JPWO2011070739A1 - 半導体封止用エポキシ樹脂組成物、その硬化体及び半導体装置 - Google Patents
半導体封止用エポキシ樹脂組成物、その硬化体及び半導体装置 Download PDFInfo
- Publication number
- JPWO2011070739A1 JPWO2011070739A1 JP2011545066A JP2011545066A JPWO2011070739A1 JP WO2011070739 A1 JPWO2011070739 A1 JP WO2011070739A1 JP 2011545066 A JP2011545066 A JP 2011545066A JP 2011545066 A JP2011545066 A JP 2011545066A JP WO2011070739 A1 JPWO2011070739 A1 JP WO2011070739A1
- Authority
- JP
- Japan
- Prior art keywords
- epoxy resin
- resin composition
- group
- semiconductor
- copper wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/40—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
- C08G59/62—Alcohols or phenols
- C08G59/621—Phenols
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/68—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the catalysts used
- C08G59/688—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the catalysts used containing phosphorus
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/18—Oxygen-containing compounds, e.g. metal carbonyls
- C08K3/24—Acids; Salts thereof
- C08K3/26—Carbonates; Bicarbonates
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L63/00—Compositions of epoxy resins; Compositions of derivatives of epoxy resins
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/293—Organic, e.g. plastic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3164—Partial encapsulation or coating the coating being a foil
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05617—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/05624—Aluminium [Al] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/43—Manufacturing methods
- H01L2224/432—Mechanical processes
- H01L2224/4321—Pulling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/4501—Shape
- H01L2224/45012—Cross-sectional shape
- H01L2224/45015—Cross-sectional shape being circular
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45147—Copper (Cu) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/4554—Coating
- H01L2224/45565—Single coating layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/4554—Coating
- H01L2224/45599—Material
- H01L2224/456—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45663—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/45664—Palladium (Pd) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48599—Principal constituent of the connecting portion of the wire connector being Gold (Au)
- H01L2224/486—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/48617—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950 °C
- H01L2224/48624—Aluminium (Al) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48799—Principal constituent of the connecting portion of the wire connector being Copper (Cu)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/831—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
