JPWO2019013286A1 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JPWO2019013286A1 JPWO2019013286A1 JP2019529782A JP2019529782A JPWO2019013286A1 JP WO2019013286 A1 JPWO2019013286 A1 JP WO2019013286A1 JP 2019529782 A JP2019529782 A JP 2019529782A JP 2019529782 A JP2019529782 A JP 2019529782A JP WO2019013286 A1 JPWO2019013286 A1 JP WO2019013286A1
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 338
- 239000000758 substrate Substances 0.000 claims abstract description 136
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 31
- 238000002347 injection Methods 0.000 description 22
- 239000007924 injection Substances 0.000 description 22
- 239000010410 layer Substances 0.000 description 15
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 238000011084 recovery Methods 0.000 description 13
- 238000009825 accumulation Methods 0.000 description 12
- 229910052734 helium Inorganic materials 0.000 description 11
- 239000001307 helium Substances 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 9
- 239000011229 interlayer Substances 0.000 description 8
- -1 helium ions Chemical class 0.000 description 7
- 230000007547 defect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical group [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- 239000000969 carrier Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 150000003609 titanium compounds Chemical class 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Abstract
Description
特許文献1 特開2017−41601号公報
特許文献2 特開2012−43891号公報
Claims (25)
- 第1導電型のドリフト領域を有する半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられ、予め定められた配列方向に沿って前記トランジスタ部と配列されたダイオード部と、
を備え、
前記トランジスタ部および前記ダイオード部の双方が、
前記半導体基板の内部において前記ドリフト領域の上方に設けられた第2導電型のベース領域と、
前記半導体基板の上面から前記ベース領域を貫通し、前記半導体基板の上面において前記配列方向に垂直な延伸方向に延伸し、内部に導電部が設けられた複数のトレンチ部と、
前記半導体基板の下面側に、前記トランジスタ部から前記ダイオード部に渡って設けられ、ライフタイムキラーを含む下面側ライフタイム制御領域と、
を有し、
前記下面側ライフタイム制御領域は、前記配列方向において前記トランジスタ部の一部分に設けられ、他の部分には設けられていない、
半導体装置。 - 前記下面側ライフタイム制御領域は、前記配列方向において、前記ダイオード部の一部分に設けられ、他の部分には設けられていない、請求項1に記載の半導体装置。
- 前記ダイオード部は、前記半導体基板の下面に露出して設けられた第1導電型のカソード領域と、前記半導体基板の下面側に設けられた、電気的にフローティングとなっている第2導電型のフローティング領域と、を有し、
前記フローティング領域は、前記カソード領域の上方において、前記カソード領域の一部を覆っている、
請求項1または2に記載の半導体装置。 - 前記フローティング領域が、前記下面側ライフタイム制御領域よりも前記半導体基板の下面側に設けられる、請求項3に記載の半導体装置。
- 前記半導体基板の上面視で、前記フローティング領域の少なくとも一部が、前記下面側ライフタイム制御領域と重なる、請求項3または4に記載の半導体装置。
- 前記フローティング領域は、前記配列方向に複数設けられ、
前記半導体基板の上面視で、複数の前記フローティング領域のうち、少なくとも一つのフローティング領域は、前記配列方向において前記下面側ライフタイム制御領域と重ならない、請求項3から5のいずれか一項に記載の半導体装置。 - 前記下面側ライフタイム制御領域は、前記配列方向において、前記ダイオード部の全体に設けられる、請求項1に記載の半導体装置。
