pH of the polishing composition is measured using a pH meter (for example, a glass electrode hydrogen ion concentration indicator (model number F-72) manufactured by Horiba, Ltd.), and a standard buffer solution ( Phthalate pH buffer solution pH: 4.01 (25°C), neutral phosphate pH buffer solution pH: 6.86 (25°C), carbonate pH buffer solution pH: 10.01 (25°C)
• a pH meter for example, a glass electrode hydrogen ion concentration indicator (model number F-72) manufactured by Horiba, Ltd.
• a standard buffer solution Phthalate pH buffer solution pH: 4.01 (25°C), neutral phosphate pH buffer solution pH: 6.86 (25°C), carbonate pH buffer solution pH: 10.01 (25°C)
• the electrical conductivity of the polishing composition is not particularly limited. It may be 0.05 mS/cm or more, or 0.10 mS/cm or more. From the viewpoint of dispersion stability of the polishing composition, the electrical conductivity may be, for example, 1 mS/cm or less, 0.70 mS/cm or less, or 0.50 mS/cm or less. In such a mode of relatively low electrical conductivity, it is preferable to use two or more kinds of water-soluble polymers, whereby the haze reduction effect is likely to be obtained.
• the electrical conductivity may be less than or equal to 0.4 mS/cm, less than 0.3 mS/cm, less than 0.25 mS/cm, less than 0.20 mS/cm. , may be less than 0.18 mS/cm, and may be less than 0.15 mS/cm. According to the technology disclosed herein, it is possible to improve the polishing rate in the polishing composition having the electrical conductivity equal to or lower than the predetermined value as described above. That is, both the reduction of haze and the improvement of the polishing rate can be favorably achieved.
• the measurement of the electrical conductivity can be performed by a conventional method under the conditions of a liquid temperature of 25°C.
• a measuring instrument for example, a conductivity meter, model "DS-12" manufactured by Horiba, Ltd. can be used. In Examples described later, electrical conductivity was measured using the conductivity meter.
• the polishing composition disclosed herein is typically supplied onto the surface of a substrate in the form of a polishing liquid containing the polishing composition and used for polishing the substrate.
• the polishing liquid may be prepared, for example, by diluting (typically with water) any polishing composition disclosed herein.
• the polishing composition may be used as a polishing liquid as it is. That is, the concept of the polishing composition in the technology disclosed herein includes a polishing liquid (working slurry) that is supplied to a substrate and used for polishing the substrate, and a concentrated liquid (polishing slurry) that is diluted and used as the polishing liquid. liquid concentrates) are included.
• Another example of the polishing liquid containing the polishing composition disclosed herein is a polishing liquid obtained by adjusting the pH of the composition.
• the polishing composition disclosed herein may be in a concentrated form (ie, in the form of a concentrate of the polishing liquid) before being supplied to the substrate.
• a polishing composition in such a concentrated form is advantageous from the viewpoint of convenience in production, distribution, storage, etc., cost reduction, and the like.
• the concentration ratio is not particularly limited, and can be, for example, about 2 to 100 times in terms of volume, and usually about 5 to 50 times (for example, about 10 to 40 times) is appropriate.
• Such a concentrated liquid can be diluted at a desired timing to prepare a polishing liquid (working slurry), and the polishing liquid can be used in such a manner as to be supplied to the substrate. The dilution can be performed, for example, by adding water to the concentrate and mixing.
• the polishing composition contains abrasive grains
• the content of the abrasive grains in the concentrated solution is, for example, 25% by weight or less. can do. From the standpoint of dispersion stability, filterability, etc. of the polishing composition, the content is usually preferably 20% by weight or less, more preferably 15% by weight or less. In a preferred embodiment, the content of abrasive grains may be 10% by weight or less, or 5% by weight or less.
• the content of abrasive grains in the concentrated liquid can be, for example, 0.1% by weight or more, preferably 0.5% by weight. % or more, more preferably 0.7 wt % or more, and still more preferably 1 wt % or more.
• the polishing composition used in the technique disclosed herein may be a single-component type or a multi-component type including a two-component type.
• part A containing at least abrasive grains among the constituent components of the polishing composition and part B containing at least part of the remaining components are mixed, and these are mixed and diluted at appropriate timing as necessary. It may be configured such that the polishing liquid is prepared by
• each component constituting the polishing composition may be mixed using a well-known mixing device such as a blade stirrer, an ultrasonic disperser, or a homomixer.
• a well-known mixing device such as a blade stirrer, an ultrasonic disperser, or a homomixer.
• the manner in which these components are mixed is not particularly limited. For example, all the components may be mixed at once, or they may be mixed in an appropriately set order.
• the polishing composition disclosed herein can be applied to polishing substrates having various materials and shapes.
• Materials of the substrate include, for example, metals or semimetals such as silicon, aluminum, nickel, tungsten, copper, tantalum, titanium, and stainless steel, or alloys thereof; vitreous substances such as quartz glass, aluminosilicate glass, and vitreous carbon; ceramic materials such as alumina, silica, sapphire, silicon nitride, tantalum nitride and titanium carbide; compound semiconductor substrate materials such as silicon carbide, gallium nitride and gallium arsenide; resin materials such as polyimide resin;
• the substrate may be made of a plurality of materials among these materials.
