JPS6410948B2 - - Google Patents

Info

Publication number
JPS6410948B2
JPS6410948B2 JP54132809A JP13280979A JPS6410948B2 JP S6410948 B2 JPS6410948 B2 JP S6410948B2 JP 54132809 A JP54132809 A JP 54132809A JP 13280979 A JP13280979 A JP 13280979A JP S6410948 B2 JPS6410948 B2 JP S6410948B2
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
region
semiconductor substrate
memory cell
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54132809A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5658255A (en
Inventor
Masayoshi Ino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP13280979A priority Critical patent/JPS5658255A/ja
Publication of JPS5658255A publication Critical patent/JPS5658255A/ja
Publication of JPS6410948B2 publication Critical patent/JPS6410948B2/ja
Granted legal-status Critical Current

Links

Classifications

    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47C—CHAIRS; SOFAS; BEDS
    • A47C7/00—Parts, details, or accessories of chairs or stools
    • A47C7/62—Accessories for chairs
    • A47C7/68—Arm-rest tables ; or back-rest tables
    • A47C7/70—Arm-rest tables ; or back-rest tables of foldable type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells

Landscapes

  • Static Random-Access Memory (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP13280979A 1979-10-17 1979-10-17 Mos type semiconductor memory device Granted JPS5658255A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13280979A JPS5658255A (en) 1979-10-17 1979-10-17 Mos type semiconductor memory device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13280979A JPS5658255A (en) 1979-10-17 1979-10-17 Mos type semiconductor memory device

Publications (2)

Publication Number Publication Date
JPS5658255A JPS5658255A (en) 1981-05-21
JPS6410948B2 true JPS6410948B2 (enrdf_load_stackoverflow) 1989-02-22

Family

ID=15090079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13280979A Granted JPS5658255A (en) 1979-10-17 1979-10-17 Mos type semiconductor memory device

Country Status (1)

Country Link
JP (1) JPS5658255A (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61208255A (ja) * 1985-03-13 1986-09-16 Toshiba Corp 半導体記憶装置
JPS63208263A (ja) * 1987-02-25 1988-08-29 Toshiba Corp 半導体装置
US5071783A (en) * 1987-06-17 1991-12-10 Fujitsu Limited Method of producing a dynamic random access memory device
US5650647A (en) * 1987-06-17 1997-07-22 Fujitsu Limited Dynamic random access memory device and method of producing same
DE3856143T2 (de) * 1987-06-17 1998-10-29 Fujitsu Ltd Verfahren zum Herstellen einer dynamischen Speicherzelle mit wahlfreiem Zugriff
KR910009805B1 (ko) * 1987-11-25 1991-11-30 후지쓰 가부시끼가이샤 다이나믹 랜덤 액세스 메모리 장치와 그의 제조방법
JPH0697682B2 (ja) * 1990-03-20 1994-11-30 株式会社東芝 半導体装置の製造方法
WO1997019468A1 (en) 1995-11-20 1997-05-29 Hitachi, Ltd. Semiconductor storage device and process for manufacturing the same
JP3146962B2 (ja) * 1995-12-14 2001-03-19 日本電気株式会社 半導体記憶装置およびその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52104088A (en) * 1976-02-27 1977-09-01 Hitachi Ltd Mis capacitor

Also Published As

Publication number Publication date
JPS5658255A (en) 1981-05-21

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