JPS52104088A - Mis capacitor - Google Patents
Mis capacitorInfo
- Publication number
- JPS52104088A JPS52104088A JP1999076A JP1999076A JPS52104088A JP S52104088 A JPS52104088 A JP S52104088A JP 1999076 A JP1999076 A JP 1999076A JP 1999076 A JP1999076 A JP 1999076A JP S52104088 A JPS52104088 A JP S52104088A
- Authority
- JP
- Japan
- Prior art keywords
- capacitor
- mis
- electrodes
- mis capacitor
- metallic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE: To obtain a desired capacity with a smaller size and enhance the integration by connecting two MIS capacitors A and B in parallel. The MIS capacitor A has metallic electrodes on the SiO2 film which is provided on the propagation layer, while the MIS capacitor B utilizes the eelectrodes of the capacitor A as its electrodes on the lower side and has its metallic electodes on the Si3N4 film provided between the electrodes of capacitor A and those of capacitor B.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1999076A JPS52104088A (en) | 1976-02-27 | 1976-02-27 | Mis capacitor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1999076A JPS52104088A (en) | 1976-02-27 | 1976-02-27 | Mis capacitor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52104088A true JPS52104088A (en) | 1977-09-01 |
Family
ID=12014599
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1999076A Pending JPS52104088A (en) | 1976-02-27 | 1976-02-27 | Mis capacitor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52104088A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5658253A (en) * | 1979-10-17 | 1981-05-21 | Oki Electric Ind Co Ltd | Capacitor for integrated circuit |
JPS5658255A (en) * | 1979-10-17 | 1981-05-21 | Oki Electric Ind Co Ltd | Mos type semiconductor memory device |
JPS5850767A (en) * | 1981-09-21 | 1983-03-25 | Hitachi Ltd | Semiconductor device |
JPS6197855A (en) * | 1984-10-18 | 1986-05-16 | Matsushita Electronics Corp | Manufacture of semiconductor device |
JPH02302074A (en) * | 1989-05-16 | 1990-12-14 | Mitsubishi Electric Corp | Semiconductor integrated circuit |
-
1976
- 1976-02-27 JP JP1999076A patent/JPS52104088A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5658253A (en) * | 1979-10-17 | 1981-05-21 | Oki Electric Ind Co Ltd | Capacitor for integrated circuit |
JPS5658255A (en) * | 1979-10-17 | 1981-05-21 | Oki Electric Ind Co Ltd | Mos type semiconductor memory device |
JPS5850767A (en) * | 1981-09-21 | 1983-03-25 | Hitachi Ltd | Semiconductor device |
JPS6197855A (en) * | 1984-10-18 | 1986-05-16 | Matsushita Electronics Corp | Manufacture of semiconductor device |
JPH02302074A (en) * | 1989-05-16 | 1990-12-14 | Mitsubishi Electric Corp | Semiconductor integrated circuit |
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