JPH0519952Y2 - - Google Patents

Info

Publication number
JPH0519952Y2
JPH0519952Y2 JP1987169701U JP16970187U JPH0519952Y2 JP H0519952 Y2 JPH0519952 Y2 JP H0519952Y2 JP 1987169701 U JP1987169701 U JP 1987169701U JP 16970187 U JP16970187 U JP 16970187U JP H0519952 Y2 JPH0519952 Y2 JP H0519952Y2
Authority
JP
Japan
Prior art keywords
wafer
lower plate
heat treatment
wafer support
column
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987169701U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0173926U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987169701U priority Critical patent/JPH0519952Y2/ja
Publication of JPH0173926U publication Critical patent/JPH0173926U/ja
Application granted granted Critical
Publication of JPH0519952Y2 publication Critical patent/JPH0519952Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987169701U 1987-11-06 1987-11-06 Expired - Lifetime JPH0519952Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987169701U JPH0519952Y2 (enExample) 1987-11-06 1987-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987169701U JPH0519952Y2 (enExample) 1987-11-06 1987-11-06

Publications (2)

Publication Number Publication Date
JPH0173926U JPH0173926U (enExample) 1989-05-18
JPH0519952Y2 true JPH0519952Y2 (enExample) 1993-05-25

Family

ID=31459994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987169701U Expired - Lifetime JPH0519952Y2 (enExample) 1987-11-06 1987-11-06

Country Status (1)

Country Link
JP (1) JPH0519952Y2 (enExample)

Also Published As

Publication number Publication date
JPH0173926U (enExample) 1989-05-18

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