JPWO2015064642A1 - 配線基板およびこれを用いた実装構造体 - Google Patents
配線基板およびこれを用いた実装構造体 Download PDFInfo
- Publication number
- JPWO2015064642A1 JPWO2015064642A1 JP2015545271A JP2015545271A JPWO2015064642A1 JP WO2015064642 A1 JPWO2015064642 A1 JP WO2015064642A1 JP 2015545271 A JP2015545271 A JP 2015545271A JP 2015545271 A JP2015545271 A JP 2015545271A JP WO2015064642 A1 JPWO2015064642 A1 JP WO2015064642A1
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- wiring board
- layer
- resin
- inorganic insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920005989 resin Polymers 0.000 claims description 129
- 239000011347 resin Substances 0.000 claims description 129
- 229910052751 metal Inorganic materials 0.000 claims description 61
- 239000002184 metal Substances 0.000 claims description 61
- 239000002245 particle Substances 0.000 description 105
- 239000000758 substrate Substances 0.000 description 64
- 239000004020 conductor Substances 0.000 description 42
- 239000000945 filler Substances 0.000 description 24
- 238000000034 method Methods 0.000 description 22
- 238000010438 heat treatment Methods 0.000 description 12
- 239000002243 precursor Substances 0.000 description 12
- 239000000463 material Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 239000006061 abrasive grain Substances 0.000 description 9
- 239000000853 adhesive Substances 0.000 description 9
- 230000001070 adhesive effect Effects 0.000 description 9
- 239000000843 powder Substances 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
- 239000002904 solvent Substances 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 239000002002 slurry Substances 0.000 description 7
- 230000035882 stress Effects 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 238000007772 electroless plating Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000008646 thermal stress Effects 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- 238000005488 sandblasting Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 1
- 229920002799 BoPET Polymers 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229960003280 cupric chloride Drugs 0.000 description 1
- XLJMAIOERFSOGZ-UHFFFAOYSA-M cyanate Chemical compound [O-]C#N XLJMAIOERFSOGZ-UHFFFAOYSA-M 0.000 description 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920003192 poly(bis maleimide) Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000000930 thermomechanical effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
- H05K1/185—Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit
- H05K1/186—Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit manufactured by mounting on or connecting to patterned circuits before or during embedding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5383—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5384—Conductive vias through the substrate with or without pins, e.g. buried coaxial conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5386—Geometry or layout of the interconnection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5389—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/17—Structure, shape, material or disposition of the bump connectors after the connecting process of a plurality of bump connectors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0296—Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
- H05K1/0298—Multilayer circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/111—Pads for surface mounting, e.g. lay-out
- H05K1/112—Pads for surface mounting, e.g. lay-out directly combined with via connections
- H05K1/113—Via provided in pad; Pad over filled via
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/115—Via connections; Lands around holes or via connections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0044—Mechanical working of the substrate, e.g. drilling or punching
