JPWO2023181929A5 - - Google Patents

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Publication number
JPWO2023181929A5
JPWO2023181929A5 JP2024509970A JP2024509970A JPWO2023181929A5 JP WO2023181929 A5 JPWO2023181929 A5 JP WO2023181929A5 JP 2024509970 A JP2024509970 A JP 2024509970A JP 2024509970 A JP2024509970 A JP 2024509970A JP WO2023181929 A5 JPWO2023181929 A5 JP WO2023181929A5
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JP
Japan
Prior art keywords
polishing composition
composition according
water
soluble polymer
alkali metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024509970A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023181929A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/008723 external-priority patent/WO2023181929A1/ja
Publication of JPWO2023181929A1 publication Critical patent/JPWO2023181929A1/ja
Publication of JPWO2023181929A5 publication Critical patent/JPWO2023181929A5/ja
Pending legal-status Critical Current

Links

JP2024509970A 2022-03-23 2023-03-08 Pending JPWO2023181929A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022047444 2022-03-23
PCT/JP2023/008723 WO2023181929A1 (ja) 2022-03-23 2023-03-08 研磨用組成物

Publications (2)

Publication Number Publication Date
JPWO2023181929A1 JPWO2023181929A1 (https=) 2023-09-28
JPWO2023181929A5 true JPWO2023181929A5 (https=) 2024-11-29

Family

ID=88101272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024509970A Pending JPWO2023181929A1 (https=) 2022-03-23 2023-03-08

Country Status (3)

Country Link
JP (1) JPWO2023181929A1 (https=)
TW (1) TW202346500A (https=)
WO (1) WO2023181929A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026070724A1 (ja) * 2024-09-27 2026-04-02 株式会社フジミインコーポレーテッド 表面処理組成物、表面処理組成物の濃縮液および表面処理方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5860848A (en) * 1995-06-01 1999-01-19 Rodel, Inc. Polishing silicon wafers with improved polishing slurries
JP2004319759A (ja) * 2003-04-16 2004-11-11 Hitachi Chem Co Ltd 金属用研磨液及び研磨方法
CN103740281B (zh) * 2013-12-31 2015-11-25 深圳市力合材料有限公司 一种适用于大尺寸硅晶片抛光的抛光组合物及其制备方法
JP7353051B2 (ja) * 2019-03-26 2023-09-29 株式会社フジミインコーポレーテッド シリコンウェーハ研磨用組成物
JP7349309B2 (ja) * 2019-09-30 2023-09-22 株式会社フジミインコーポレーテッド シリコンウェーハ用研磨用組成物

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