- H01L2224/83101—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
- H01L2224/83855—Hardening the adhesive by curing, i.e. thermosetting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49503—Lead-frames or other flat leads characterised by the die pad
- H01L23/49513—Lead-frames or other flat leads characterised by the die pad having bonding material between chip and die pad
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00015—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed as prior art
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01012—Magnesium [Mg]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01014—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01016—Sulfur [S]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01018—Argon [Ar]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01019—Potassium [K]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0102—Calcium [Ca]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01022—Titanium [Ti]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01023—Vanadium [V]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01027—Cobalt [Co]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0103—Zinc [Zn]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01038—Strontium [Sr]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0104—Zirconium [Zr]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01046—Palladium [Pd]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01056—Barium [Ba]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01057—Lanthanum [La]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01075—Rhenium [Re]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01083—Bismuth [Bi]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/011—Groups of the periodic table
- H01L2924/01105—Rare earth metals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12044—OLED
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2924/15788—Glasses, e.g. amorphous oxides, nitrides or fluorides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Polymers & Plastics (AREA)
- Medicinal Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Epoxy Resins (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Wire Bonding (AREA)
Abstract
Description
MaAlb(OH)2a+3b−2c(CO3)c・mH2O (1)
〔式(1)中、Mは少なくともMgを含む金属元素を表し、a、b、cは、それぞれ2≦a≦8、1≦b≦3、0.5≦c≦2を満たす数であり、mは0以上の整数である。〕
分析条件は、以下の通りである。
・分析装置:ダイオネクス社製「ICS2000型」
・カラム:ダイオネクス社製「AS17」
・流速:1.5ml/min
・検出器:電気伝導度検出器
・溶媒:水酸化カリウム(グラジエント 1mL〜35mM)
・保持時間:亜硫酸イオン12.7分、塩化物イオン6.0分、ギ酸3.6分、酢酸2.9分
BA−1:ビフェニレン骨格を有するフェノールアラルキル型エポキシ樹脂(上記式(2)において、Ar1がフェニレン基であり、Ar2がビフェニレン基であり、gが0であり、hが0であるエポキシ樹脂、日本化薬(株)製「NC3000」、軟化点58℃、エポキシ当量276、加水分解塩素230ppm)。
BA−2:ビフェニレン骨格を有するフェノールアラルキル型エポキシ樹脂(BA−1の汎用品、軟化点55℃、エポキシ当量283、加水分解塩素3000ppm)。
BP−1:ビフェニル型エポキシ樹脂(上記式(3)において、3位,3'位及び5位,5'位のR9がメチル基、2位,2'位及び6位,6'位のR9が水素原子であるエポキシ樹脂、ジャパンエポキシレジン(株)製「YX4000H」、融点105℃、エポキシ当量191、加水分解塩素150ppm)。
BP−2:ビフェニル型エポキシ樹脂(上記式(3)において、3位,3'位及び5位,5'位のR9がメチル基、2位,2'位及び6位,6'位のR9が水素原子であるエポキシ樹脂、ジャパンエポキシレジン(株)製「YX4000」、融点105℃、エポキシ当量185、加水分解性塩素670ppm)。
BP−3:ビフェニル型エポキシ樹脂(上記式(3)において、3位,3'位及び5位,5'位のR9がメチル基、2位,2'位及び6位,6'位のR9が水素原子であるエポキシ樹脂を再結晶法により精製したエポキシ樹脂、三菱化学(株)製「YX4000UH」、融点113℃、エポキシ当量177、加水分解性塩素15ppm未満)。
HA−1:ビフェニレン骨格を有するフェノールアラルキル樹脂(上記式(5)において、iが0、jが0、Ar3がフェニレン基、Ar4がビフェニレン基であるフェノールアラルキル樹脂、明和化成(株)製「MEH−7851SS」、軟化点65℃、水酸基当量203)
HB−1:フェノールアラルキル樹脂(上記式(5)において、iが0、jが0、Ar3がフェニレン基、Ar4がフェニレン基であるフェノールアラルキル樹脂、三井化学(株)製「XLC−2L」、水酸基当量175、150℃の溶融粘度360mPa・s)
溶融球状シリカ(平均粒径26.5μm、105μm以上の粒子1%以下、電気化学工業(株)製「FB−820」)
ハイドロタルサイト(上記式(1)において、aが4.3であり、bが2であり、cが1であるハイドロタルサイト、協和化学工業(株)製「DHT−4A(登録商標)」)
A:トリフェニルホスフィン(TPP、ケイ・アイ化成(株)製「PP360」)の1,4−ベンゾキノン付加物
B:トリフェニルホスフィン(TPP、ケイ・アイ化成(株)製「PP360」)
C−1:γ−グリシドキプロピルトリメトキシシラン
C−2:γ−メルカプトプロピルトリエトキシシラン
<難燃剤>
水酸化アルミニウム(住友化学(株)製、CL−310、平均粒径9.6μm、比表面積1.1m2/g)
(実施例1)
エポキシ樹脂BA−1(5.91質量部)と、硬化剤HA−1(4.34質量部)と、充填材として溶融球状シリカ(86.40質量部)と、中和剤としてハイドロタルサイト(0.30質量部)と、硬化促進剤A(0.50質量部)と、カップリング剤C−1(0.25質量部)と、着色剤としてカーボンブラック(0.30質量部)と、離型剤としてカルナバワックス(0.50質量部)と、難燃剤として水酸化アルミニウム(1.50質量部)を、ミキサーを用いて15〜28℃で混合し、次いで70℃〜100℃でロール混練した。冷却後、粉砕してエポキシ樹脂組成物を得た。
表1に記載の半導体封止用エポキシ樹脂組成物配合に従い、実施例1と同様にして半導体封止用エポキシ樹脂組成物を得た。表1中、各成分の単位は、質量部である。
表2に記載の半導体封止用エポキシ樹脂組成物配合に従い、実施例1と同様にして半導体封止用エポキシ樹脂組成物を得た。表2中、各成分の単位は、質量部である。
アルミニウム製電極パッドを備えるTEG(TEST ELEMENT GROUP)チップ(3.5mm×3.5mm)を352ピンBGA(基板は厚さ0.56mm、ビスマレイミド・トリアジン樹脂/ガラスクロス基板、パッケージサイズは30mm×30mm、厚さ1.17mm)のダイパッド部に接着し、TEGチップのアルミニウム製電極パッドと基板の電極パッドとをデイジーチェーン接続となるように銅ワイヤ4Nを用いてワイヤピッチ80μmでワイヤボンディングした。これを、低圧トランスファー成形機(TOWA製「Yシリーズ」)を用いて、金型温度175℃、注入圧力6.9MPa、硬化時間2分の条件で実施例1〜12又は比較例1〜6のいずれかのエポキシ樹脂組成物により封止成形して、352ピンBGAパッケージを作製した。このパッケージを175℃、4時間の条件で後硬化して半導体装置を得た。
(1)エポキシ樹脂組成物の物性評価
得られたエポキシ樹脂組成物の物性を以下の方法により測定した。その結果を表1、2に示す。
低圧トランスファー成形機(コータキ精機(株)製「KTS−15」)を用いて、EMMI−1−66に準じたスパイラルフロー測定用の金型に、金型温度175℃、注入圧力6.9MPa、硬化時間120秒の条件で、実施例1〜12,比較例1〜6のエポキシ樹脂組成物をそれぞれ注入し、流動長(単位:cm)を測定した。80cm以下であるとパッケージ未充填などの成形不良が生じる場合がある。
175℃に加熱した熱板上で実施例1〜12,比較例1〜6のエポキシ樹脂組成物をそれぞれ溶融後、へらで練りながら硬化するまでの時間を測定した。
実施例1〜12、比較例1〜6のエポキシ樹脂組成物を175℃4時間で硬化した後、これを振動ミルで粉砕した。得られた硬化体粉末を公称目開き74μm(200メッシュ)の篩で粗粒子を除き、得られたサンプル試料2gを図2で示すガラス製の管状炉の試料ボード101に設置した。ついで、水分量0.1容量%以下の空気AをCO2トラップ(エアベントフィルター)102を通過させて二酸化炭素濃度を0.04容量%以下にした乾燥空気を試料ボード101に投入し、該乾燥空気雰囲気下(流量10ml/分)に加熱炉103により硬化物粉末を200℃10時間加熱した。発生する腐食性ガスは、氷水105で冷却された捕集液104に捕集され全量を25mLの検液とした。具体的には、発生する亜硫酸ガスの捕集液104としては、希薄な過酸化水素溶液(超純水25mlに濃度35%の過酸化水素水を0.1ml加えたもの)を用いた。また、塩化水素及び有機酸(ギ酸及び酢酸)の捕集液105としては、希薄な水酸化カリウム溶液(8mmol/L)を用いた。得られた検液をイオンクロマトグラフィー装置(ダイオネクス社製「ICS2000型」)に導入した。分析条件は、上記説明したとおり[流速:1.5ml/min、検出器:電気伝導度検出器、溶媒:水酸化カリウム(グラジエント 1〜35mM)]にした。検量線法により各イオンを定量し、試料から発生したイオン量に換算した。結果を表1、2に示す。
作製した半導体装置の高温保管性(HTSL)を以下の方法により測定した。その結果を表1、2に示す。
得られた半導体装置を150℃の環境下に保管し、24時間毎に配線間の電気抵抗値を測定し、その値が初期値に対して20%増加した半導体装置を不良と判定し、不良になるまでの時間(単位:時間)を測定した。測定は5個の半導体装置について行い、このうち、最も早く不良になった時間を表1、2に示した。また、全ての半導体装置で2000時間高温保管しても不良が発生しなかった場合には「>2000」と記載した。
得られた半導体装置を175℃の環境下に保管し、24時間毎に配線間の電気抵抗値を測定し、その値が初期値に対して20%増加した半導体装置を不良と判定し、不良になるまでの時間(単位:時間)を測定した。測定は5個の半導体装置について行い、このうち、最も早く不良になった時間を表1、2に示した。
HTSL1において、2000時間高温保管しても不良が発生せず、かつ、HTSL2において、200時間高温保管しても不良が発生しない場合を良(○)と判定し、それ以外を不良(×)と判定した。
Claims (15)
- エポキシ樹脂(A)及び硬化剤(B)を含み、銅ワイヤ及び前記銅ワイヤが接続された半導体素子を封止する半導体封止用エポキシ樹脂組成物であって、
前記半導体封止用エポキシ樹脂組成物の硬化体を200℃10時間加熱したとき、前記銅ワイヤに対する腐食性を有する硫黄化合物からなる第一の腐食性ガスの発生量が70ppm以下であることを特徴とする、半導体封止用エポキシ樹脂組成物。 - 前記第一の腐食性ガスが亜硫酸ガスであることを特徴とする、請求項1に記載の半導体封止用エポキシ樹脂組成物。
- ハロゲン化合物からなる第二の腐食性ガス、及び、有機酸からなる第三の腐食性ガスが、前記銅ワイヤに対する腐食性を有し、前記半導体封止用エポキシ樹脂組成物の硬化体を200℃10時間加熱したとき、前記第一、第二及び第三の腐食性ガスの発生量の合計が230ppm以下であることを特徴とする、請求項1又は2に記載の半導体封止用エポキシ樹脂組成物。
- 前記第二の腐食性ガスが塩化水素ガスであることを特徴とする、請求項3に記載の半導体封止用エポキシ樹脂組成物。
- 前記第三の腐食性ガスは、二種以上の異なる有機酸からなることを特徴とする、請求項3又は4に記載の半導体封止用エポキシ樹脂組成物。
- 前記第三の腐食性ガスは、ギ酸及び/又は酢酸からなることを特徴とする、請求項3乃至5いずれか1項に記載の半導体封止用エポキシ樹脂組成物。
- ハイドロタルサイトをさらに含むことを特徴とする、請求項1乃至6いずれか1項に記載の半導体封止用エポキシ樹脂組成物。
- 前記ハイドロタルサイトが下記式(1)で表される化合物であることを特徴とする、請求項7に記載の半導体封止用エポキシ樹脂組成物。
MaAlb(OH)2a+3b−2c(CO3)c・mH2O (1)
〔式(1)中、Mは少なくともMgを含む金属元素を表し、a、b、cは、それぞれ2≦a≦8、1≦b≦3、0.5≦c≦2を満たす数であり、mは0以上の整数である。〕 - 前記エポキシ樹脂(A)が、下記式(2)で表されるエポキシ樹脂、下記式(3)で表されるエポキシ樹脂、及び、下記式(4)で表されるエポキシ樹脂からなる群から選択される少なくとも1種を含有するものあることを特徴とする、請求項1乃至8いずれか1項に記載の半導体封止用エポキシ樹脂組成物。
- 前記銅ワイヤの銅純度が99.99質量%以上であることを特徴とする、請求項1乃至10いずれか1項に記載の半導体封止用エポキシ樹脂組成物。
- 請求項1乃至11いずれか1項に記載の半導体封止用エポキシ樹脂組成物の硬化体。
- ダイパッド部を有するリードフレームと、
前記ダイパッド部に搭載された半導体素子と、
前記リードフレームと前記半導体素子とを電気的に接続している銅ワイヤと、
エポキシ樹脂組成物の硬化体からなり、前記半導体素子と前記銅ワイヤとを封止している、封止樹脂と、
を有し、
前記封止樹脂を200℃10時間加熱したとき、前記銅ワイヤに対する腐食性を有する硫黄化合物からなる第一の腐食性ガスの発生量が70ppm以下である、半導体装置。 - ハロゲン化合物からなる第二の腐食性ガス、及び、有機酸からなる第三の腐食性ガスが、前記銅ワイヤに対する腐食性を有し、前記封止樹脂を200℃10時間加熱したとき、前記第一、第二及び第三の腐食性ガスの発生量の合計が230ppm以下である、請求項13に記載の半導体装置。
- 前記銅ワイヤは、前記半導体素子に形成された電極パッドに接合し、前記電極パッドがアルミニウムを主成分とする、請求項13又は14に記載の半導体装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009277461 | 2009-12-07 | ||
JP2009277461 | 2009-12-07 | ||
PCT/JP2010/006930 WO2011070739A1 (ja) | 2009-12-07 | 2010-11-29 | 半導体封止用エポキシ樹脂組成物、その硬化体及び半導体装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPWO2011070739A1 true JPWO2011070739A1 (ja) | 2013-04-22 |
Family
ID=44145303
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011545066A Pending JPWO2011070739A1 (ja) | 2009-12-07 | 2010-11-29 | 半導体封止用エポキシ樹脂組成物、その硬化体及び半導体装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8963344B2 (ja) |