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4673—Application methods or materials of intermediate insulating layers not specially adapted to any one of the previous methods of adding a circuit layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4697—Manufacturing multilayer circuits having cavities, e.g. for mounting components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16227—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16235—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a via metallisation of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01028—Nickel [Ni]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/146—Mixed devices
- H01L2924/1461—MEMS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15313—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a land array, e.g. LGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1532—Connection portion the connection portion being formed on the die mounting surface of the substrate
- H01L2924/1533—Connection portion the connection portion being formed on the die mounting surface of the substrate the connection portion being formed both on the die mounting surface of the substrate and outside the die mounting surface of the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/157—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2924/15738—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950 C and less than 1550 C
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/157—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2924/15738—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950 C and less than 1550 C
- H01L2924/15747—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/20—Details of printed circuits not provided for in H05K2201/01 - H05K2201/10
- H05K2201/2072—Anchoring, i.e. one structure gripping into another
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
- H05K2203/025—Abrading, e.g. grinding or sand blasting
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Ceramic Engineering (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Structure Of Printed Boards (AREA)
Abstract
Description
2 電子部品
3 配線基板
6 枠体
7 絶縁層
33 凹部
33a 凹部側面
34 第1部分
35 第2部分
36 空隙
37 金属部材
38 窪み部
39 凸部
Claims (9)
- 絶縁層と、該絶縁層上に配置された枠体とを備え、
前記枠体は貫通孔を有し、
前記絶縁層は、前記枠体側の一主面に凹部を有しており、
平面視したときに、前記凹部は、前記貫通孔に位置する第1部分と、前記枠体に位置し、前記第1部分に連続する第2部分とを有し、該第2部分における前記枠体と前記絶縁層との間に空隙を有することを特徴とする配線基板。 - 前記第2部分は、前記第1部分を取り囲んでいることを特徴とする請求項1に記載の配線基板。
- 請求項1または2に記載の配線基板において、
前記絶縁層の前記凹部の側面に金属部材が配置されており、前記空隙が前記金属部材、前記枠体および前記絶縁層とで構成されていることを特徴とする配線基板。 - 請求項3に記載の配線基板において、
前記金属部材は、前記第1部分を取り囲んでいることを特徴とする配線基板。 - 請求項3または4に記載の配線基板において、
前記金属部材は、前記空隙側の側面に窪み部を有することを特徴とする配線基板。 - 請求項1乃至5のうちいずれかに記載の配線基板において、
前記枠体における前記貫通孔の内壁は、前記絶縁層側の一端部に前記貫通孔の内部へ突出した凸部を有することを特徴とする配線基板。 - 請求項6に記載の配線基板において、
前記凸部の前記絶縁層とは反対側の側面は、凹曲面状であることを特徴とする配線基板。 - 請求項1乃至7のうちいずれかに記載の配線基板において、
前記第2部分に位置する前記枠体の前記絶縁層側の面は、平面状であることを特徴とする配線基板。 - 請求項1乃至8のうちいずれかに記載の配線基板と、
前記貫通孔内における前記絶縁層上に配された電子部品と、
前記第1部分に配され、一部が前記空隙に入り込んだ樹脂部材とを備えたことを特徴とする実装構造体。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013225359 | 2013-10-30 | ||
JP2013225359 | 2013-10-30 | ||
PCT/JP2014/078770 WO2015064642A1 (ja) | 2013-10-30 | 2014-10-29 | 配線基板およびこれを用いた実装構造体 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2015064642A1 true JPWO2015064642A1 (ja) | 2017-03-09 |
JP6133432B2 JP6133432B2 (ja) | 2017-05-24 |
Family
ID=53004242
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015545271A Active JP6133432B2 (ja) | 2013-10-30 | 2014-10-29 | 配線基板およびこれを用いた実装構造体 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9936583B2 (ja) |
EP (1) | EP3065514A4 (ja) |
JP (1) | JP6133432B2 (ja) |
KR (1) | KR101835452B1 (ja) |
CN (1) | CN105659710B (ja) |
WO (1) | WO2015064642A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9609746B1 (en) * | 2015-12-14 | 2017-03-28 | Unimicron Technology Corp. | Circuit board structure and manufacturing method thereof |
