JPS6393632U - - Google Patents
Info
- Publication number
- JPS6393632U JPS6393632U JP18824186U JP18824186U JPS6393632U JP S6393632 U JPS6393632 U JP S6393632U JP 18824186 U JP18824186 U JP 18824186U JP 18824186 U JP18824186 U JP 18824186U JP S6393632 U JPS6393632 U JP S6393632U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor manufacturing
- quartz
- chamber
- reaction vessel
- manufacturing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18824186U JPS6393632U (enExample) | 1986-12-05 | 1986-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18824186U JPS6393632U (enExample) | 1986-12-05 | 1986-12-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6393632U true JPS6393632U (enExample) | 1988-06-17 |
Family
ID=31139421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18824186U Pending JPS6393632U (enExample) | 1986-12-05 | 1986-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6393632U (enExample) |
-
1986
- 1986-12-05 JP JP18824186U patent/JPS6393632U/ja active Pending