JPS6225422A - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPS6225422A
JPS6225422A JP60164803A JP16480385A JPS6225422A JP S6225422 A JPS6225422 A JP S6225422A JP 60164803 A JP60164803 A JP 60164803A JP 16480385 A JP16480385 A JP 16480385A JP S6225422 A JPS6225422 A JP S6225422A
Authority
JP
Japan
Prior art keywords
parameters
semiconductor manufacturing
input
main
main operation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60164803A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0535568B2 (enrdf_load_stackoverflow
Inventor
Ryuichi Sato
隆一 佐藤
Masanori Numata
沼田　正徳
Fumiyoshi Hamazaki
浜崎　文栄
Naoki Ayada
綾田　直樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP60164803A priority Critical patent/JPS6225422A/ja
Publication of JPS6225422A publication Critical patent/JPS6225422A/ja
Priority to US07/752,986 priority patent/US5197118A/en
Publication of JPH0535568B2 publication Critical patent/JPH0535568B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Safety Devices In Control Systems (AREA)
JP60164803A 1985-07-25 1985-07-25 半導体製造装置 Granted JPS6225422A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60164803A JPS6225422A (ja) 1985-07-25 1985-07-25 半導体製造装置
US07/752,986 US5197118A (en) 1985-07-25 1991-09-03 Control system for a fine pattern printing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60164803A JPS6225422A (ja) 1985-07-25 1985-07-25 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS6225422A true JPS6225422A (ja) 1987-02-03
JPH0535568B2 JPH0535568B2 (enrdf_load_stackoverflow) 1993-05-26

Family

ID=15800218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60164803A Granted JPS6225422A (ja) 1985-07-25 1985-07-25 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS6225422A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08216939A (ja) * 1995-02-16 1996-08-27 Shizuoka Kasei Kk スペアタイヤカバー

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5549713A (en) * 1978-10-02 1980-04-10 Nec Corp Automatic work processing system
JPS5682909A (en) * 1979-10-31 1981-07-07 Valeron Corp Machine process controller
JPS57212406A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Method and device for focusing
JPS58156938A (ja) * 1982-03-12 1983-09-19 Hitachi Ltd 露光装置
JPS58179834A (ja) * 1982-04-14 1983-10-21 Canon Inc 投影露光装置及び方法
JPS60205955A (ja) * 1984-03-29 1985-10-17 Mitsubishi Electric Corp 電子ビ−ム加工装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5549713A (en) * 1978-10-02 1980-04-10 Nec Corp Automatic work processing system
JPS5682909A (en) * 1979-10-31 1981-07-07 Valeron Corp Machine process controller
JPS57212406A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Method and device for focusing
JPS58156938A (ja) * 1982-03-12 1983-09-19 Hitachi Ltd 露光装置
JPS58179834A (ja) * 1982-04-14 1983-10-21 Canon Inc 投影露光装置及び方法
JPS60205955A (ja) * 1984-03-29 1985-10-17 Mitsubishi Electric Corp 電子ビ−ム加工装置

Also Published As

Publication number Publication date
JPH0535568B2 (enrdf_load_stackoverflow) 1993-05-26

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