JPWO2021099885A5 - - Google Patents
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- Publication number
- JPWO2021099885A5 JPWO2021099885A5 JP2021558030A JP2021558030A JPWO2021099885A5 JP WO2021099885 A5 JPWO2021099885 A5 JP WO2021099885A5 JP 2021558030 A JP2021558030 A JP 2021558030A JP 2021558030 A JP2021558030 A JP 2021558030A JP WO2021099885 A5 JPWO2021099885 A5 JP WO2021099885A5
- Authority
- JP
- Japan
- Prior art keywords
- insulator
- conductor
- functions
- semiconductor device
- oxide semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025166553A JP2025185071A (ja) | 2019-11-21 | 2025-10-02 | 半導体装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019210330 | 2019-11-21 | ||
| JP2019237925 | 2019-12-27 | ||
| PCT/IB2020/060547 WO2021099885A1 (ja) | 2019-11-21 | 2020-11-10 | 半導体装置および電子機器 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025166553A Division JP2025185071A (ja) | 2019-11-21 | 2025-10-02 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2021099885A1 JPWO2021099885A1 (https=) | 2021-05-27 |
| JPWO2021099885A5 true JPWO2021099885A5 (https=) | 2023-11-14 |
Family
ID=75980563
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021558030A Withdrawn JPWO2021099885A1 (https=) | 2019-11-21 | 2020-11-10 | |
| JP2025166553A Pending JP2025185071A (ja) | 2019-11-21 | 2025-10-02 | 半導体装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025166553A Pending JP2025185071A (ja) | 2019-11-21 | 2025-10-02 | 半導体装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12550325B2 (https=) |
| JP (2) | JPWO2021099885A1 (https=) |
| KR (1) | KR20220103108A (https=) |
| CN (1) | CN114787986A (https=) |
| WO (1) | WO2021099885A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116368602A (zh) | 2020-10-02 | 2023-06-30 | 株式会社半导体能源研究所 | 半导体装置 |
| WO2025219846A1 (ja) * | 2024-04-19 | 2025-10-23 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| WO2025233772A1 (ja) * | 2024-05-10 | 2025-11-13 | 株式会社半導体エネルギー研究所 | 半導体装置 |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5016832B2 (ja) | 2006-03-27 | 2012-09-05 | 株式会社東芝 | 不揮発性半導体記憶装置及びその製造方法 |
| JP5531259B2 (ja) * | 2009-03-19 | 2014-06-25 | 株式会社東芝 | 半導体装置及びその製造方法 |
| JP5380190B2 (ja) * | 2009-07-21 | 2014-01-08 | 株式会社東芝 | 不揮発性半導体記憶装置及びその製造方法 |
| JP2011023687A (ja) * | 2009-07-21 | 2011-02-03 | Toshiba Corp | 不揮発性半導体記憶装置 |
| US9166055B2 (en) | 2011-06-17 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
| US8952377B2 (en) | 2011-07-08 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| KR20140009023A (ko) | 2012-07-13 | 2014-01-22 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
| US20140027762A1 (en) | 2012-07-27 | 2014-01-30 | Semiconductor Energy Laboratory Co. Ltd. | Semiconductor device |
| US9515080B2 (en) | 2013-03-12 | 2016-12-06 | Sandisk Technologies Llc | Vertical NAND and method of making thereof using sequential stack etching and landing pad |
| US9698153B2 (en) * | 2013-03-12 | 2017-07-04 | Sandisk Technologies Llc | Vertical NAND and method of making thereof using sequential stack etching and self-aligned landing pad |
| JP2015056443A (ja) | 2013-09-10 | 2015-03-23 | 株式会社東芝 | 不揮発性記憶装置の製造方法 |
| TWI666770B (zh) | 2013-12-19 | 2019-07-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
| JP6607681B2 (ja) | 2014-03-07 | 2019-11-20 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| US9634097B2 (en) * | 2014-11-25 | 2017-04-25 | Sandisk Technologies Llc | 3D NAND with oxide semiconductor channel |
| US9761732B2 (en) | 2015-02-25 | 2017-09-12 | Snaptrack Inc. | Tunnel thin film transistor with hetero-junction structure |
| KR102788207B1 (ko) | 2015-04-13 | 2025-03-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
| JP2016225614A (ja) * | 2015-05-26 | 2016-12-28 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP6400536B2 (ja) | 2015-08-04 | 2018-10-03 | 東芝メモリ株式会社 | 半導体記憶装置 |
| US20180033794A1 (en) | 2016-07-27 | 2018-02-01 | Sandisk Technologies Llc | Non-Volatile Memory With Reduced Program Speed Variation |
| US9972641B1 (en) * | 2016-11-17 | 2018-05-15 | Sandisk Technologies Llc | Three-dimensional memory device having a multilevel drain select gate electrode and method of making thereof |
| US10553601B2 (en) | 2017-03-16 | 2020-02-04 | Toshiba Memory Corporation | Semiconductor memory including semiconductor oxide |
| US10312239B2 (en) | 2017-03-16 | 2019-06-04 | Toshiba Memory Corporation | Semiconductor memory including semiconductor oxie |
| JPWO2018224904A1 (ja) | 2017-06-05 | 2020-05-21 | 株式会社半導体エネルギー研究所 | 半導体装置、および半導体装置の作製方法 |
| US10593693B2 (en) | 2017-06-16 | 2020-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
| JP7195068B2 (ja) | 2017-06-26 | 2022-12-23 | 株式会社半導体エネルギー研究所 | 半導体装置、電子機器 |
| JP7234110B2 (ja) | 2017-07-06 | 2023-03-07 | 株式会社半導体エネルギー研究所 | メモリセル及び半導体装置 |
| US10665604B2 (en) | 2017-07-21 | 2020-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, semiconductor wafer, memory device, and electronic device |
| US10355014B1 (en) * | 2017-12-22 | 2019-07-16 | Micron Technology, Inc. | Assemblies having vertically-extending structures |
| JP7194813B2 (ja) * | 2018-09-13 | 2022-12-22 | 長江存儲科技有限責任公司 | 三次元メモリデバイス、三次元メモリデバイスを作製するための方法及びメモリセルストリング |
| WO2020095148A1 (ja) | 2018-11-08 | 2020-05-14 | 株式会社半導体エネルギー研究所 | 半導体装置、及び電子機器 |
| US11985827B2 (en) | 2020-01-17 | 2024-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, driving method of semiconductor device, and electronic device |
-
2020
- 2020-11-10 CN CN202080080493.8A patent/CN114787986A/zh active Pending
- 2020-11-10 US US17/776,696 patent/US12550325B2/en active Active
- 2020-11-10 WO PCT/IB2020/060547 patent/WO2021099885A1/ja not_active Ceased
- 2020-11-10 JP JP2021558030A patent/JPWO2021099885A1/ja not_active Withdrawn
- 2020-11-10 KR KR1020227016290A patent/KR20220103108A/ko active Pending
-
2025
- 2025-10-02 JP JP2025166553A patent/JP2025185071A/ja active Pending
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