JPS62145334U - - Google Patents
Info
- Publication number
- JPS62145334U JPS62145334U JP1986034472U JP3447286U JPS62145334U JP S62145334 U JPS62145334 U JP S62145334U JP 1986034472 U JP1986034472 U JP 1986034472U JP 3447286 U JP3447286 U JP 3447286U JP S62145334 U JPS62145334 U JP S62145334U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- workpiece
- processing apparatus
- sent
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986034472U JPS62145334U (enExample) | 1986-03-08 | 1986-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986034472U JPS62145334U (enExample) | 1986-03-08 | 1986-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62145334U true JPS62145334U (enExample) | 1987-09-12 |
Family
ID=30843058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986034472U Pending JPS62145334U (enExample) | 1986-03-08 | 1986-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62145334U (enExample) |
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1986
- 1986-03-08 JP JP1986034472U patent/JPS62145334U/ja active Pending