JP2018024927A - 成膜装置、およびそれに用いるガス吐出部材 - Google Patents
成膜装置、およびそれに用いるガス吐出部材 Download PDFInfo
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- JP2018024927A JP2018024927A JP2016158706A JP2016158706A JP2018024927A JP 2018024927 A JP2018024927 A JP 2018024927A JP 2016158706 A JP2016158706 A JP 2016158706A JP 2016158706 A JP2016158706 A JP 2016158706A JP 2018024927 A JP2018024927 A JP 2018024927A
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- gas discharge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/45565—Shower nozzles
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
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- C23C16/14—Deposition of only one other metal element
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
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- H01L21/76841—Barrier, adhesion or liner layers
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- H01L21/76855—After-treatment introducing at least one additional element into the layer
- H01L21/76856—After-treatment introducing at least one additional element into the layer by treatment in plasmas or gaseous environments, e.g. nitriding a refractory metal liner
Abstract
【解決手段】成膜装置100は、ウエハWが収容される処理容器1と、処理容器1内でウエハが載置されるサセプタ2と、サセプタ2に載置されたウエハWに対向配置され、処理ガスをサセプタ2上のウエハWに向けて吐出するシャワーヘッド10と、シャワーヘッド10とサセプタ2との間にプラズマを生成して処理ガスを励起させる高周波電源41とを有し、プラズマにより励起された処理ガスによりウエハW上に所定の膜を成膜する。シャワーヘッド10は、サセプタ2に対向するガス吐出面17を有し、ガス吐出面17には複数のガス吐出孔15が形成され、ガス吐出面17における複数のガス吐出孔15が形成されたガス吐出孔形成領域18は、ガス吐出面17のウエハWに対応する領域よりも小さい成膜装置。
【選択図】図1
Description
以下の説明においては、プラズマCVDによりTiを含む金属膜としてTi膜を成膜する場合を例にとって説明する。
TiCl4ガス流量:1〜200mL/min(sccm)
Arガス流量:100〜10000mL/min(sccm)
H2ガス流量:1〜10000mL/min(sccm)
の範囲が好ましい。
TiCl4ガス流量:3〜50mL/min(sccm)
Arガス流量:100〜5000mL/min(sccm)
H2ガス流量:5〜5000mL/min(sccm)
である。
また、H2ガス/Arガスの流量比は、0.001〜50が好ましい。
図14は、ナローシャワーヘッドを用いてTi膜を成膜した場合における、成膜時間と、ウエハWのセンターおよび外周の膜厚および平均膜厚との関係を示す図であり、(a)はSiO2膜上、(b)はSi基板上の結果である。図7と対比すると明らかなように、従来シャワーヘッドを用いた場合は成膜時間が長くなるとセンターと外周の膜厚差が広がるのに対し、ナローシャワーヘッドを用いることにより、成膜時間が長くなってもセンターと外周の膜厚差が広がらないことがわかる。また、図15は、ナローシャワーヘッドを用いてTi膜を成膜した場合における、各成膜時間での径方向の膜厚分布を示す図であり、(a)はSiO2膜上、(b)はSi基板上の結果である。図8と対比すると明らかなように、従来のシャワーヘッドを用いた場合はウエハの外周部分で膜厚が急激に薄くなるのに対し、ナローシャワーヘッドを用いることによりウエハ外周部分の膜厚が従来シャワーヘッドよりも厚くなることがわかる。
例えば、本例においては、原料ガス、還元ガスを同時に供給して成膜する場合について示したが、成膜ガスと還元ガスとの供給を、Arガス等の不活性ガスによるパージを挟んで交互に繰り返してプラズマを生成した状態で原子層堆積法(ALD法)により成膜する場合も含まれる。
2;サセプタ
5;ヒーター
10;シャワーヘッド
12;シャワープレート
15;ガス吐出孔
17;ガス吐出面
18;ガス吐出孔形成領域
20;ガス供給機構
21;TiCl4ガス供給源
22;Arガス供給源
23;H2ガス供給源
41;高周波電源
43;インピーダンス調整回路
53;排気装置
60;制御部
100;成膜装置
110;Si基板
111;層間絶縁膜
112;コンタクトホール
113;Ti膜
114;TiSix膜
W;半導体ウエハ
Claims (14)
- 被処理基板が収容される処理容器と、
前記処理容器内で被処理基板が載置される載置台と、
前記載置台に載置された被処理基板に対向配置され、処理ガスを前記載置台上の被処理基板に向けて吐出するガス吐出部材と、
前記ガス吐出部材と前記載置台との間にプラズマを生成して前記処理ガスを励起させるプラズマ生成手段と
を有し、プラズマにより励起された処理ガスにより被処理基板上に所定の膜を成膜する成膜装置であって、
前記ガス吐出部材は、前記載置台に対向するガス吐出面を有し、前記ガス吐出面には、複数のガス吐出孔が形成され、
前記ガス吐出面における前記複数のガス吐出孔が形成されたガス吐出孔形成領域は、前記ガス吐出面の被処理基板に対応する領域よりも小さいことを特徴とする成膜装置。 - 前記ガス吐出面における、前記ガス吐出孔形成領域と、前記被処理基板に対応する領域とは同心状をなしており、前記ガス吐出孔形成領域の直径は、前記被処理基板に対応する領域の直径よりも小さいことを特徴とする請求項1に記載の成膜装置。
- 前記ガス吐出孔形成領域の直径の、前記被処理基板に対応する領域の直径に対する割合は、66.6〜93.4%であることを特徴とする請求項2に記載の成膜装置。
- 前記ガス吐出孔形成領域の直径の、前記被処理基板に対応する領域の直径に対する割合は、73.3〜86.7%であることを特徴とする請求項2に記載の成膜装置。
- 前記ガス吐出部材から吐出される処理ガスは、原料ガスであるTiCl4ガス、還元ガスであるH2ガス、プラズマ生成ガスであるArガスであり、被処理基板上にTiを含む金属膜を成膜することを特徴とする請求項1から請求項4のいずれか1項に記載の成膜装置。
- 前記TiCl4ガスが前記プラズマにより励起されて、活性種として主にTiCl3が生成されることを特徴とする請求項5に記載の成膜装置。
- 前記載置台上の被処理基板を加熱する加熱機構をさらに有し、成膜の際に、前記加熱機構により、被処理基板が350〜500℃の温度に加熱されることを特徴とする請求項6に記載の成膜装置。
- 成膜の際に、前記ガス吐出部材から吐出されるガス流量が、
TiCl4ガス:1〜200mL/min(sccm)、
H2ガス:1〜10000mL/min(sccm)、
Arガス流量:100〜10000mL/min(sccm)
であることを特徴とする請求項6または請求項7に記載の成膜装置。 - 前記載置台に接続される伝送路に設けられたインピーダンス調整回路をさらに有し、該インピーダンス調整回路により、プラズマから見た前記伝送路のインピーダンスを低下させてプラズマから基板に流れる電流を増加させ、Arイオンを高エネルギー化することを特徴とする請求項5から請求項8のいずれか1項に記載の成膜装置。
- 前記プラズマ生成手段は、前記載置台を下部電極とし、ガス吐出部材を上部電極として、前記上部電極と前記下部電極との間に高周波電界を形成することによりプラズマを生成することを特徴とする請求項1から請求項9のいずれか1項に記載の成膜装置。
- 処理容器内において、載置台に載置された被処理基板に対向配置され、処理ガスを前記載置台上の被処理基板に向けて吐出し、前記載置台との間にプラズマが生成された状態で、前記処理ガスにより被処理基板上に所定の膜が成膜されるようにしたガス吐出部材であって、
前記載置台に対向するガス吐出面を有し、前記ガス吐出面には、複数のガス吐出孔が形成され、
前記ガス吐出面における前記複数のガス吐出孔が形成されたガス吐出孔形成領域は、前記ガス吐出面の被処理基板に対応する領域よりも小さいことを特徴とするガス吐出部材。 - 前記ガス吐出面における、前記ガス吐出孔形成領域と、前記被処理基板に対応する領域とは同心状をなしており、前記ガス吐出孔形成領域の直径は、前記被処理基板に対応する領域の直径よりも小さいことを特徴とする請求項11に記載のガス吐出部材。
- 前記ガス吐出孔形成領域の直径の、前記被処理基板に対応する領域の直径に対する割合は、66.6〜93.4%であることを特徴とする請求項12に記載のガス吐出部材。
- 前記ガス吐出孔形成領域の直径の、前記被処理基板に対応する領域の直径に対する割合は、73.3〜86.7%であることを特徴とする請求項12に記載のガス吐出部材。
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WO2022050136A1 (ja) * | 2020-09-07 | 2022-03-10 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
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