JPS6243335B2 - - Google Patents

Info

Publication number
JPS6243335B2
JPS6243335B2 JP55057877A JP5787780A JPS6243335B2 JP S6243335 B2 JPS6243335 B2 JP S6243335B2 JP 55057877 A JP55057877 A JP 55057877A JP 5787780 A JP5787780 A JP 5787780A JP S6243335 B2 JPS6243335 B2 JP S6243335B2
Authority
JP
Japan
Prior art keywords
plasma
sample
chamber
generation chamber
plasma generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55057877A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56155535A (en
Inventor
Seitaro Matsuo
Hideo Yoshihara
Shinichi Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP5787780A priority Critical patent/JPS56155535A/ja
Priority to CA000375908A priority patent/CA1159012A/en
Priority to US06/257,616 priority patent/US4401054A/en
Priority to DE3117252A priority patent/DE3117252C2/de
Priority to FR8108726A priority patent/FR2481838A1/fr
Priority to GB8113505A priority patent/GB2076587B/en
Priority to NL8102172A priority patent/NL191267C/xx
Publication of JPS56155535A publication Critical patent/JPS56155535A/ja
Publication of JPS6243335B2 publication Critical patent/JPS6243335B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/60—

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
JP5787780A 1980-05-02 1980-05-02 Film forming device utilizing plasma Granted JPS56155535A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP5787780A JPS56155535A (en) 1980-05-02 1980-05-02 Film forming device utilizing plasma
CA000375908A CA1159012A (en) 1980-05-02 1981-04-22 Plasma deposition apparatus
US06/257,616 US4401054A (en) 1980-05-02 1981-04-27 Plasma deposition apparatus
DE3117252A DE3117252C2 (de) 1980-05-02 1981-04-30 Plasmaauftragvorrichtung
FR8108726A FR2481838A1 (fr) 1980-05-02 1981-04-30 Appareil de depot de plasma pour former une pellicule sur un substrat
GB8113505A GB2076587B (en) 1980-05-02 1981-05-01 Plasma deposition apparatus
NL8102172A NL191267C (nl) 1980-05-02 1981-05-01 Inrichting voor het met plasma bewerken van een substraat.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5787780A JPS56155535A (en) 1980-05-02 1980-05-02 Film forming device utilizing plasma

Publications (2)

Publication Number Publication Date
JPS56155535A JPS56155535A (en) 1981-12-01
JPS6243335B2 true JPS6243335B2 (en:Method) 1987-09-12

Family

ID=13068205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5787780A Granted JPS56155535A (en) 1980-05-02 1980-05-02 Film forming device utilizing plasma

Country Status (1)

