JPS6245720B2 - - Google Patents

Info

Publication number
JPS6245720B2
JPS6245720B2 JP55003707A JP370780A JPS6245720B2 JP S6245720 B2 JPS6245720 B2 JP S6245720B2 JP 55003707 A JP55003707 A JP 55003707A JP 370780 A JP370780 A JP 370780A JP S6245720 B2 JPS6245720 B2 JP S6245720B2
Authority
JP
Japan
Prior art keywords
glass
copper
temperature
ceramic
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55003707A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55128899A (en
Inventor
Uin Heran Resutaa
Nabinchandora Masutaa Raji
Ramamahara Tamara Rao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=21813197&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPS6245720(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS55128899A publication Critical patent/JPS55128899A/ja
Publication of JPS6245720B2 publication Critical patent/JPS6245720B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0036—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents
    • C03C10/0045—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents containing SiO2, Al2O3 and MgO as main constituents
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
    • H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
    • H01L21/4807—Ceramic parts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
    • H01L21/4814—Conductive parts
    • H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
    • H01L21/4867—Applying pastes or inks, e.g. screen printing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01078—Platinum [Pt]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
    • H05K3/4629—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4673—Application methods or materials of intermediate insulating layers not specially adapted to any one of the previous methods of adding a circuit layer
    • H05K3/4676—Single layer compositions

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Power Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Dispersion Chemistry (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Glass Compositions (AREA)
  • Insulated Conductors (AREA)
  • Surface Treatment Of Glass (AREA)
  • Communication Cables (AREA)
JP370780A 1979-03-23 1980-01-18 Method of fabricating glass ceramic structure Granted JPS55128899A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/023,112 US4234367A (en) 1979-03-23 1979-03-23 Method of making multilayered glass-ceramic structures having an internal distribution of copper-based conductors

Publications (2)

Publication Number Publication Date
JPS55128899A JPS55128899A (en) 1980-10-06
JPS6245720B2 true JPS6245720B2 (enExample) 1987-09-28

Family

ID=21813197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP370780A Granted JPS55128899A (en) 1979-03-23 1980-01-18 Method of fabricating glass ceramic structure

Country Status (7)

Country Link
US (1) US4234367A (enExample)
EP (1) EP0016307B1 (enExample)
JP (1) JPS55128899A (enExample)
AT (1) ATE346T1 (enExample)
CA (1) CA1123115A (enExample)
DE (1) DE3060057D1 (enExample)
IT (1) IT1150089B (enExample)

Families Citing this family (91)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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US4340436A (en) * 1980-07-14 1982-07-20 International Business Machines Corporation Process for flattening glass-ceramic substrates
US5271887A (en) * 1980-08-04 1993-12-21 Witec Cayman Patents, Ltd. Method of fabricating complex micro-circuit boards, substrates and microcircuits and the substrates and microcircuits
JPS5817651A (ja) * 1981-07-24 1983-02-01 Hitachi Ltd 多層回路板とその製造方法
JPS58105595A (ja) * 1981-12-17 1983-06-23 富士通株式会社 多層セラミツク回路基板の製造方法
JPS58108793A (ja) * 1981-12-23 1983-06-28 株式会社日立製作所 多層回路板とその製造方法
JPS58108792A (ja) * 1981-12-23 1983-06-28 株式会社日立製作所 多層回路板とその製造方法
US4517155A (en) * 1982-05-18 1985-05-14 Union Carbide Corporation Copper base metal termination for multilayer ceramic capacitors
JPS59995A (ja) * 1982-06-16 1984-01-06 富士通株式会社 銅導体多層構造体の製造方法
JPS59182283A (ja) * 1983-03-29 1984-10-17 株式会社東芝 導電性セラミツクス焼結体の製造方法
JPS6030196A (ja) * 1983-07-28 1985-02-15 富士通株式会社 多層回路基板の製造方法
JPS60221358A (ja) * 1984-04-13 1985-11-06 日本碍子株式会社 電気絶縁体用セラミック組成物
US4671928A (en) * 1984-04-26 1987-06-09 International Business Machines Corporation Method of controlling the sintering of metal particles
JPS60254697A (ja) * 1984-05-31 1985-12-16 富士通株式会社 多層セラミック回路基板および製法
US4594181A (en) * 1984-09-17 1986-06-10 E. I. Du Pont De Nemours And Company Metal oxide-coated copper powder
FR2575331B1 (fr) * 1984-12-21 1987-06-05 Labo Electronique Physique Boitier pour composant electronique
JPS61155243A (ja) * 1984-12-28 1986-07-14 富士通株式会社 グリ−ンシ−ト組成物
JPH0132364Y2 (enExample) * 1985-03-04 1989-10-03
JPS61270897A (ja) * 1985-05-25 1986-12-01 株式会社住友金属セラミックス 多層回路基板
KR900008781B1 (ko) * 1985-06-17 1990-11-29 마쯔시다덴기산교 가부시기가이샤 후막도체조성물
FR2585181B1 (fr) * 1985-07-16 1988-11-18 Interconnexions Ceramiques Procede de fabrication d'un substrat d'interconnexion pour composants electroniques, et substrat obtenu par sa mise en oeuvre
US4627160A (en) * 1985-08-02 1986-12-09 International Business Machines Corporation Method for removal of carbonaceous residues from ceramic structures having internal metallurgy
JPS6248097A (ja) * 1985-08-28 1987-03-02 日本特殊陶業株式会社 多層回路基板の製造法
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JPS62191460A (ja) * 1986-02-14 1987-08-21 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション ガラス・セラミック電気回路積層板の形成方法
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US4885038A (en) * 1986-05-01 1989-12-05 International Business Machines Corporation Method of making multilayered ceramic structures having an internal distribution of copper-based conductors
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US5130067A (en) * 1986-05-02 1992-07-14 International Business Machines Corporation Method and means for co-sintering ceramic/metal mlc substrates
US5045402A (en) * 1986-08-01 1991-09-03 International Business Machines Corporation Zirconia toughening of glass-ceramic materials
JP2527744B2 (ja) * 1986-08-01 1996-08-28 インタ−ナショナル・ビジネス・マシ−ンズ・コ−ポレ−ション 電子回路パッケ−ジングに含まれる構造体、及び、製造方法
JPS63128791A (ja) * 1986-11-12 1988-06-01 インタ−ナショナル・ビジネス・マシ−ンズ・コ−ポレ−ション 金属導体を有する高密度多層ガラス・セラミツク構造体の製造方法
US4766027A (en) * 1987-01-13 1988-08-23 E. I. Du Pont De Nemours And Company Method for making a ceramic multilayer structure having internal copper conductors
JPS63249394A (ja) * 1987-04-06 1988-10-17 日本電気株式会社 多層回路基板
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JPH0728128B2 (ja) * 1988-03-11 1995-03-29 松下電器産業株式会社 セラミック多層配線基板とその製造方法
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US5102720A (en) * 1989-09-22 1992-04-07 Cornell Research Foundation, Inc. Co-fired multilayer ceramic tapes that exhibit constrained sintering
US5194196A (en) * 1989-10-06 1993-03-16 International Business Machines Corporation Hermetic package for an electronic device and method of manufacturing same
