JPS6140768Y2 - - Google Patents

Info

Publication number
JPS6140768Y2
JPS6140768Y2 JP1982085350U JP8535082U JPS6140768Y2 JP S6140768 Y2 JPS6140768 Y2 JP S6140768Y2 JP 1982085350 U JP1982085350 U JP 1982085350U JP 8535082 U JP8535082 U JP 8535082U JP S6140768 Y2 JPS6140768 Y2 JP S6140768Y2
Authority
JP
Japan
Prior art keywords
wafer
susceptor
carbon
molded body
impregnated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982085350U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58189533U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1982085350U priority Critical patent/JPS58189533U/ja
Publication of JPS58189533U publication Critical patent/JPS58189533U/ja
Application granted granted Critical
Publication of JPS6140768Y2 publication Critical patent/JPS6140768Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1982085350U 1982-06-10 1982-06-10 ウエ−ハ用サセプタ Granted JPS58189533U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982085350U JPS58189533U (ja) 1982-06-10 1982-06-10 ウエ−ハ用サセプタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982085350U JPS58189533U (ja) 1982-06-10 1982-06-10 ウエ−ハ用サセプタ

Publications (2)

Publication Number Publication Date
JPS58189533U JPS58189533U (ja) 1983-12-16
JPS6140768Y2 true JPS6140768Y2 (enExample) 1986-11-20

Family

ID=30094229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982085350U Granted JPS58189533U (ja) 1982-06-10 1982-06-10 ウエ−ハ用サセプタ

Country Status (1)

Country Link
JP (1) JPS58189533U (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3622353B2 (ja) * 1996-07-12 2005-02-23 東陶機器株式会社 静電チャックステージ及びその製造方法

Also Published As

Publication number Publication date
JPS58189533U (ja) 1983-12-16

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