JPS58169964A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS58169964A
JPS58169964A JP57052774A JP5277482A JPS58169964A JP S58169964 A JPS58169964 A JP S58169964A JP 57052774 A JP57052774 A JP 57052774A JP 5277482 A JP5277482 A JP 5277482A JP S58169964 A JPS58169964 A JP S58169964A
Authority
JP
Japan
Prior art keywords
film
substrate
semiconductor device
mask
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57052774A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332232B2 (enExample
Inventor
Nobuo Sasaki
伸夫 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57052774A priority Critical patent/JPS58169964A/ja
Publication of JPS58169964A publication Critical patent/JPS58169964A/ja
Publication of JPH0332232B2 publication Critical patent/JPH0332232B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates

Landscapes

  • Element Separation (AREA)
JP57052774A 1982-03-30 1982-03-30 半導体装置 Granted JPS58169964A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57052774A JPS58169964A (ja) 1982-03-30 1982-03-30 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57052774A JPS58169964A (ja) 1982-03-30 1982-03-30 半導体装置

Publications (2)

Publication Number Publication Date
JPS58169964A true JPS58169964A (ja) 1983-10-06
JPH0332232B2 JPH0332232B2 (enExample) 1991-05-10

Family

ID=12924205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57052774A Granted JPS58169964A (ja) 1982-03-30 1982-03-30 半導体装置

Country Status (1)

Country Link
JP (1) JPS58169964A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61204962A (ja) * 1985-03-08 1986-09-11 Seiko Instr & Electronics Ltd Ｃｍｏｓの製造方法
JPH02308553A (ja) * 1989-05-23 1990-12-21 Fujitsu Ltd Ｓｏｉ型半導体装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55153343A (en) * 1979-05-18 1980-11-29 Fujitsu Ltd Semiconductor device and its manufacture
JPS5742143A (en) * 1980-08-28 1982-03-09 Fujitsu Ltd Manufacture of semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55153343A (en) * 1979-05-18 1980-11-29 Fujitsu Ltd Semiconductor device and its manufacture
JPS5742143A (en) * 1980-08-28 1982-03-09 Fujitsu Ltd Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61204962A (ja) * 1985-03-08 1986-09-11 Seiko Instr & Electronics Ltd Ｃｍｏｓの製造方法
JPH02308553A (ja) * 1989-05-23 1990-12-21 Fujitsu Ltd Ｓｏｉ型半導体装置

Also Published As

Publication number Publication date
JPH0332232B2 (enExample) 1991-05-10

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