JP6556092B2 (ja) * | 2016-04-26 | 2019-08-07 | 京セラ株式会社 | 印刷配線板およびその製造方法 |
JP6819268B2 (ja) * | 2016-12-15 | 2021-01-27 | 凸版印刷株式会社 | 配線基板、多層配線基板、及び配線基板の製造方法 |
JP6815880B2 (ja) * | 2017-01-25 | 2021-01-20 | 株式会社ディスコ | 半導体パッケージの製造方法 |
JP7105549B2 (ja) * | 2017-04-28 | 2022-07-25 | 日東電工株式会社 | 配線回路基板、および、撮像装置 |
US10685922B2 (en) * | 2017-05-09 | 2020-06-16 | Unimicron Technology Corp. | Package structure with structure reinforcing element and manufacturing method thereof |
US10950535B2 (en) * | 2017-05-09 | 2021-03-16 | Unimicron Technology Corp. | Package structure and method of manufacturing the same |
JP6820892B2 (ja) * | 2018-09-28 | 2021-01-27 | 京セラ株式会社 | 印刷配線板および印刷配線板の製造方法 |
JP7486934B2 (ja) | 2018-12-25 | 2024-05-20 | Tdk株式会社 | 回路基板 |
KR102196385B1 (ko) | 2020-05-04 | 2020-12-30 | 제엠제코(주) | 반도체 패키지 |
Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11195682A (ja) * | 1997-12-26 | 1999-07-21 | Fujitsu Ltd | 接着剤層の形成方法及び半導体装置の製造方法 |
US6162996A (en) * | 1994-03-23 | 2000-12-19 | Dyconex Patente Ag | Insulating foil circuit board with rigid and flexible sections |
JP2002094211A (ja) * | 2000-07-13 | 2002-03-29 | Ngk Spark Plug Co Ltd | 埋め込み樹脂及びそれを用いた配線基板並びにその埋め込み樹脂を用いた配線基板の製造方法 |
WO2005026761A1 (en) * | 2003-09-16 | 2005-03-24 | Koninklijke Philips Electronics N.V. | A method of manufacturing an electronic device and an electronic device |
WO2005039260A1 (en) * | 2003-10-15 | 2005-04-28 | Koninklijke Philips Electronics N.V. | Electronic device and method of manufacturing thereof |
WO2007043714A1 (ja) * | 2005-10-14 | 2007-04-19 | Ibiden Co., Ltd. | 多層プリント配線板およびその製造方法 |
US20090097214A1 (en) * | 2007-10-15 | 2009-04-16 | Samsung Techwin Co., Ltd | Electronic chip embedded circuit board and method of manufacturing the same |
WO2009054098A1 (ja) * | 2007-10-25 | 2009-04-30 | Panasonic Corporation | 部品内蔵配線基板および部品内蔵配線基板の製造方法 |
JP2010114434A (ja) * | 2008-10-08 | 2010-05-20 | Ngk Spark Plug Co Ltd | 部品内蔵配線基板及びその製造方法 |
JP2010192547A (ja) * | 2009-02-16 | 2010-09-02 | Ngk Spark Plug Co Ltd | 多層配線基板及びその製造方法 |
US7886433B2 (en) * | 2007-01-16 | 2011-02-15 | Samsung Electro-Mechanics Co., Ltd. | Method of manufacturing a component-embedded PCB |
US20120217049A1 (en) * | 2011-02-28 | 2012-08-30 | Ibiden Co., Ltd. | Wiring board with built-in imaging device |
WO2013047848A1 (ja) * | 2011-09-30 | 2013-04-04 | 京セラ株式会社 | 配線基板、部品内蔵基板および実装構造体 |
JP2013149874A (ja) * | 2012-01-23 | 2013-08-01 | Kyocer Slc Technologies Corp | 多数個取り配線基板の組立体および多数個取り配線基板の組立方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4602318A (en) * | 1981-04-14 | 1986-07-22 | Kollmorgen Technologies Corporation | Substrates to interconnect electronic components |
US4758927A (en) * | 1987-01-21 | 1988-07-19 | Tektronix, Inc. | Method of mounting a substrate structure to a circuit board |
US5784782A (en) * | 1996-09-06 | 1998-07-28 | International Business Machines Corporation | Method for fabricating printed circuit boards with cavities |
JP3976954B2 (ja) * | 1999-08-27 | 2007-09-19 | 新光電気工業株式会社 | 多層配線基板の製造方法及び半導体装置 |
US6876071B2 (en) * | 2001-06-30 | 2005-04-05 | Texas Instruments Incorporated | Masking layer in substrate cavity |
WO2007049417A1 (ja) * | 2005-10-24 | 2007-05-03 | Murata Manufacturing Co., Ltd. | 回路モジュールの製造方法および回路モジュール |
JP2007318089A (ja) * | 2006-04-25 | 2007-12-06 | Ngk Spark Plug Co Ltd | 配線基板 |
US7718901B2 (en) * | 2007-10-24 | 2010-05-18 | Ibiden Co., Ltd. | Electronic parts substrate and method for manufacturing the same |
JP5395360B2 (ja) * | 2008-02-25 | 2014-01-22 | 新光電気工業株式会社 | 電子部品内蔵基板の製造方法 |
JP5289996B2 (ja) * | 2009-02-16 | 2013-09-11 | 日本特殊陶業株式会社 | 補強材付き配線基板 |
JP5129783B2 (ja) | 2009-06-02 | 2013-01-30 | 日本特殊陶業株式会社 | 補強材付き配線基板及びその製造方法 |
JP5610064B2 (ja) * | 2011-04-01 | 2014-10-22 | 株式会社村田製作所 | 部品内蔵樹脂基板およびその製造方法 |
US20150077960A1 (en) * | 2013-09-19 | 2015-03-19 | Murata Manufacturing Co., Ltd. | Low-temperature packaging methodology for electronic devices and other devices |
