JPS60167199A - 半導体記憶装置の検査装置 - Google Patents
半導体記憶装置の検査装置Info
- Publication number
- JPS60167199A JPS60167199A JP59167341A JP16734184A JPS60167199A JP S60167199 A JPS60167199 A JP S60167199A JP 59167341 A JP59167341 A JP 59167341A JP 16734184 A JP16734184 A JP 16734184A JP S60167199 A JPS60167199 A JP S60167199A
- Authority
- JP
- Japan
- Prior art keywords
- memory cell
- signal
- acceptable
- unacceptable
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 24
- 238000007689 inspection Methods 0.000 title abstract description 12
- 238000012360 testing method Methods 0.000 claims abstract description 40
- 238000003860 storage Methods 0.000 claims abstract description 24
- 230000007547 defect Effects 0.000 abstract description 24
- 230000002950 deficient Effects 0.000 abstract description 15
- 238000010586 diagram Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000011161 development Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000012356 Product development Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 241001504505 Troglodytes troglodytes Species 0.000 description 1
- 241000981595 Zoysia japonica Species 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
Landscapes
- For Increasing The Reliability Of Semiconductor Memories (AREA)
- Tests Of Electronic Circuits (AREA)
- Techniques For Improving Reliability Of Storages (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59167341A JPS60167199A (ja) | 1984-08-10 | 1984-08-10 | 半導体記憶装置の検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59167341A JPS60167199A (ja) | 1984-08-10 | 1984-08-10 | 半導体記憶装置の検査装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51129911A Division JPS5816559B2 (ja) | 1976-10-27 | 1976-10-27 | 半導体記憶装置の検査装置および検査方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60167199A true JPS60167199A (ja) | 1985-08-30 |
JPS6327797B2 JPS6327797B2 (enrdf_load_stackoverflow) | 1988-06-06 |
Family
ID=15847929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59167341A Granted JPS60167199A (ja) | 1984-08-10 | 1984-08-10 | 半導体記憶装置の検査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60167199A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5317573A (en) * | 1989-08-30 | 1994-05-31 | International Business Machines Corporation | Apparatus and method for real time data error capture and compression redundancy analysis |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5066124A (enrdf_load_stackoverflow) * | 1973-10-12 | 1975-06-04 |
-
1984
- 1984-08-10 JP JP59167341A patent/JPS60167199A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5066124A (enrdf_load_stackoverflow) * | 1973-10-12 | 1975-06-04 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5317573A (en) * | 1989-08-30 | 1994-05-31 | International Business Machines Corporation | Apparatus and method for real time data error capture and compression redundancy analysis |
Also Published As
Publication number | Publication date |
---|---|
JPS6327797B2 (enrdf_load_stackoverflow) | 1988-06-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100327136B1 (ko) | 반도체 메모리 장치 및 이 장치의 병렬 비트 테스트 방법 | |
KR100432791B1 (ko) | 메모리 시험방법 및 메모리 시험장치 | |
KR950011968B1 (ko) | 용장 회로부 메모리 ic의 시험 장치 | |
JP3558252B2 (ja) | 半導体メモリ試験装置 | |
JPH1092195A (ja) | メモリ試験装置 | |
JPH09318707A (ja) | 半導体メモリ試験方法および装置 | |
US6480019B2 (en) | Multiple voted logic cell testable by a scan chain and system and method of testing the same | |
JPH1116393A (ja) | テスト回路 | |
US4642784A (en) | Integrated circuit manufacture | |
KR100212599B1 (ko) | 메모리 시험장치 | |
JPS60167199A (ja) | 半導体記憶装置の検査装置 | |
JPS5816559B2 (ja) | 半導体記憶装置の検査装置および検査方法 | |
JPS6327798B2 (enrdf_load_stackoverflow) | ||
JP2865035B2 (ja) | 半導体記憶装置の試験方法 | |
JPH0823016A (ja) | 半導体メモリのテスト方法 | |
JPH0252446A (ja) | 集積回路の試験装置 | |
JP2000227459A (ja) | 半導体集積回路とそのテスト方法、及びそのテストに使用するプローブ治具 | |
JP2001357696A (ja) | 半導体メモリ検査装置と検査方法及び検査プログラムを記録した記録媒体 | |
JPH0628896A (ja) | Bistによるメモリのテスト方法 | |
JPH1186593A (ja) | 集積回路試験装置 | |
JP3873586B2 (ja) | 回路基板検査装置および回路基板検査方法 | |
JP2000195296A (ja) | メモリ試験装置 | |
JPH0748317B2 (ja) | 半導体メモリ検査方式 | |
JPS63239836A (ja) | ウエハ検査方法 | |
JPS59208869A (ja) | 半導体メモリの故障解析方法 |