• the shape of the substrate is not particularly limited.
• the polishing composition disclosed herein can be applied, for example, to polishing flat substrates such as plate-like or polyhedral substrates, or polishing edges of substrates (for example, wafer edge polishing).
• the polishing composition disclosed herein can be particularly preferably used for polishing surfaces made of silicon (typically for polishing silicon wafers).
• a typical example of the silicon wafer referred to here is a silicon single crystal wafer, for example, a silicon single crystal wafer obtained by slicing a silicon single crystal ingot.
• the polishing composition disclosed herein can be preferably applied to the polishing step of substrates (eg, silicon wafers).
• substrates eg, silicon wafers
• the substrate may have undergone conventional treatments that can be applied to the substrate in steps upstream of the polishing step, such as lapping and etching.
• the polishing composition disclosed herein is effectively used in a substrate (for example, silicon wafer) finishing step or a polishing step immediately preceding it, and is particularly preferably used in a finishing polishing step.
• the final polishing step refers to the final polishing step in the manufacturing process of the object (that is, the step in which no further polishing is performed after that step).
• the polishing composition disclosed herein also refers to a polishing step (a pre-polishing step between the rough polishing step and the final polishing step) upstream of the final polishing step. , and may also include secondary, tertiary, etc. polishing steps.), for example, it may be used in a polishing step that is performed immediately before final polishing.
• the polishing composition disclosed herein is used, for example, for polishing a silicon wafer prepared by an upstream process to have a surface roughness of 0.01 nm to 100 nm (typically finish polishing or polishing immediately before that). is effective. Application to finish polishing is particularly preferred.
• the surface roughness Ra of the substrate can be measured using, for example, a laser scanning surface roughness meter "TMS-3000WRC" manufactured by Schmitt Measurement System Inc.
• the polishing composition disclosed herein can be used for polishing a substrate, for example, in a mode including the following operations.
• a preferred embodiment of a method for polishing a silicon wafer as a substrate using the polishing composition disclosed herein will be described below. That is, a polishing liquid containing any one of the polishing compositions disclosed herein is prepared. Preparing the polishing liquid may include performing operations such as concentration adjustment (for example, dilution) and pH adjustment on the polishing composition to prepare the polishing liquid. Alternatively, the polishing composition may be used as a polishing liquid as it is.
• the polishing liquid is supplied to the substrate, and the substrate is polished by a conventional method.
• a silicon wafer that has undergone a lapping process is set in a general polishing apparatus, and a polishing liquid is applied to the surface to be polished of the silicon wafer through the polishing pad of the polishing apparatus. supply.
• the polishing pad is pressed against the surface to be polished of the silicon wafer, and the two are relatively moved (for example, rotationally moved). Polishing of the substrate is completed through such a polishing process.
• the polishing pad used in the polishing process is not particularly limited.
• a polyurethane foam type, non-woven fabric type, suede type polishing pad can be used.
• Each polishing pad may or may not contain abrasive grains.
• a polishing pad containing no abrasive grains is preferably used.
• Substrates polished with the polishing compositions disclosed herein are typically washed. Washing can be performed using a suitable washing liquid.
• the cleaning solution to be used is not particularly limited. (mixture of HCl, H 2 O 2 and H 2 O), SC-2 cleaning solution (mixture of HCl, H 2 O 2 and H 2 O).
• the temperature of the cleaning solution can range, for example, from room temperature (typically about 15°C to 25°C) to about 90°C. From the viewpoint of improving the cleaning effect, a cleaning solution having a temperature of about 50°C to 85°C can be preferably used.
• the technology disclosed herein includes a method for manufacturing a polished object (for example, a method for manufacturing a silicon wafer) including a polishing step (preferably finish polishing) by any of the polishing methods described above, and Provision of manufactured abrasives (eg, silicon wafers) may be included.
• a polishing step preferably finish polishing
• Provision of manufactured abrasives eg, silicon wafers
• ⁇ Preparation of polishing composition> Abrasive grains, a basic compound, an ammonium salt of an inorganic acid, a water-soluble polymer, a surfactant and deionized water were mixed to prepare a polishing composition according to each example.
• Colloidal silica (average primary particle size: 25 nm) was used as abrasive grains.
• Ammonia was used as the basic compound.
• the inorganic acid ammonium salt the types shown in Table 1 were used.
• PACMO Polyacryloylmorpholine
• ac-PVA acetalized polyvinyl alcohol
• polyoxyethylene ethylene oxide addition mole number 5 decyl ether (C10EO5)
• PEO-PPO-PEO block copolymer PEO-PPO-PEO
• the concentration of inorganic acid ammonium salt, the concentration of PACMO is 0.008%, the concentration of ac-PVA is 0.0025%, the concentration of C10EO5 is 0.0008%, and the concentration of PEO-PPO-PEO is 0.0004%.