Country Link
JP (1) JPS56155535A (en:Method)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58106821A (ja) * 1981-12-18 1983-06-25 Fujitsu Ltd 導電配線層の形成方法
JPH0635323B2 (ja) * 1982-06-25 1994-05-11 株式会社日立製作所 表面処理方法
JPS5947733A (ja) * 1982-09-13 1984-03-17 Hitachi Ltd プラズマプロセス方法および装置
JPS60116781A (ja) * 1983-11-28 1985-06-24 Kyocera Corp 高硬度窒化ホウ素膜の製造方法
JPS60116780A (ja) * 1983-11-28 1985-06-24 Kyocera Corp 高硬度窒化ホウ素膜の製造方法
JPS60120525A (ja) * 1983-12-02 1985-06-28 Nippon Telegr & Teleph Corp <Ntt> 反応性イオンエツチング方法
JPH0638401B2 (ja) * 1984-08-13 1994-05-18 日本電信電話株式会社 半導体薄膜形成法
JPH0652716B2 (ja) * 1984-08-24 1994-07-06 日本電信電話株式会社 半導体結晶性膜製造装置
US6113701A (en) * 1985-02-14 2000-09-05 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, manufacturing method, and system
JPH0697660B2 (ja) * 1985-03-23 1994-11-30 日本電信電話株式会社 薄膜形成方法
JPS61267324A (ja) * 1985-05-21 1986-11-26 Fuji Electric Co Ltd 乾式薄膜加工装置
JPS61281872A (ja) * 1985-06-07 1986-12-12 Matsushita Electric Ind Co Ltd 非晶質シリコンゲルマニウム膜の形成方法
JPS627859A (ja) * 1985-07-05 1987-01-14 Hitachi Ltd アモルフアスシリコン膜の形成方法
JPS6289882A (ja) * 1985-10-14 1987-04-24 Semiconductor Energy Lab Co Ltd 気相エツチング方法
JPS6289875A (ja) * 1985-10-14 1987-04-24 Semiconductor Energy Lab Co Ltd 薄膜形成装置
JPS62116774A (ja) * 1985-11-15 1987-05-28 Canon Inc 成膜装置
JPS62150726A (ja) * 1985-12-24 1987-07-04 Fuji Electric Co Ltd 半導体装置の製造方法
JPS62172714A (ja) * 1986-01-25 1987-07-29 Nippon Telegr & Teleph Corp <Ntt> 化合物半導体薄膜の製造方法
JPH064916B2 (ja) * 1986-01-27 1994-01-19 新電元工業株式会社 気相より金属合金を堆積させる方法および装置
JPS62229823A (ja) * 1986-03-29 1987-10-08 Nippon Telegr & Teleph Corp <Ntt> 不純物添加化合物半導体結晶の成長方法
JPS6333575A (ja) * 1986-07-28 1988-02-13 Nippon Soken Inc 電子サイクロトロンプラズマｃｖｄ装置
JPS6343324A (ja) * 1986-08-09 1988-02-24 Anelva Corp プラズマシヤワ−装置
JPS6350028A (ja) * 1986-08-20 1988-03-02 Fujitsu Ltd 薄膜形成方法
JPS6369221A (ja) * 1986-09-10 1988-03-29 Fujitsu Ltd エピタキシヤル成長装置
JPS6383273A (ja) * 1986-09-26 1988-04-13 Res Dev Corp Of Japan 窒化ホウ素膜の合成方法
US6677001B1 (en) 1986-11-10 2004-01-13 Semiconductor Energy Laboratory Co., Ltd. Microwave enhanced CVD method and apparatus
EP0273741B1 (en) * 1986-12-29 1991-10-23 Sumitomo Metal Industries, Ltd. Plasma apparatus
US5433788A (en) * 1987-01-19 1995-07-18 Hitachi, Ltd. Apparatus for plasma treatment using electron cyclotron resonance
KR960015609B1 (ko) * 1987-01-19 1996-11-18 미쓰다 가쓰시게 플라즈마 처리장치 및 방법
JPS63217620A (ja) * 1987-03-06 1988-09-09 Hitachi Ltd プラズマ処理装置
JPS63221623A (ja) * 1987-03-10 1988-09-14 Fujitsu Ltd 乾式薄膜加工装置
JPS6456874A (en) * 1987-03-27 1989-03-03 Canon Kk Microwave plasma cvd device
JPS63286579A (ja) * 1987-05-19 1988-11-24 Raimuzu:Kk 薄膜の形成方法
JP2644764B2 (ja) * 1987-08-21 1997-08-25 松下電器産業株式会社 ヘテロ接合素子の製造方法
JPH0216731A (ja) * 1988-07-05 1990-01-19 Mitsubishi Electric Corp プラズマ反応装置
JPH0252422A (ja) * 1988-08-17 1990-02-22 Nippon Telegr & Teleph Corp <Ntt> 薄膜製造方法及び装置
JPH0273977A (ja) * 1988-09-09 1990-03-13 Sony Corp プラズマ装置
JPH0362517A (ja) * 1989-03-27 1991-03-18 Anelva Corp マイクロ波プラズマ処理装置
US4990229A (en) * 1989-06-13 1991-02-05 Plasma & Materials Technologies, Inc. High density plasma deposition and etching apparatus
JPH03232224A (ja) * 1990-02-07 1991-10-16 Mitsubishi Electric Corp プラズマ処理装置
JPH0460556U (en:Method) * 1990-10-03 1992-05-25
JPH05251356A (ja) * 1991-11-06 1993-09-28 Semiconductor Energy Lab Co Ltd 被膜形成方法
US5366586A (en) * 1992-02-03 1994-11-22 Nec Corporation Plasma formation using electron cyclotron resonance and method for processing substrate by using the same
JP2972477B2 (ja) * 1993-01-27 1999-11-08 日本電気株式会社 Ｒｆ・ｅｃｒプラズマエッチング装置
JP2546596B2 (ja) * 1993-02-19 1996-10-23 株式会社日立製作所 プラズマ処理装置
US5468341A (en) * 1993-12-28 1995-11-21 Nec Corporation Plasma-etching method and apparatus therefor
JPH07161700A (ja) * 1994-07-11 1995-06-23 Hitachi Ltd プラズマ処理方法
JP2703184B2 (ja) * 1994-07-11 1998-01-26 株式会社日立製作所 プラズマ処理方法
JP2845163B2 (ja) * 1994-10-27 1999-01-13 日本電気株式会社 プラズマ処理方法及びその装置
JP2685418B2 (ja) * 1994-11-28 1997-12-03 松下電器産業株式会社 薄膜形成方法及びエッチング方法
JPH1081971A (ja) 1996-07-10 1998-03-31 Suzuki Motor Corp 高分子基材へのプラズマＣＶＤによるＳｉＣ薄膜形成方法及び装置
JP2899254B2 (ja) * 1996-11-08 1999-06-02 株式会社半導体エネルギー研究所 プラズマｃｖｄ装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5335779B2 (en:Method) * 1973-05-31 1978-09-28
JPS5132508A (ja) * 1974-09-07 1976-03-19 Kaneo Ishii Echirengurikooruekinogansuibunrisochi
JPS5344795B2 (en:Method) * 1974-12-18 1978-12-01
JPS5244174A (en) * 1975-10-06 1977-04-06 Hitachi Ltd Plasma treatment device
JPS5325367A (en) * 1976-08-23 1978-03-09 Hitachi Ltd Plasma tr eating method and apparatus
JPS53110378A (en) * 1977-03-09 1978-09-27 Hitachi Ltd Plasma carrying device

Also Published As

Publication number Publication date
JPS56155535A (en) 1981-12-01

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