JPS58189533U - ウエ−ハ用サセプタ - Google Patents

ウエ−ハ用サセプタ

Info

Publication number
JPS58189533U
JPS58189533U JP8535082U JP8535082U JPS58189533U JP S58189533 U JPS58189533 U JP S58189533U JP 8535082 U JP8535082 U JP 8535082U JP 8535082 U JP8535082 U JP 8535082U JP S58189533 U JPS58189533 U JP S58189533U
Authority
JP
Japan
Prior art keywords
susceptor
wafer
view
abstract
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8535082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6140768Y2 (enExample
Inventor
藤森　泰治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP8535082U priority Critical patent/JPS58189533U/ja
Publication of JPS58189533U publication Critical patent/JPS58189533U/ja
Application granted granted Critical
Publication of JPS6140768Y2 publication Critical patent/JPS6140768Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP8535082U 1982-06-10 1982-06-10 ウエ−ハ用サセプタ Granted JPS58189533U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8535082U JPS58189533U (ja) 1982-06-10 1982-06-10 ウエ−ハ用サセプタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8535082U JPS58189533U (ja) 1982-06-10 1982-06-10 ウエ−ハ用サセプタ

Publications (2)

Publication Number Publication Date
JPS58189533U true JPS58189533U (ja) 1983-12-16
JPS6140768Y2 JPS6140768Y2 (enExample) 1986-11-20

Family

ID=30094229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8535082U Granted JPS58189533U (ja) 1982-06-10 1982-06-10 ウエ−ハ用サセプタ

Country Status (1)

Country Link
JP (1) JPS58189533U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1032239A (ja) * 1996-07-12 1998-02-03 Toto Ltd 静電チャックステージ及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1032239A (ja) * 1996-07-12 1998-02-03 Toto Ltd 静電チャックステージ及びその製造方法

Also Published As

Publication number Publication date
JPS6140768Y2 (enExample) 1986-11-20

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