JP (1) | JPWO2011070739A1 (ja) |
KR (1) | KR20120104292A (ja) |
CN (1) | CN102666724B (ja) |
TW (1) | TWI538930B (ja) |
WO (1) | WO2011070739A1 (ja) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013067694A (ja) * | 2011-09-21 | 2013-04-18 | Panasonic Corp | 半導体封止用エポキシ樹脂組成物および半導体装置 |
JP2014532625A (ja) | 2011-10-19 | 2014-12-08 | シラス・インコーポレイテッド | メチレンβ−ジケトンモノマー、メチレンβ−ジケトンモノマーを製造するための方法、これらから作られる重合可能な組成物および製品 |
US9230892B2 (en) * | 2012-03-22 | 2016-01-05 | Sumitomo Bakelite Co., Ltd. | Semiconductor device and method of manufacturing the same |
JP2013197531A (ja) * | 2012-03-22 | 2013-09-30 | Sharp Corp | 半導体装置およびその製造方法 |
KR101902611B1 (ko) * | 2012-03-23 | 2018-09-28 | 스미또모 베이크라이트 가부시키가이샤 | 반도체 장치 |
US10913875B2 (en) | 2012-03-30 | 2021-02-09 | Sirrus, Inc. | Composite and laminate articles and polymerizable systems for producing the same |
US9234107B2 (en) | 2012-03-30 | 2016-01-12 | Sirrus, Inc. | Ink coating formulations and polymerizable systems for producing the same |
US10047192B2 (en) | 2012-06-01 | 2018-08-14 | Sirrus, Inc. | Optical material and articles formed therefrom |
CN105008438B (zh) | 2012-11-16 | 2019-10-22 | 拜奥福米克斯公司 | 塑料粘结体系及方法 |
CN105164797B (zh) | 2012-11-30 | 2019-04-19 | 瑟拉斯公司 | 用于电子应用的复合组合物 |
JP6398167B2 (ja) * | 2013-10-04 | 2018-10-03 | 住友ベークライト株式会社 | 封止用樹脂組成物、半導体装置および半導体装置の製造方法 |
JP6605190B2 (ja) * | 2014-05-28 | 2019-11-13 | 住友ベークライト株式会社 | 封止用樹脂組成物、および半導体装置 |
WO2016151733A1 (ja) * | 2015-03-23 | 2016-09-29 | 住友ベークライト株式会社 | 封止用樹脂組成物、半導体装置および半導体装置の製造方法 |
US9334430B1 (en) | 2015-05-29 | 2016-05-10 | Sirrus, Inc. | Encapsulated polymerization initiators, polymerization systems and methods using the same |
US9217098B1 (en) | 2015-06-01 | 2015-12-22 | Sirrus, Inc. | Electroinitiated polymerization of compositions having a 1,1-disubstituted alkene compound |
WO2017170374A1 (ja) * | 2016-03-29 | 2017-10-05 | 日本碍子株式会社 | 静電チャックヒータ |
JP2017179185A (ja) * | 2016-03-31 | 2017-10-05 | 住友ベークライト株式会社 | 半導体封止用エポキシ樹脂組成物および半導体装置 |
CN106221500B (zh) * | 2016-08-05 | 2018-04-17 | 河北晨阳工贸集团有限公司 | 一种防电晕高阻涂料的制备方法 |
JP6855804B2 (ja) * | 2017-01-17 | 2021-04-07 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
CN107507782A (zh) * | 2017-07-13 | 2017-12-22 | 池州泰美达电子有限公司 | 一种薄铝层焊盘间铜线键合方法 |
DE102017121485A1 (de) * | 2017-09-15 | 2019-03-21 | Infineon Technologies Austria Ag | Halbleitervorrichtung mit Kupferkorrosionsinhibitoren |
WO2019087258A1 (ja) * | 2017-10-30 | 2019-05-09 | 日立化成株式会社 | 樹脂組成物、硬化物、成形体及びその製造方法、並びに、フィルムコンデンサ及びその製造方法 |
US11756882B2 (en) * | 2020-12-31 | 2023-09-12 | Texas Instruments Incorporated | Semiconductor die with blast shielding |
Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH084099B2 (ja) * | 1986-03-17 | 1996-01-17 | タツタ電線株式会社 | 耐食性に優れた半導体素子用銅ボンディング線 |
JPH11297904A (ja) * | 1998-04-14 | 1999-10-29 | Nitto Denko Corp | 半導体装置 |
JP2002060589A (ja) * | 2000-08-15 | 2002-02-26 | Shin Etsu Chem Co Ltd | 半導体封止用エポキシ樹脂組成物及び半導体装置 |
JP2004027001A (ja) * | 2002-06-25 | 2004-01-29 | Matsushita Electric Works Ltd | 光半導体封止用エポキシ樹脂組成物及び光半導体装置 |
JP2005053978A (ja) * | 2003-08-06 | 2005-03-03 | Sumitomo Bakelite Co Ltd | 半導体封止用エポキシ樹脂組成物及び半導体装置 |
JP2005139260A (ja) * | 2003-11-05 | 2005-06-02 | Sumitomo Bakelite Co Ltd | エポキシ樹脂組成物及び半導体装置 |
JP2006233145A (ja) * | 2005-02-28 | 2006-09-07 | Nippon Zeon Co Ltd | 液状エポキシ樹脂組成物 |
JP2007063549A (ja) * | 2005-08-05 | 2007-03-15 | Shin Etsu Chem Co Ltd | エポキシ樹脂組成物及び半導体装置 |
JP2007211252A (ja) * | 2007-04-23 | 2007-08-23 | Nitto Denko Corp | フライアッシュ粉体を用いた半導体封止用エポキシ樹脂組成物およびそれを用いた半導体装置 |
JP2007224167A (ja) * | 2006-02-24 | 2007-09-06 | Nitto Denko Corp | 半導体封止用エポキシ樹脂組成物およびそれを用いて得られる半導体装置 |
JP2007224124A (ja) * | 2006-02-22 | 2007-09-06 | Shin Etsu Chem Co Ltd | 液状エポキシ樹脂組成物及び半導体装置 |
JP2009152561A (ja) * | 2007-11-29 | 2009-07-09 | Sumitomo Bakelite Co Ltd | 半導体装置並びに封止用エポキシ樹脂組成物及びその製造方法 |
JP2010114408A (ja) * | 2008-10-10 | 2010-05-20 | Sumitomo Bakelite Co Ltd | 半導体装置 |
WO2010090246A1 (ja) * | 2009-02-05 | 2010-08-12 | 三菱レイヨン株式会社 | ビニル重合体粉体、硬化性樹脂組成物及び硬化物 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03157448A (ja) * | 1989-11-15 | 1991-07-05 | Mitsubishi Electric Corp | 半導体封止用エポキシ樹脂組成物 |
US5294835A (en) * | 1992-07-28 | 1994-03-15 | Nitto Denko Corporation | Epoxy resin composition for semiconductor encapsulation and semiconductor device using the same |
CA2111542A1 (en) * | 1992-12-24 | 1994-06-25 | Yoshikatsu Satake | Poly (arylene sulfide) resin composition |
JPH084099A (ja) | 1994-06-21 | 1996-01-09 | Sekisui Chem Co Ltd | 排水ます |
JP4310086B2 (ja) * | 2002-08-01 | 2009-08-05 | 株式会社日立製作所 | エンジン用電子機器 |
JP2007012776A (ja) | 2005-06-29 | 2007-01-18 | Nippon Steel Materials Co Ltd | 半導体装置用ボンディングワイヤ |
KR20140127362A (ko) | 2008-10-10 | 2014-11-03 | 스미토모 베이클리트 컴퍼니 리미티드 | 반도체 장치 |
-
2010
- 2010-11-29 WO PCT/JP2010/006930 patent/WO2011070739A1/ja active Application Filing
- 2010-11-29 CN CN201080055336.8A patent/CN102666724B/zh not_active Expired - Fee Related
- 2010-11-29 JP JP2011545066A patent/JPWO2011070739A1/ja active Pending
- 2010-11-29 KR KR20127017660A patent/KR20120104292A/ko not_active Application Discontinuation
- 2010-11-29 US US13/514,110 patent/US8963344B2/en not_active Expired - Fee Related
- 2010-12-06 TW TW099142334A patent/TWI538930B/zh not_active IP Right Cessation
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH084099B2 (ja) * | 1986-03-17 | 1996-01-17 | タツタ電線株式会社 | 耐食性に優れた半導体素子用銅ボンディング線 |