-
2014
- 2014-10-29 EP EP14857525.1A patent/EP3065514A4/en not_active Withdrawn
- 2014-10-29 JP JP2015545271A patent/JP6133432B2/ja active Active
- 2014-10-29 US US15/028,998 patent/US9936583B2/en active Active
- 2014-10-29 KR KR1020167008915A patent/KR101835452B1/ko active IP Right Grant
- 2014-10-29 CN CN201480057466.3A patent/CN105659710B/zh active Active
- 2014-10-29 WO PCT/JP2014/078770 patent/WO2015064642A1/ja active Application Filing
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6162996A (en) * | 1994-03-23 | 2000-12-19 | Dyconex Patente Ag | Insulating foil circuit board with rigid and flexible sections |
JPH11195682A (ja) * | 1997-12-26 | 1999-07-21 | Fujitsu Ltd | 接着剤層の形成方法及び半導体装置の製造方法 |
JP2002094211A (ja) * | 2000-07-13 | 2002-03-29 | Ngk Spark Plug Co Ltd | 埋め込み樹脂及びそれを用いた配線基板並びにその埋め込み樹脂を用いた配線基板の製造方法 |
WO2005026761A1 (en) * | 2003-09-16 | 2005-03-24 | Koninklijke Philips Electronics N.V. | A method of manufacturing an electronic device and an electronic device |
WO2005039260A1 (en) * | 2003-10-15 | 2005-04-28 | Koninklijke Philips Electronics N.V. | Electronic device and method of manufacturing thereof |
WO2007043714A1 (ja) * | 2005-10-14 | 2007-04-19 | Ibiden Co., Ltd. | 多層プリント配線板およびその製造方法 |
US7886433B2 (en) * | 2007-01-16 | 2011-02-15 | Samsung Electro-Mechanics Co., Ltd. | Method of manufacturing a component-embedded PCB |
US20090097214A1 (en) * | 2007-10-15 | 2009-04-16 | Samsung Techwin Co., Ltd | Electronic chip embedded circuit board and method of manufacturing the same |
WO2009054098A1 (ja) * | 2007-10-25 | 2009-04-30 | Panasonic Corporation | 部品内蔵配線基板および部品内蔵配線基板の製造方法 |
JP2010114434A (ja) * | 2008-10-08 | 2010-05-20 | Ngk Spark Plug Co Ltd | 部品内蔵配線基板及びその製造方法 |
JP2010192547A (ja) * | 2009-02-16 | 2010-09-02 | Ngk Spark Plug Co Ltd | 多層配線基板及びその製造方法 |
US20120217049A1 (en) * | 2011-02-28 | 2012-08-30 | Ibiden Co., Ltd. | Wiring board with built-in imaging device |
WO2013047848A1 (ja) * | 2011-09-30 | 2013-04-04 | 京セラ株式会社 | 配線基板、部品内蔵基板および実装構造体 |
JP2013149874A (ja) * | 2012-01-23 | 2013-08-01 | Kyocer Slc Technologies Corp | 多数個取り配線基板の組立体および多数個取り配線基板の組立方法 |
Also Published As
Publication number | Publication date |
---|---|
JP6133432B2 (ja) | 2017-05-24 |
KR20160050084A (ko) | 2016-05-10 |
US20160278214A1 (en) | 2016-09-22 |
KR101835452B1 (ko) | 2018-03-08 |
CN105659710B (zh) | 2018-11-09 |
EP3065514A4 (en) | 2017-04-26 |
CN105659710A (zh) | 2016-06-08 |
EP3065514A1 (en) | 2016-09-07 |
WO2015064642A1 (ja) | 2015-05-07 |
US9936583B2 (en) | 2018-04-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6133432B2 (ja) | 配線基板およびこれを用いた実装構造体 | |
JP6099734B2 (ja) | 配線基板およびこれを用いた実装構造体 | |
JP5961703B2 (ja) | 配線基板およびその実装構造体 | |
JP6151724B2 (ja) | 実装構造体の製造方法 | |
JP2011249759A (ja) | 電子素子内蔵印刷回路基板及びその製造方法 | |
JP6294024B2 (ja) | 配線基板およびこれを用いた実装構造体 | |
JP6258347B2 (ja) | 配線基板およびこれを用いた実装構造体 | |
JP6105316B2 (ja) | 電子装置 | |
JP5988372B2 (ja) | 配線基板およびその実装構造体 | |
JP5933989B2 (ja) | 部品内蔵基板 | |
JP6096538B2 (ja) | 配線基板、これを用いた実装構造体および配線基板の製造方法 | |
JP2014027163A (ja) | 配線基板の製造方法、実装構造体の製造方法、配線基板および実装構造体 | |
JP5623364B2 (ja) | 配線基板、実装構造体および電子装置 | |
JP6133689B2 (ja) | 配線基板およびこれを用いた実装構造体 | |
JP6001439B2 (ja) | 配線基板および実装構造体 | |
JP2015012082A (ja) | 配線基板およびこれを用いた実装構造体 | |
JP2016167637A (ja) | 積層配線基板および積層体 | |
JP6633390B2 (ja) | 樹脂基板および実装構造体ならびに樹脂基板用シート | |
JP6001412B2 (ja) | 配線基板およびそれを用いた実装構造体 | |
JP5902559B2 (ja) | 配線基板およびその製造方法 | |
JP5952153B2 (ja) | 積層配線基板およびそれを用いた実装構造体 | |
JP2013093486A (ja) | 配線基板の製造方法およびそれを用いた実装構造体の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170214 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170308 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170321 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170419 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6133432 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |