JPH0535568B2 - - Google Patents

Info

Publication number
JPH0535568B2
JPH0535568B2 JP60164803A JP16480385A JPH0535568B2 JP H0535568 B2 JPH0535568 B2 JP H0535568B2 JP 60164803 A JP60164803 A JP 60164803A JP 16480385 A JP16480385 A JP 16480385A JP H0535568 B2 JPH0535568 B2 JP H0535568B2
Authority
JP
Japan
Prior art keywords
parameters
main operation
displayed
semiconductor manufacturing
input
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60164803A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6225422A (ja
Inventor
Ryuichi Sato
Masanori Numata
Fumyoshi Hamazaki
Naoki Ayada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP60164803A priority Critical patent/JPS6225422A/ja
Publication of JPS6225422A publication Critical patent/JPS6225422A/ja
Priority to US07/752,986 priority patent/US5197118A/en
Publication of JPH0535568B2 publication Critical patent/JPH0535568B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Safety Devices In Control Systems (AREA)
JP60164803A 1985-07-25 1985-07-25 半導体製造装置 Granted JPS6225422A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60164803A JPS6225422A (ja) 1985-07-25 1985-07-25 半導体製造装置
US07/752,986 US5197118A (en) 1985-07-25 1991-09-03 Control system for a fine pattern printing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60164803A JPS6225422A (ja) 1985-07-25 1985-07-25 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS6225422A JPS6225422A (ja) 1987-02-03
JPH0535568B2 true JPH0535568B2 (enrdf_load_stackoverflow) 1993-05-26

Family

ID=15800218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60164803A Granted JPS6225422A (ja) 1985-07-25 1985-07-25 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS6225422A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08216939A (ja) * 1995-02-16 1996-08-27 Shizuoka Kasei Kk スペアタイヤカバー

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5549713A (en) * 1978-10-02 1980-04-10 Nec Corp Automatic work processing system
US4279013A (en) * 1979-10-31 1981-07-14 The Valeron Corporation Machine process controller
JPS57212406A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Method and device for focusing
JPS58156938A (ja) * 1982-03-12 1983-09-19 Hitachi Ltd 露光装置
JPS58179834A (ja) * 1982-04-14 1983-10-21 Canon Inc 投影露光装置及び方法
JPS60205955A (ja) * 1984-03-29 1985-10-17 Mitsubishi Electric Corp 電子ビ−ム加工装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08216939A (ja) * 1995-02-16 1996-08-27 Shizuoka Kasei Kk スペアタイヤカバー

Also Published As

Publication number Publication date
JPS6225422A (ja) 1987-02-03

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