JPS6188242U - - Google Patents
Info
- Publication number
- JPS6188242U JPS6188242U JP17471784U JP17471784U JPS6188242U JP S6188242 U JPS6188242 U JP S6188242U JP 17471784 U JP17471784 U JP 17471784U JP 17471784 U JP17471784 U JP 17471784U JP S6188242 U JPS6188242 U JP S6188242U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- semiconductor wafer
- support device
- wafer support
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17471784U JPS6188242U (enExample) | 1984-11-16 | 1984-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17471784U JPS6188242U (enExample) | 1984-11-16 | 1984-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6188242U true JPS6188242U (enExample) | 1986-06-09 |
Family
ID=30732332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17471784U Pending JPS6188242U (enExample) | 1984-11-16 | 1984-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6188242U (enExample) |
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1984
- 1984-11-16 JP JP17471784U patent/JPS6188242U/ja active Pending