JPWO2012020682A1 - 結晶シリコン系太陽電池 - Google Patents
結晶シリコン系太陽電池 Download PDFInfo
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- 229910021419 crystalline silicon Inorganic materials 0.000 title claims abstract description 45
- 239000010409 thin film Substances 0.000 claims abstract description 122
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 118
- 239000010703 silicon Substances 0.000 claims abstract description 118
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 117
- 239000000758 substrate Substances 0.000 claims abstract description 114
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 74
- 239000010408 film Substances 0.000 claims abstract description 60
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 9
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 9
- 238000006243 chemical reaction Methods 0.000 abstract description 21
- 239000010410 layer Substances 0.000 description 308
- 229910021417 amorphous silicon Inorganic materials 0.000 description 46
- 230000015572 biosynthetic process Effects 0.000 description 17
- 239000007789 gas Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 15
- 239000012535 impurity Substances 0.000 description 14
- 230000007423 decrease Effects 0.000 description 10
- 239000000969 carrier Substances 0.000 description 9
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- 230000007547 defect Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
- 239000002019 doping agent Substances 0.000 description 6
- 238000000605 extraction Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 6
- 229910001887 tin oxide Inorganic materials 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 238000002441 X-ray diffraction Methods 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 230000031700 light absorption Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 230000006798 recombination Effects 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 5
- 238000000137 annealing Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 238000005452 bending Methods 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 4
- 229910003437 indium oxide Inorganic materials 0.000 description 4
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 238000005215 recombination Methods 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 239000003574 free electron Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 206010021143 Hypoxia Diseases 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000003795 desorption Methods 0.000 description 2
- 238000007865 diluting Methods 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000005038 ethylene vinyl acetate Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N isopropyl alcohol Natural products CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 238000004549 pulsed laser deposition Methods 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 238000000391 spectroscopic ellipsometry Methods 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- -1 MgO Chemical class 0.000 description 1
- 238000001237 Raman spectrum Methods 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- DQXBYHZEEUGOBF-UHFFFAOYSA-N but-3-enoic acid;ethene Chemical compound C=C.OC(=O)CC=C DQXBYHZEEUGOBF-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000701 coagulant Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
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- 230000005611 electricity Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 125000004437 phosphorous atom Chemical group 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