- 前記配列方向において、前記トランジスタ部における前記下面側ライフタイム制御領域の長さは、前記ダイオード部における前記下面側ライフタイム制御領域の長さよりも長い、請求項1から7のいずれか一項に記載の半導体装置。
- 前記半導体基板の上面側に、前記トランジスタ部から前記ダイオード部に渡って設けられ、ライフタイムキラーを含む上面側ライフタイム制御領域をさらに有し、
前記トランジスタ部において、前記下面側ライフタイム制御領域が前記上面側ライフタイム制御領域よりも、前記配列方向における前記ダイオード部の側に設けられる、
請求項1から8のいずれか一項に記載の半導体装置。 - 前記半導体基板の上面側に、前記トランジスタ部から前記ダイオード部に渡って設けられ、ライフタイムキラーを含む上面側ライフタイム制御領域をさらに有し、
前記トランジスタ部において、前記下面側ライフタイム制御領域が前記上面側ライフタイム制御領域よりも、前記配列方向における前記トランジスタ部の側に設けられる、
請求項1から8のいずれか一項に記載の半導体装置。 - 前記トランジスタ部は、前記半導体基板の下面と前記ドリフト領域との間に設けられた第2導電型のコレクタ領域をさらに有し、
前記配列方向において、前記トランジスタ部における前記上面側ライフタイム制御領域の端部から、前記トランジスタ部における前記下面側ライフタイム制御領域の端部へ至る経路の延長上に、前記コレクタ領域が設けられる、請求項9または10に記載の半導体装置。 - 前記ダイオード部において、前記下面側ライフタイム制御領域が前記上面側ライフタイム制御領域よりも、前記配列方向における前記トランジスタ部の側に設けられる、
請求項9から11のいずれか一項に記載の半導体装置。 - 前記下面側ライフタイム制御領域のライフタイムキラー濃度が、前記上面側ライフタイム制御領域のライフタイムキラー濃度よりも高い、請求項9から12のいずれか一項に記載の半導体装置。
- 前記配列方向において、前記トランジスタ部における前記上面側ライフタイム制御領域の長さが、前記トランジスタ部の長さの0.01倍以上0.15倍以下である、請求項9から13のいずれか一項に記載の半導体装置。
- 前記配列方向において、
前記トランジスタ部における前記上面側ライフタイム制御領域の端部と、前記トランジスタ部における前記下面側ライフタイム制御領域の端部との、前記半導体基板の下面と平行な方向の距離が、前記トランジスタ部における前記上面側ライフタイム制御領域の長さの0.25倍以上0.5倍以下である、請求項9から14のいずれか一項に記載の半導体装置。 - 前記下面側ライフタイム制御領域が、前記延伸方向において、前記上面側ライフタイム制御領域よりも外側まで設けられる、請求項9から15のいずれか一項に記載の半導体装置。
- 前記配列方向において、前記上面側ライフタイム制御領域の長さは、前記半導体基板の厚さよりも大きい、請求項9から16のいずれか一項に記載の半導体装置。
- 前記下面側ライフタイム制御領域は、前記半導体基板の深さ方向に複数設けられ、
前記トランジスタ部において、前記半導体基板の下面側に設けられた前記下面側ライフタイム制御領域の方が、前記半導体基板の上面側に設けられた前記下面側ライフタイム制御領域よりも、前記配列方向において前記ダイオード部の側に設けられる、請求項1から17のいずれか一項に記載の半導体装置。 - 前記トランジスタ部において、前記半導体基板の上面側に設けられた前記下面側ライフタイム制御領域の端部から、前記半導体基板の下面側に設けられた前記下面側ライフタイム制御領域の端部までが、凸形状となるように配置される、請求項18に記載の半導体装置。
- 前記ダイオード部において、前記半導体基板の下面側に設けられた前記下面側ライフタイム制御領域の方が、前記半導体基板の上面側に設けられた前記下面側ライフタイム制御領域よりも、前記配列方向において前記ダイオード部の側に設けられる、請求項18または19に記載の半導体装置。
- 前記半導体基板の下面側に設けられた前記下面側ライフタイム制御領域のライフタイムキラー濃度が、前記半導体基板の上面側に設けられた前記下面側ライフタイム制御領域のライフタイムキラー濃度よりも高い、請求項18から20のいずれか一項に記載の半導体装置。
- 前記トランジスタ部と前記ダイオード部との境界における前記下面側ライフタイム制御領域のライフタイムキラー濃度が、前記境界以外における前記下面側ライフタイム制御領域のライフタイムキラー濃度よりも高い、請求項1から21のいずれか一項に記載の半導体装置。
- 前記配列方向において、前記ダイオード部における前記下面側ライフタイム制御領域の長さが、前記ダイオード部の長さの0.015倍以上0.03倍以下である、請求項1、2および8から22のいずれか一項に記載の半導体装置。
- 前記ドリフト領域の下方に、前記トランジスタ部から前記ダイオード部に渡って設けられた第1導電型のバッファ領域をさらに備え、
前記下面側ライフタイム制御領域が、前記バッファ領域に設けられる、
請求項1から23のいずれか一項に記載の半導体装置。 - 前記ドリフト領域の下方に、前記トランジスタ部から前記ダイオード部に渡って設けられた第1導電型のバッファ領域をさらに備え、
前記下面側ライフタイム制御領域の下方に設けられた前記バッファ領域の厚さが、前記下面側ライフタイム制御領域の下方に設けられない前記バッファ領域の厚さよりも大きい、請求項1から23のいずれか一項に記載の半導体装置。
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