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US5089070A (en) * 1989-12-07 1992-02-18 Pac Polymers Inc. Poly(propylene carbonate)-containing ceramic tape formulations and the green tapes resulting therefrom
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US5215610A (en) * 1991-04-04 1993-06-01 International Business Machines Corporation Method for fabricating superconductor packages
JP2584911B2 (ja) * 1991-06-18 1997-02-26 富士通株式会社 ガラス−セラミック多層回路基板の製造方法
US5925443A (en) * 1991-09-10 1999-07-20 International Business Machines Corporation Copper-based paste containing copper aluminate for microstructural and shrinkage control of copper-filled vias
US5682018A (en) * 1991-10-18 1997-10-28 International Business Machines Corporation Interface regions between metal and ceramic in a metal/ceramic substrate
JPH05218654A (ja) * 1991-10-25 1993-08-27 Internatl Business Mach Corp <Ibm> マイクロ波を用いたセラミック複合構造の製造方法
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US5336444A (en) * 1992-05-29 1994-08-09 International Business Machines Corporation Ceramic via composition, multilayer ceramic circuit containing same, and process for using same
JPH06169174A (ja) * 1992-08-17 1994-06-14 Praxair Technol Inc 多層セラミック構造物からのバインダー除去
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JPH06223623A (ja) * 1992-12-28 1994-08-12 Internatl Business Mach Corp <Ibm> 銅を素材とするペーストおよびセラミックパッケージ
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JP2570617B2 (ja) * 1994-05-13 1997-01-08 日本電気株式会社 多層配線セラミック基板のビア構造及びその製造方法
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US6231707B1 (en) 1998-09-22 2001-05-15 International Business Machines Corporation Method of forming a multilayer ceramic substrate with max-punched vias
US6341417B1 (en) 1999-09-23 2002-01-29 International Business Machines Corporation Pre-patterned substrate layers for being personalized as needed
US6569278B1 (en) 1999-09-29 2003-05-27 International Business Machines Corporation Powder metal polymer organic sheet punching for substrate conductors
US6395206B1 (en) 2000-06-05 2002-05-28 Praxair Technology, Inc. Method of removing an organic binder from a green ceramic form
JP2003136027A (ja) * 2001-11-01 2003-05-13 Ngk Insulators Ltd 半導体製造装置中で使用するためのセラミック部材を洗浄する方法、洗浄剤および洗浄剤の組み合わせ
KR20040008093A (ko) * 2002-07-17 2004-01-28 엔지케이 스파크 플러그 캄파니 리미티드 동 페이스트 및 그것을 이용한 배선기판
KR20040008094A (ko) * 2002-07-17 2004-01-28 엔지케이 스파크 플러그 캄파니 리미티드 동 페이스트, 이것을 이용한 배선기판 및 배선기판의제조방법
US20090238954A1 (en) * 2008-03-20 2009-09-24 Seigi Suh Large area thin film capacitors on metal foils and methods of manufacturing same
US10471418B2 (en) 2015-10-16 2019-11-12 International Business Machines Corporation Selectively functionalized porous material
WO2019191350A1 (en) 2018-03-28 2019-10-03 Corning Incorporated Boron phosphate glass-ceramics with low dielectric loss

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US3423517A (en) * 1966-07-27 1969-01-21 Dielectric Systems Inc Monolithic ceramic electrical interconnecting structure
US3604082A (en) * 1968-10-30 1971-09-14 Corning Glass Works Method of making a capacitor
US3637435A (en) * 1969-07-08 1972-01-25 Gen Motors Corp Metallizing process for glass-free ceramics bodies
US3770529A (en) * 1970-08-25 1973-11-06 Ibm Method of fabricating multilayer circuits
JPS4911903A (enExample) * 1972-05-10 1974-02-01
US3902102A (en) * 1974-04-01 1975-08-26 Sprague Electric Co Ceramic capacitor with base metal electrodes
US4101952A (en) * 1976-08-17 1978-07-18 Sprague Electric Company Monolithic base-metal glass-ceramic capacitor

Also Published As

Publication number Publication date
IT1150089B (it) 1986-12-10
IT8020408A0 (it) 1980-03-07
CA1123115A (en) 1982-05-04
ATE346T1 (de) 1981-11-15
EP0016307B1 (de) 1981-11-04
US4234367A (en) 1980-11-18
JPS55128899A (en) 1980-10-06
DE3060057D1 (en) 1982-01-14
EP0016307A1 (de) 1980-10-01

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