- H01L31/022475—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers composed of indium tin oxide [ITO]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type
- H01L31/0745—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
- H01L31/0747—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells; solar cells
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
- H01L31/202—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic System
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Abstract
Description
(ii)合計膜厚が50〜120nmである;
(iii)前記基板側導電層のキャリア密度が、前記表面側導電層のキャリア密度よりも大きく、かつ前記表面側導電層のキャリア密度が、1〜4×1020cm−3である。
(膜厚)
透明電極の膜厚は、SEM(フィールドエミッション型走査型電子顕微鏡S4800、日立ハイテクノロジーズ社製)を用い、10万倍の倍率で観察して求めた。
ホール測定用のサンプルとして、無アルカリガラス(商品名「OA−10」、日本電気硝子社製)上に、各実施例および比較例における基板側ITO層61Aおよび表面側ITO層61Bのそれぞれと同一の製膜条件でITO膜を形成した。このサンプルを1cm四方に折り割りし、その4つの角に金属インジウムを電極として融着した。磁力3500ガウスで、基板の対角方向に1mAの電流を流した際の電位差を基に、van der pauw法によりホール移動度を測定し、キャリア密度を算出した。
上記ホール測定用のサンプルと同一の無アルカリガラス上にITO膜が形成されたサンプルを用いて、X線回折法により、ピークの有無を識別することによって、透明導電層の結晶性を評価した。X線回折測定は、2θ/θ法により行い、2θの測定範囲を20〜80°とした。
第1の透明電極層および第2の透明電極層が製膜された後、集電極が形成される前のセルを、第1の透明電極層側(光入射側)が上面となるように、水平な台上に静置し、目視にて反りの有無を確認した。
ソーラーシミュレータにより、結晶質シリコン系薄膜太陽電池にAM1.5の光を100mW/cm2の光量で照射して、開放電圧(Voc)、短絡電流密度(Jsc)、曲線因子(F.F.)および変換効率(Eff)を測定した。
図1に模式的に示す結晶シリコン系太陽電池が作製された。本実施例の結晶シリコン系太陽電池はヘテロ接合太陽電池であり、n型単結晶シリコン基板1の両面にそれぞれにテクスチャを有する。n型単結晶シリコン基板1の光入射面側には、第1の真性非晶質シリコン層21/p型非晶質シリコン層41/第1の透明電極層61/集電極71がこの順に形成されている。第1の透明電極層は、基板側導電層61A上に表面側導電層61Bを有する2層構成である。n型単結晶シリコン基板1の裏面側には、第2の真性非晶質シリコン層22/n型非晶質シリコン層42/第2の透明電極層62/集電極72がこの順に形成されている。この結晶シリコン系太陽電池は、以下のようにして製造された。
実施例1の第1の透明電極層61の形成において、基板側ITO層61Aおよび表面側ITO層61Bの製膜条件(ターゲット中の酸化錫含有量、基板温度、圧力、パワー密度、キャリアガス導入量、および膜厚)が表1に示すように変更された。それ以外は実施例1と同様にして、図1に模式的に示される結晶シリコン系太陽電池が作製された。
実施例1の第1の透明電極層61の形成において、基板側ITO層61Aが製膜されず、ITO層61Bのみが90nmの膜厚で製膜された。それ以外は実施例1と同様にして、結晶シリコン系太陽電池が作製された。
21、22 真性シリコン系薄膜
41、42 導電型シリコン系薄膜
61、62 透明電極層
61A 基板側導電層
61B 表面側導電層
71、72 集電極
Claims (8)
- 導電型単結晶シリコン基板の一方の面に一導電型シリコン系薄膜および第1の透明電極層をこの順に有し、前記導電型単結晶シリコン基板の他方の面に逆導電型シリコン系薄膜および第2の透明電極層をこの順に有する結晶シリコン系太陽電池であって、
前記第1の透明電極層および前記第2の透明電極層は、いずれも透明導電性金属酸化物からなり、
前記第1の透明電極層が、下記(i)〜(iii)を満たす、結晶シリコン系太陽電池:
(i)基板側導電層および表面側導電層の少なくとも2層を有する;
(ii)合計膜厚が50〜120nmである;
(iii)前記基板側導電層のキャリア密度が、前記表面側導電層のキャリア密度よりも大きく、かつ前記表面側導電層のキャリア密度が、1〜4×1020cm−3である。 - 前記導電型単結晶シリコン基板と一導電型シリコン系薄膜との間に第1の真性シリコン系薄膜を有し、前記導電型単結晶シリコン基板と前記逆導電型シリコン系薄膜との間に第2の真性シリコン系薄膜を有する、請求項1に記載の結晶シリコン系太陽電池。
- 前記基板側導電層の膜厚dAが、5nm〜40nmである、請求項1または2に記載の結晶シリコン系太陽電池。
- 前記基板側導電層の膜厚dAおよび前記表面側導電層の膜厚dBが、0.5≦dB/(dA+dB)≦0.95を満たす、請求項1〜3のいずれか1項に記載の結晶シリコン系太陽電池。
- 前記基板側導電層および前記表面側導電層が、完全結晶化されていない層である、請求項1〜4のいずれか1項に記載の結晶シリコン系太陽電池。
- 前記基板側導電層および前記表面側導電層が非晶質層である、請求項5に記載の結晶シリコン系太陽電池。
- 前記導電型単結晶シリコン基板の厚みが250μm以下である、請求項1〜6のいずれか1項に記載の結晶シリコン系太陽電池。
- 前記第1の透明電極層および前記第2の透明電極層上のそれぞれに、さらに集電極を有する、請求項1〜7のいずれか1項に記載の結晶シリコン系太陽電池。
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Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013141232A1 (ja) * | 2012-03-23 | 2013-09-26 | 三洋電機株式会社 | 太陽電池及びその製造方法 |
CN103367477A (zh) * | 2012-03-30 | 2013-10-23 | 清华大学 | 太阳能电池 |
JP5975841B2 (ja) * | 2012-10-17 | 2016-08-23 | 三菱電機株式会社 | 光起電力素子の製造方法及び光起電力素子 |
KR101923728B1 (ko) | 2013-02-06 | 2018-11-29 | 한국전자통신연구원 | 태양전지 |
JP2014175441A (ja) * | 2013-03-08 | 2014-09-22 | Kaneka Corp | 結晶シリコン系太陽電池およびその製造方法 |
US8945971B2 (en) * | 2013-03-12 | 2015-02-03 | Taiwan Semiconductor Manufacturing Co., Ltd. | Wafer warpage reduction |
JP6502716B2 (ja) * | 2015-03-25 | 2019-04-17 | 株式会社カネカ | 太陽電池および太陽電池モジュール |
US9911935B2 (en) * | 2015-09-04 | 2018-03-06 | International Business Machines Corporation | Transparent conducting oxide as top-electrode in perovskite solar cell by non-sputtering process |
