JPS6118351B2 - - Google Patents

Info

Publication number
JPS6118351B2
JPS6118351B2 JP7660676A JP7660676A JPS6118351B2 JP S6118351 B2 JPS6118351 B2 JP S6118351B2 JP 7660676 A JP7660676 A JP 7660676A JP 7660676 A JP7660676 A JP 7660676A JP S6118351 B2 JPS6118351 B2 JP S6118351B2
Authority
JP
Japan
Prior art keywords
substrate
source
epitaxial layer
contact
heat sink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7660676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5214385A (en
Inventor
Richaado Detsukaa Debitsudo
Oomori Masahiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of JPS5214385A publication Critical patent/JPS5214385A/ja
Publication of JPS6118351B2 publication Critical patent/JPS6118351B2/ja
Granted legal-status Critical Current

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Classifications

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    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/1901—Structure
    • H01L2924/1904—Component type
    • H01L2924/19041—Component type being a capacitor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/1901—Structure
    • H01L2924/1904—Component type
    • H01L2924/19043—Component type being a resistor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/20—Parameters
    • H01L2924/207—Diameter ranges
    • H01L2924/20752—Diameter ranges larger or equal to 20 microns less than 30 microns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/30107—Inductance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/3011—Impedance

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP7660676A 1975-06-30 1976-06-30 Microwave fet substrate penetrating electrode contactor Granted JPS5214385A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/591,690 US3986196A (en) 1975-06-30 1975-06-30 Through-substrate source contact for microwave FET

Publications (2)

Publication Number Publication Date
JPS5214385A JPS5214385A (en) 1977-02-03
JPS6118351B2 true JPS6118351B2 (el) 1986-05-12

Family

ID=24367492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7660676A Granted JPS5214385A (en) 1975-06-30 1976-06-30 Microwave fet substrate penetrating electrode contactor

Country Status (6)

Country Link
US (1) US3986196A (el)
JP (1) JPS5214385A (el)
CA (1) CA1057411A (el)
DE (1) DE2629203A1 (el)
FR (1) FR2316742A1 (el)
GB (1) GB1547463A (el)

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Also Published As

Publication number Publication date
DE2629203A1 (de) 1977-02-03
FR2316742B1 (el) 1982-10-15
JPS5214385A (en) 1977-02-03
GB1547463A (en) 1979-06-20
DE2629203C2 (el) 1988-01-14
US3986196A (en) 1976-10-12
CA1057411A (en) 1979-06-26
FR2316742A1 (fr) 1977-01-28

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