JPH11297904A (ja) * | 1998-04-14 | 1999-10-29 | Nitto Denko Corp | 半導体装置 |
JP2002060589A (ja) * | 2000-08-15 | 2002-02-26 | Shin Etsu Chem Co Ltd | 半導体封止用エポキシ樹脂組成物及び半導体装置 |
JP2004027001A (ja) * | 2002-06-25 | 2004-01-29 | Matsushita Electric Works Ltd | 光半導体封止用エポキシ樹脂組成物及び光半導体装置 |
JP2005053978A (ja) * | 2003-08-06 | 2005-03-03 | Sumitomo Bakelite Co Ltd | 半導体封止用エポキシ樹脂組成物及び半導体装置 |
JP2005139260A (ja) * | 2003-11-05 | 2005-06-02 | Sumitomo Bakelite Co Ltd | エポキシ樹脂組成物及び半導体装置 |
JP2006233145A (ja) * | 2005-02-28 | 2006-09-07 | Nippon Zeon Co Ltd | 液状エポキシ樹脂組成物 |
JP2007063549A (ja) * | 2005-08-05 | 2007-03-15 | Shin Etsu Chem Co Ltd | エポキシ樹脂組成物及び半導体装置 |
JP2007224124A (ja) * | 2006-02-22 | 2007-09-06 | Shin Etsu Chem Co Ltd | 液状エポキシ樹脂組成物及び半導体装置 |
JP2007224167A (ja) * | 2006-02-24 | 2007-09-06 | Nitto Denko Corp | 半導体封止用エポキシ樹脂組成物およびそれを用いて得られる半導体装置 |
JP2007211252A (ja) * | 2007-04-23 | 2007-08-23 | Nitto Denko Corp | フライアッシュ粉体を用いた半導体封止用エポキシ樹脂組成物およびそれを用いた半導体装置 |
JP2009152561A (ja) * | 2007-11-29 | 2009-07-09 | Sumitomo Bakelite Co Ltd | 半導体装置並びに封止用エポキシ樹脂組成物及びその製造方法 |
JP2010114408A (ja) * | 2008-10-10 | 2010-05-20 | Sumitomo Bakelite Co Ltd | 半導体装置 |
WO2010090246A1 (ja) * | 2009-02-05 | 2010-08-12 | 三菱レイヨン株式会社 | ビニル重合体粉体、硬化性樹脂組成物及び硬化物 |
Also Published As
Publication number | Publication date |
---|---|
WO2011070739A1 (ja) | 2011-06-16 |
TW201129601A (en) | 2011-09-01 |
KR20120104292A (ko) | 2012-09-20 |
US8963344B2 (en) | 2015-02-24 |
CN102666724A (zh) | 2012-09-12 |
CN102666724B (zh) | 2015-10-14 |
US20120261807A1 (en) | 2012-10-18 |
TWI538930B (zh) | 2016-06-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2011070739A1 (ja) | 半導体封止用エポキシ樹脂組成物、その硬化体及び半導体装置 | |
JP5532258B2 (ja) | 半導体装置 | |
JP5393207B2 (ja) | 半導体装置 | |
KR101678256B1 (ko) | 반도체 장치 | |
WO2012070529A1 (ja) | 半導体封止用エポキシ樹脂組成物及び半導体装置 | |
JP6330658B2 (ja) | 半導体装置 | |
JP6094573B2 (ja) | 半導体装置 | |
JP2013209450A (ja) | 半導体封止用エポキシ樹脂組成物 | |
JP2008166314A (ja) | 半導体装置及び封止用エポキシ樹脂組成物 | |
JP6341203B2 (ja) | 半導体装置 | |
JP2015017165A (ja) | 封止用エポキシ樹脂組成物、及び半導体装置 | |
JP2008045075A (ja) | 封止用エポキシ樹脂組成物及び電子部品装置 | |
WO2011030516A1 (ja) | 半導体装置 | |
JP2008214559A (ja) | 半導体封止用エポキシ樹脂組成物および半導体装置 | |
WO2013145609A1 (ja) | 半導体封止用エポキシ樹脂組成物、その硬化体及び半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130904 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140924 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20141125 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150303 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20150430 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150519 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20151104 |