CN106816494A (zh) * | 2015-12-02 | 2017-06-09 | 钧石(中国)能源有限公司 | 一种异质结太阳能电池降低串联电阻的方法 |
KR101821394B1 (ko) * | 2016-01-14 | 2018-01-23 | 엘지전자 주식회사 | 태양전지 |
CA3016548A1 (en) | 2016-03-04 | 2017-09-08 | Scott R. Hammond | Systems and methods for organic semiconductor devices with sputtered contact layers |
US20170317305A1 (en) * | 2016-04-28 | 2017-11-02 | Solarwindow Technologies, Inc. | Systems and methods for transparent organic photovoltaic devices |
JP2019021599A (ja) | 2017-07-21 | 2019-02-07 | 株式会社東芝 | 透明電極、およびその製造方法、ならびにその透明電極を用いた電子デバイス |
JP6782211B2 (ja) * | 2017-09-08 | 2020-11-11 | 株式会社東芝 | 透明電極、それを用いた素子、および素子の製造方法 |
JP6609349B2 (ja) * | 2018-06-11 | 2019-11-20 | 株式会社カネカ | 結晶シリコン系太陽電池の製造方法 |
CN112864283A (zh) * | 2019-11-08 | 2021-05-28 | 福建钜能电力有限公司 | 一种提升异质结太阳能电池电学性能的工艺方法 |
CN112216747B (zh) * | 2020-09-22 | 2022-07-15 | 长沙壹纳光电材料有限公司 | 一种异质结太阳能电池及其制备方法与应用 |
CN112885909A (zh) * | 2021-01-30 | 2021-06-01 | 宣城睿晖宣晟企业管理中心合伙企业(有限合伙) | 一种异质结电池及其制备方法 |
CN114551610A (zh) * | 2022-03-11 | 2022-05-27 | 浙江爱旭太阳能科技有限公司 | 一种太阳能电池、电极结构、电池组件、发电系统及制备方法 |
CN116722063B (zh) * | 2023-08-10 | 2023-10-31 | 太原国科半导体光电研究院有限公司 | 一种平面结构超晶格红外探测器及其制备方法 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01205474A (ja) * | 1988-02-10 | 1989-08-17 | Sanyo Electric Co Ltd | 光電変換装置 |
JPH10135497A (ja) * | 1996-10-31 | 1998-05-22 | Sanyo Electric Co Ltd | 太陽電池素子及び太陽電池モジュール |
JP2001189478A (ja) * | 1999-12-28 | 2001-07-10 | Sanyo Electric Co Ltd | 半導体素子及びその製造方法 |
JP2002208715A (ja) * | 2001-01-09 | 2002-07-26 | Fuji Electric Co Ltd | 光起電力素子およびその製造方法 |
JP2002299658A (ja) * | 2001-03-30 | 2002-10-11 | Sanyo Electric Co Ltd | 光起電力素子 |
JP2003273380A (ja) * | 2002-03-19 | 2003-09-26 | Sanyo Electric Co Ltd | 光起電力素子、及び光起電力素子の製造方法 |
JP2003347571A (ja) * | 2001-09-28 | 2003-12-05 | Sanyo Electric Co Ltd | 光起電力素子及び光起電力装置 |
JP2005136125A (ja) * | 2003-10-30 | 2005-05-26 | Kyocera Corp | 光電変換装置 |
JP2007294830A (ja) * | 2005-06-16 | 2007-11-08 | Sanyo Electric Co Ltd | 太陽電池モジュールの製造方法 |
JP2008028133A (ja) * | 2006-07-20 | 2008-02-07 | Sanyo Electric Co Ltd | 太陽電池モジュール |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2912506B2 (ja) * | 1992-10-21 | 1999-06-28 | シャープ株式会社 | 透明導電膜の形成方法 |
US6344608B2 (en) * | 1998-06-30 | 2002-02-05 | Canon Kabushiki Kaisha | Photovoltaic element |
ES2365904T3 (es) * | 2004-01-13 | 2011-10-13 | Sanyo Electric Co., Ltd. | Dispositivo fotovoltaico. |
CN101552296B (zh) * | 2008-04-03 | 2011-06-08 | 清华大学 | 太阳能电池 |
-
2011
- 2011-08-03 JP JP2012528653A patent/JPWO2012020682A1/ja active Pending
- 2011-08-03 US US13/816,216 patent/US20130146132A1/en not_active Abandoned
- 2011-08-03 WO PCT/JP2011/067783 patent/WO2012020682A1/ja active Application Filing
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01205474A (ja) * | 1988-02-10 | 1989-08-17 | Sanyo Electric Co Ltd | 光電変換装置 |
JPH10135497A (ja) * | 1996-10-31 | 1998-05-22 | Sanyo Electric Co Ltd | 太陽電池素子及び太陽電池モジュール |
JP2001189478A (ja) * | 1999-12-28 | 2001-07-10 | Sanyo Electric Co Ltd | 半導体素子及びその製造方法 |
JP2002208715A (ja) * | 2001-01-09 | 2002-07-26 | Fuji Electric Co Ltd | 光起電力素子およびその製造方法 |
JP2002299658A (ja) * | 2001-03-30 | 2002-10-11 | Sanyo Electric Co Ltd | 光起電力素子 |
JP2003347571A (ja) * | 2001-09-28 | 2003-12-05 | Sanyo Electric Co Ltd | 光起電力素子及び光起電力装置 |
JP2003273380A (ja) * | 2002-03-19 | 2003-09-26 | Sanyo Electric Co Ltd | 光起電力素子、及び光起電力素子の製造方法 |
JP2005136125A (ja) * | 2003-10-30 | 2005-05-26 | Kyocera Corp | 光電変換装置 |
JP2007294830A (ja) * | 2005-06-16 | 2007-11-08 | Sanyo Electric Co Ltd | 太陽電池モジュールの製造方法 |
JP2008028133A (ja) * | 2006-07-20 | 2008-02-07 | Sanyo Electric Co Ltd | 太陽電池モジュール |
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