• a polishing composition according to each example was obtained.
• Example 1 A polishing composition according to this example was prepared in the same manner as in Example 1, except that no inorganic acid ammonium salt was added.
• Example 2 A polishing composition according to this example was prepared in the same manner as in Example 1, except that an organic acid ammonium salt (tri-ammonium citrate) was used instead of the inorganic acid ammonium salt.
• organic acid ammonium salt tri-ammonium citrate
• ⁇ Polishing Silicon Wafer> As a substrate, a commercially available silicon single crystal wafer (conductivity type: P type, crystal orientation: ⁇ 100>, COP (Crystal Originated Particle: crystal defect) free) with a diameter of 300 mm after lapping and etching was prepared under the following polishing condition 1. A polished silicon wafer was prepared. Pre-polishing was performed using a polishing solution containing 1.0% abrasive (colloidal silica with an average primary particle size of 35 nm) and 0.068% potassium hydroxide in deionized water.
• abrasive colloidal silica with an average primary particle size of 35 nm
• Polishing device Single-wafer polishing device model “PNX-332B” manufactured by Okamoto Machine Tool Works Polishing load: 20kPa Surface plate rotation speed: 20 rpm Head (carrier) rotation speed: 20 rpm Polishing pad: manufactured by Nitta DuPont, product name "SUBA400" Supply rate of polishing liquid: 1 L/min Polishing liquid temperature: 20°C Surface plate cooling water temperature: 20°C Polishing time: 3min
• the silicon wafer after the preliminary polishing was polished under the following polishing condition 2.
• Polishing device Single-wafer polishing device model “PNX-332B” manufactured by Okamoto Machine Tool Works Polishing load: 10kPa Surface plate rotation speed: 50 rpm Head (carrier) rotation speed: 50 rpm Polishing pad: Product name “POLYPAS275NX” manufactured by Fujibo Ehime Co., Ltd. Polishing liquid supply rate: 1.5 L/min Polishing liquid temperature: 20°C Surface plate cooling water temperature: 20°C Polishing time: 4min
• SC-1 wash More specifically, a first cleaning tank equipped with an ultrasonic oscillator is prepared, the cleaning liquid is contained in the first cleaning tank, the temperature is maintained at 60° C., and the polished silicon wafer is immersed in the cleaning tank for 6 minutes. bottom. Thereafter, the silicon wafer was immersed in a second cleaning tank containing ultrapure water at 25° C. for 8 minutes, then again immersed in the first cleaning tank for 6 minutes and in the second cleaning tank for 16 minutes, and then dried.
• ⁇ Haze measurement> The surface of the silicon wafer after cleaning was measured for haze (ppm) in DW2O mode using a wafer inspection device manufactured by KLA-Tencor Co., Ltd., trade name "Surfscan SP5". The obtained results were converted into relative values (haze) with the haze value of Comparative Example 1 being 100%. A smaller haze value indicates a higher haze improvement effect.
• polishing rate> A silicon wafer with a diameter of 200 mm (conductivity type: P type, crystal orientation: ⁇ 100>, COP free) is prepared as an object to be polished, and is immersed in an aqueous HF solution (HF concentration: 2%) for 60 seconds to remove the oxide film. Then, using the polishing composition according to each example as a polishing liquid, polishing was performed under the following polishing condition 3.
• Polishing device Single-wafer polishing device model “PNX-322” manufactured by Okamoto Machine Tool Works Polishing load: 10kPa Surface plate rotation speed: 30 rpm Head (carrier) rotation speed: 30 rpm Polishing pad: Product name “POLYPAS275NX” manufactured by Fujibo Ehime Co., Ltd. Supply rate of polishing liquid: 400 mL/min Polishing liquid temperature: 20°C Surface plate cooling water temperature: 20°C Polishing time: 10min
• Table 1 shows an overview and evaluation results of each example. Table 1 also shows the electrical conductivity of the polishing composition. In the table, "-" indicates non-containing.
• a polishing composition containing no inorganic acid ammonium salt was used. Compared to Comparative Example 1, the polishing rate was improved by more than 120% while maintaining the haze within the range of 98 to 104%. Among them, in Examples 6 to 8, in which ammonium phosphate was used, a better polishing rate could be achieved. On the other hand, in Comparative Example 2 using an ammonium salt of an organic acid, although an effect of improving the polishing rate (111%) was observed, it was not as good as the effect of using an ammonium salt of an inorganic acid. From the above results, it can be seen that a composition suitable for polishing can be produced by adding an inorganic acid ammonium salt to a composition containing silica particles as abrasive grains, a basic compound, and water.

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• Chemical & Material Sciences (AREA)
• Organic Chemistry (AREA)
• Engineering & Computer Science (AREA)
• Materials Engineering (AREA)
• Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
• Mechanical Treatment Of Semiconductor (AREA)

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• 2022
  • 2022-09-20 KR KR1020247015291A patent/KR20240074866A/ko active Pending
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