JPWO2015045164A1 - 基板処理装置および半導体装置の製造方法 - Google Patents
基板処理装置および半導体装置の製造方法 Download PDFInfo
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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Abstract
Description
Claims (17)
- 第1の処理ガスと、プラズマ化された第2の処理ガスとを交互に処理容器に供給して基板を処理する基板処理装置であって、前記第1の処理ガスを供給する第1のガス供給系と、前記第2の処理ガスを供給する第2のガス供給系と、前記処理容器の上流に配置され、少なくとも前記第2の処理ガスをプラズマ化させるプラズマユニットと、前記第1の処理ガスと前記第2の処理ガスとが交互に供給されるように前記第1のガス供給系と前記第2のガス供給系を制御すると共に、前記第2の処理ガスの供給が開始される前から前記第2の処理ガスのプラズマ化に必要な電力印加を実行するように前記プラズマユニットを制御する制御部と、を備える基板処理装置。
- 前記制御部は、前記第2の処理ガスの供給が終了した後も前記電力印加を継続するように前記プラズマユニットを制御する請求項1に記載の基板処理装置。
- 前記制御部は、前記第1の処理ガスと前記第2の処理ガスのいずれも前記プラズマユニットに供給されていないときも前記電力印加を実行するように前記プラズマユニットを制御する請求項1または2に記載の基板処理装置。
- 前記制御部は、前記基板の処理工程中、常に前記電力印加を実行するように前記プラズマユニットを制御する請求項1から3のいずれかに記載の基板処理装置。
- 少なくとも流量を含む前記第1の処理ガスと前記第2の処理ガスの供給条件は、前記第1の処理ガスは前記プラズマユニットにおいてプラズマ化されず、前記第2の処理ガスは前記プラズマユニットにおいてプラズマ化されるように設定される請求項1から4のいずれかに記載の基板処理装置。
- 前記処理容器の上流であって前記プラズマユニットの下流に配置された、不活性ガスを供給する第3のガス供給系を備え、前記制御部は、前記第1の処理ガスと前記第2の処理ガスとを交互供給する際に各処理ガスが分離されるように前記第3のガス供給系を制御して前記不活性ガスを供給すると共に、前記不活性ガスの供給が終了する前から前記第2の処理ガスの供給を開始するように前記第2のガス供給系を制御する請求項1から5のいずれかに記載の基板処理装置。
- 前記制御部は、前記第2の処理ガスの供給中に前記不活性ガスの供給を終了した後、前記第2の処理ガスの供給中に前記不活性ガスの供給を開始するように前記第2のガス供給系と前記第3のガス供給系とを制御する請求項6に記載の基板処理装置。
- 前記基板の処理に寄与しない非処理ガスを前記プラズマユニットに供給する第4のガス供給系を備え、前記制御部は、前記第2の処理ガスの供給を開始する前に前記非処理ガスを前記プラズマユニットに供給するように前記第4のガス供給系を制御する請求項1から5のいずれかに記載の基板処理装置。
- 少なくとも流量を含む前記非処理ガスの供給条件は、前記非処理ガスが前記プラズマユニットにおいてプラズマ化されるように設定される請求項8に記載の基板処理装置。
- 少なくとも第1の処理ガスと第2の処理ガスを処理容器に供給して基板を処理する基板処理装置であって、前記第1の処理ガスの供給路を開閉する第1のバルブと、前記第2の処理ガスの供給路を開閉する第2のバルブと、前記処理容器の上流であって前記第2のバルブの下流に配置されたプラズマユニットと、前記第1の処理ガスと前記第2の処理ガスとが交互に供給されるように前記第1のバルブと前記第2のバルブの開閉を制御すると共に、前記第2のバルブが開かれる前から前記第2の処理ガスのプラズマ化に必要な電力印加を実行するように前記プラズマユニットを制御する制御部と、を備える基板処理装置。
- 前記制御部は、前記第2のバルブが閉じられた後も前記電力印加を継続するように前記プラズマユニットを制御する請求項10に記載の基板処理装置。
- 前記第1のバルブは前記プラズマユニットの上流に配置されると共に、少なくとも流量を含む前記第1の処理ガスと前記第2の処理ガスの供給条件は、前記第1の処理ガスが前記プラズマユニットにおいてプラズマ化されず、前記第2の処理ガスが前記プラズマユニットにおいてプラズマ化されるように設定される請求項10または11に記載の基板処理装置。
- 第1の処理ガスと、プラズマユニットによってプラズマ化された第2の処理ガスとを処理容器に交互に供給して基板を処理する半導体装置の製造方法であって、前記プラズマユニットにおいて前記第2の処理ガスのプラズマ化に必要な電力印加が実行されている状態で前記第2の処理ガスの供給の開始と終了を行う半導体装置の製造方法。
- 第1の処理ガスと、プラズマユニットによってプラズマ化された第2の処理ガスとを処理容器に交互に供給して基板を処理する半導体装置の製造方法であって、前記第2の処理ガスが前記プラズマユニットに供給されていないときに前記プラズマユニットにおいて前記第2の処理ガスのプラズマ化に必要な電力印加を開始する工程と、前記プラズマユニットにおいて前記電力印加が実行されている状態で前記第2の処理ガスの供給を開始する工程と、を有する半導体装置の製造方法。
- 前記第2の処理ガスの供給が終了した後も前記プラズマユニットにおいて前記電力印加を継続する工程と、を備える請求項14に記載の半導体装置の製造方法。
- 第1の処理ガスを基板の処理容器に供給する第1の工程と、不活性ガスをプラズマユニットの下流から前記処理容器に供給する第2の工程と、前記プラズマユニットにおいてプラズマ化された第2の処理ガスを前記処理容器に向けて供給する第3の工程と、不活性ガスを前記プラズマユニットの下流から前記処理容器に供給する第4の工程と、を有し、前記第3の工程では、前記第2の工程が終了する前に前記プラズマ化された第2の処理ガスの供給を開始すると共に、前記第4の工程が開始した後に前記プラズマ化された第2の処理ガスの供給を終了する半導体装置の製造方法。
- 第1の処理ガスを基板の処理容器に供給する第1の工程と、プラズマユニットによってプラズマ化された第2の処理ガスを前記処理容器に供給する第2の工程と、前記第2の工程を除く工程において、前記基板の処理に寄与しない非処理ガスを前記プラズマユニットに供給することによって前記プラズマユニットにおいてプラズマを生成させる第3の工程と、を有する半導体装置の製造方法。
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