JPWO2017018275A1 - ガラス基板、積層基板、積層基板の製造方法、積層体、梱包体、およびガラス基板の製造方法 - Google Patents
ガラス基板、積層基板、積層基板の製造方法、積層体、梱包体、およびガラス基板の製造方法 Download PDFInfo
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Abstract
Description
本発明の積層基板の製造方法は、上記ガラス基板の凸面または凹面からなる曲面と、シリコンを含む基板の凸面または凹面からなる曲面とを、互いの曲面が倣うように貼り合わせる工程を有することを特徴とする。
本発明の積層体は、上記積層基板を構成するガラス基板に他のガラス基板を貼り合わせることにより形成されることを特徴とする。
ガラス原料を加熱して溶融ガラスを得る溶解工程と、
前記溶融ガラスを板状にしてガラスリボンを得る成形工程と、
前記ガラスリボンを徐冷する徐冷工程と、
前記ガラスリボンを切断してガラス基板を得る切断工程と、
前記ガラス基板の凹面と凸面とを判別する検査工程と、
前記凹面上および前記凸面上の少なくとも一方に印を付ける工程と、を有することにより上記ガラス基板を得ることを特徴とする。
樹脂20は、例えば、200〜400℃の温度に耐えられるものである。
50℃〜350℃での平均熱膨張係数は31〜50(×10−7/℃)であってもよく、32〜40(×10−7/℃)であってもよく、32〜36(×10−7/℃)であってもよく、34〜36(×10−7/℃)であってもよい。
50℃〜350℃での平均熱膨張係数は60〜75(×10−7/℃)であってもよく、67〜72(×10−7/℃)であってもよい。
50℃〜350℃での平均熱膨張係数は120〜135(×10−7/℃)であってもよく、125〜130(×10−7/℃)であってもよい。
20 樹脂
30 積層基板
G1 ガラス基板
Claims (22)
- シリコンを含む基板と積層されることにより積層基板を形成させるためのガラス基板であって、前記ガラス基板が凹面と凸面とを有し、前記凹面と前記凸面とを識別できる印を有するガラス基板。
- 前記凹面と前記凸面とを識別できる印は、前記凹面に形成され、互いに形状が異なる2つの印と、前記凸面に形成され、前記凹面の2つの印それぞれと対向する位置に対応する前記凹面の印と同一形状である2つの印とを含み、
前記凸面の2つの印同士を前記凸面上で最短となるように結んだ線が前記凸面上の重心を通らない請求項1に記載のガラス基板。 - 前記凹面と前記凸面とを識別できる印は、前記凹面に形成される、前記凹面上の重心からの距離が互いに異なる2つの印と、前記凸面に形成される、前記凹面の2つの印それぞれと対向する位置に、対応する前記凹面の印と同一形状である2つの印とを含み、
前記凸面の2つの印同士を前記凸面上で最短となるように結んだ線が前記凸面上の重心を通らない請求項1に記載のガラス基板。 - 前記凹面の印と前記凸面の印とが貫通孔である請求項1〜3のいずれか一項に記載のガラス基板。
- 前記凹面と前記凸面とを識別できる印は、前記凹面および前記凸面の少なくとも一方に形成される印であり、
前記凹面の印と前記凸面の印は、互いの印の、数、形状、および重心からの距離のうち少なくとも一つが異なる請求項1に記載のガラス基板。 - 前記印は、前記ガラス基板の端面の切欠きである請求項1〜5のいずれか一項に記載のガラス基板。
- 少なくとも一の主表面の面積が70〜2000cm2である請求項1〜6のいずれか一項に記載のガラス基板。
- 少なくとも一の主表面の形状が円形である請求項1〜7のいずれか一項に記載のガラス基板。
- ヤング率が65GPa以上である請求項1〜8のいずれか一項に記載のガラス基板。
- アルカリ金属酸化物を酸化物基準のモル百分率表示で0〜0.1%含む請求項1〜9のいずれか一項に記載のガラス基板。
- 板厚偏差が15μm以下である請求項1〜10のいずれか一項に記載のガラス基板。
- 前記凹面または前記凸面の少なくとも一方に遮光膜を有する請求項1〜11のいずれか一項に記載のガラス基板。
- 請求項1〜12のいずれか一項に記載のガラス基板の凸面とシリコンを含む基板とを貼り合わせることにより形成される積層基板。
- 請求項1〜12のいずれか一項に記載のガラス基板の凸面または凹面からなる曲面と、シリコンを含む基板の凸面または凹面からなる曲面とが、互いに倣うように貼り合わされてなる積層基板。
- 請求項1〜12のいずれか一項に記載のガラス基板の凸面または凹面からなる曲面と、シリコンを含む基板の凸面または凹面からなる曲面とを、互いの曲面が倣うように貼り合わせる工程を有する積層基板の製造方法。
- 前記シリコンを含む基板の曲面の形状を予め予測し、予測された前記曲面の形状と、前記ガラス基板の曲面の形状とが、互いに倣うように貼り合わせる工程を有する請求項15に記載の積層基板の製造方法。
- 請求項13または14に記載の積層基板を構成するガラス基板に他のガラス基板が貼り合わされてなる積層体。
- 請求項1〜12のいずれか一項に記載のガラス基板が2枚以上梱包されて形成され、前記ガラス基板の一のガラス基板の凸面が、他の一のガラス基板の凹面と対向するように梱包される梱包体。
- 請求項13または14に記載の積層基板が2枚以上梱包されて形成され、前記積層基板の一の積層基板を構成するシリコンを含む基板が、他の一の積層基板を構成するガラス基板の凹面と対向するように梱包される梱包体。
- 請求項17に記載の積層体が2枚以上梱包されて形成され、前記積層体の一の積層体を構成するシリコンを含む基板が、他の一の積層体を構成するガラス基板の凹面と対向するように梱包される梱包体。
- 前記ガラス基板の凹面が支持部材により4点で支持される請求項18〜20のいずれか一項に記載の梱包体。
- シリコンを含む基板と積層されることにより積層基板を形成させるためのガラス基板の製造方法であって、
ガラス原料を加熱して溶融ガラスを得る溶解工程と、
前記溶融ガラスを板状にしてガラスリボンを得る成形工程と、
前記ガラスリボンを徐冷する徐冷工程と、
前記ガラスリボンを切断してガラス基板を得る切断工程と、
前記ガラス基板の凹面と凸面とを判別する検査工程と、
前記凹面および前記凸面の少なくとも一方に印を付ける工程と、
を有することにより請求項1〜12のいずれか一項に記載のガラス基板を得る、ガラス基板の製造方法。
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