JPH0535566B2 - - Google Patents

Info

Publication number
JPH0535566B2
JPH0535566B2 JP60164799A JP16479985A JPH0535566B2 JP H0535566 B2 JPH0535566 B2 JP H0535566B2 JP 60164799 A JP60164799 A JP 60164799A JP 16479985 A JP16479985 A JP 16479985A JP H0535566 B2 JPH0535566 B2 JP H0535566B2
Authority
JP
Japan
Prior art keywords
commands
group
input
command
semiconductor manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60164799A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6225418A (ja
Inventor
Ryuichi Sato
Masanori Numata
Fumyoshi Hamazaki
Naoki Ayada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP60164799A priority Critical patent/JPS6225418A/ja
Publication of JPS6225418A publication Critical patent/JPS6225418A/ja
Priority to US07/752,986 priority patent/US5197118A/en
Publication of JPH0535566B2 publication Critical patent/JPH0535566B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP60164799A 1985-07-25 1985-07-25 半導体製造装置 Granted JPS6225418A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60164799A JPS6225418A (ja) 1985-07-25 1985-07-25 半導体製造装置
US07/752,986 US5197118A (en) 1985-07-25 1991-09-03 Control system for a fine pattern printing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60164799A JPS6225418A (ja) 1985-07-25 1985-07-25 半導体製造装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP6107400A Division JP2614188B2 (ja) 1994-04-25 1994-04-25 コマンド管理方法

Publications (2)

Publication Number Publication Date
JPS6225418A JPS6225418A (ja) 1987-02-03
JPH0535566B2 true JPH0535566B2 (enrdf_load_stackoverflow) 1993-05-26

Family

ID=15800152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60164799A Granted JPS6225418A (ja) 1985-07-25 1985-07-25 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS6225418A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2631395B2 (ja) * 1988-09-09 1997-07-16 キヤノン株式会社 露光装置の制御方法
JPH082721Y2 (ja) * 1989-02-23 1996-01-29 ヤマハ株式会社 パラメータ設定装置
DE102015007831B4 (de) 2015-06-18 2017-08-17 Michael Klemt Schaltungsanordnung zur Galvanisch isolierten Ansteuerung eines ladungsgesteuerten Leistungsschalters

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5549713A (en) * 1978-10-02 1980-04-10 Nec Corp Automatic work processing system
FR2549983B1 (fr) * 1983-07-25 1988-03-18 Telemecanique Electrique Terminal pour l'elaboration de programmes utilisables par un automate programmable

Also Published As

Publication number Publication date
JPS6225418A (ja) 1987-02-03

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term