JPS52104088A - Mis capacitor - Google Patents

Mis capacitor

Info

Publication number
JPS52104088A
JPS52104088A JP1999076A JP1999076A JPS52104088A JP S52104088 A JPS52104088 A JP S52104088A JP 1999076 A JP1999076 A JP 1999076A JP 1999076 A JP1999076 A JP 1999076A JP S52104088 A JPS52104088 A JP S52104088A
Authority
JP
Japan
Prior art keywords
capacitor
mis
electrodes
mis capacitor
metallic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999076A
Other languages
Japanese (ja)
Inventor
Tatsu Ito
Takeo Yoshimi
Katsuo Sugawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1999076A priority Critical patent/JPS52104088A/en
Publication of JPS52104088A publication Critical patent/JPS52104088A/en
Pending legal-status Critical Current

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  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To obtain a desired capacity with a smaller size and enhance the integration by connecting two MIS capacitors A and B in parallel. The MIS capacitor A has metallic electrodes on the SiO2 film which is provided on the propagation layer, while the MIS capacitor B utilizes the eelectrodes of the capacitor A as its electrodes on the lower side and has its metallic electodes on the Si3N4 film provided between the electrodes of capacitor A and those of capacitor B.
COPYRIGHT: (C)1977,JPO&Japio
JP1999076A 1976-02-27 1976-02-27 Mis capacitor Pending JPS52104088A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1999076A JPS52104088A (en) 1976-02-27 1976-02-27 Mis capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1999076A JPS52104088A (en) 1976-02-27 1976-02-27 Mis capacitor

Publications (1)

Publication Number Publication Date
JPS52104088A true JPS52104088A (en) 1977-09-01

Family

ID=12014599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1999076A Pending JPS52104088A (en) 1976-02-27 1976-02-27 Mis capacitor

Country Status (1)

Country Link
JP (1) JPS52104088A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5658253A (en) * 1979-10-17 1981-05-21 Oki Electric Ind Co Ltd Capacitor for integrated circuit
JPS5658255A (en) * 1979-10-17 1981-05-21 Oki Electric Ind Co Ltd Mos type semiconductor memory device
JPS5850767A (en) * 1981-09-21 1983-03-25 Hitachi Ltd Semiconductor device
JPS6197855A (en) * 1984-10-18 1986-05-16 Matsushita Electronics Corp Manufacture of semiconductor device
JPH02302074A (en) * 1989-05-16 1990-12-14 Mitsubishi Electric Corp Semiconductor integrated circuit

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5658253A (en) * 1979-10-17 1981-05-21 Oki Electric Ind Co Ltd Capacitor for integrated circuit
JPS5658255A (en) * 1979-10-17 1981-05-21 Oki Electric Ind Co Ltd Mos type semiconductor memory device
JPS5850767A (en) * 1981-09-21 1983-03-25 Hitachi Ltd Semiconductor device
JPS6197855A (en) * 1984-10-18 1986-05-16 Matsushita Electronics Corp Manufacture of semiconductor device
JPH02302074A (en) * 1989-05-16 1990-12-14 Mitsubishi Electric Corp Semiconductor integrated circuit

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