JPS63195102A - 窒化アルミニウム粉末の連続的製造方法及び装置 - Google Patents
窒化アルミニウム粉末の連続的製造方法及び装置Info
- Publication number
- JPS63195102A JPS63195102A JP2793587A JP2793587A JPS63195102A JP S63195102 A JPS63195102 A JP S63195102A JP 2793587 A JP2793587 A JP 2793587A JP 2793587 A JP2793587 A JP 2793587A JP S63195102 A JPS63195102 A JP S63195102A
- Authority
- JP
- Japan
- Prior art keywords
- powder
- reaction
- section
- gas
- collection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000843 powder Substances 0.000 title claims description 62
- 238000000034 method Methods 0.000 title claims description 17
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims description 8
- 238000010924 continuous production Methods 0.000 title claims 2
- 238000006243 chemical reaction Methods 0.000 claims description 57
- 238000010438 heat treatment Methods 0.000 claims description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 25
- 238000005121 nitriding Methods 0.000 description 17
- 238000004519 manufacturing process Methods 0.000 description 13
- 239000002245 particle Substances 0.000 description 10
- 238000010298 pulverizing process Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 238000010517 secondary reaction Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000003723 Smelting Methods 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2793587A JPS63195102A (ja) | 1987-02-09 | 1987-02-09 | 窒化アルミニウム粉末の連続的製造方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2793587A JPS63195102A (ja) | 1987-02-09 | 1987-02-09 | 窒化アルミニウム粉末の連続的製造方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63195102A true JPS63195102A (ja) | 1988-08-12 |
| JPH0557201B2 JPH0557201B2 (enrdf_load_stackoverflow) | 1993-08-23 |
Family
ID=12234751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2793587A Granted JPS63195102A (ja) | 1987-02-09 | 1987-02-09 | 窒化アルミニウム粉末の連続的製造方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63195102A (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4997009A (en) * | 1989-04-05 | 1991-03-05 | Nhk Spring Co., Ltd. | Accumulator |
| JPH0360411A (ja) * | 1989-07-28 | 1991-03-15 | Shin Etsu Chem Co Ltd | 窒化ケイ素粉末の連続製造装置 |
| US5126121A (en) * | 1991-05-03 | 1992-06-30 | The Dow Chemical Company | Process for preparing aluminum nitride powder via controlled combustion nitridation |
| US5219804A (en) * | 1992-01-10 | 1993-06-15 | The Dow Chemical Company | Process for preparing ultrafine aluminum nitride powder |
| JP2007284315A (ja) * | 2006-04-19 | 2007-11-01 | Denki Kagaku Kogyo Kk | 窒化アルミニウム粉末および樹脂組成物 |
| JP2012041255A (ja) * | 2010-08-23 | 2012-03-01 | Tohoku Univ | 窒化アルミニウム粒子、窒化アルミニウム粒子の製造方法、及び窒化アルミニウム粒子の製造装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6168311A (ja) * | 1984-09-10 | 1986-04-08 | Chugai Ro Kogyo Kaisha Ltd | 窒化アルミニウム粉未の製造方法およびその装置 |
| JPS62148311A (ja) * | 1985-12-19 | 1987-07-02 | Chugai Ro Kogyo Kaisha Ltd | 窒化アルミニウム粉末の製造方法およびその装置 |
| JPS62171902A (ja) * | 1986-01-24 | 1987-07-28 | Nec Corp | 窒化アルミニウムと炭化アルミニウムよりなる混合微粉末の合成方法 |
-
1987
- 1987-02-09 JP JP2793587A patent/JPS63195102A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6168311A (ja) * | 1984-09-10 | 1986-04-08 | Chugai Ro Kogyo Kaisha Ltd | 窒化アルミニウム粉未の製造方法およびその装置 |
| JPS62148311A (ja) * | 1985-12-19 | 1987-07-02 | Chugai Ro Kogyo Kaisha Ltd | 窒化アルミニウム粉末の製造方法およびその装置 |
| JPS62171902A (ja) * | 1986-01-24 | 1987-07-28 | Nec Corp | 窒化アルミニウムと炭化アルミニウムよりなる混合微粉末の合成方法 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4997009A (en) * | 1989-04-05 | 1991-03-05 | Nhk Spring Co., Ltd. | Accumulator |
| JPH0360411A (ja) * | 1989-07-28 | 1991-03-15 | Shin Etsu Chem Co Ltd | 窒化ケイ素粉末の連続製造装置 |
| US5126121A (en) * | 1991-05-03 | 1992-06-30 | The Dow Chemical Company | Process for preparing aluminum nitride powder via controlled combustion nitridation |
| US5219804A (en) * | 1992-01-10 | 1993-06-15 | The Dow Chemical Company | Process for preparing ultrafine aluminum nitride powder |
| JP2007284315A (ja) * | 2006-04-19 | 2007-11-01 | Denki Kagaku Kogyo Kk | 窒化アルミニウム粉末および樹脂組成物 |
| JP2012041255A (ja) * | 2010-08-23 | 2012-03-01 | Tohoku Univ | 窒化アルミニウム粒子、窒化アルミニウム粒子の製造方法、及び窒化アルミニウム粒子の製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0557201B2 (enrdf_load_stackoverflow) | 1993-08-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |