JPS6230494B2 - - Google Patents

Info

Publication number
JPS6230494B2
JPS6230494B2 JP54115023A JP11502379A JPS6230494B2 JP S6230494 B2 JPS6230494 B2 JP S6230494B2 JP 54115023 A JP54115023 A JP 54115023A JP 11502379 A JP11502379 A JP 11502379A JP S6230494 B2 JPS6230494 B2 JP S6230494B2
Authority
JP
Japan
Prior art keywords
insulating film
forming
contact hole
film
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54115023A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5638842A (en
Inventor
Haruo Amano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP11502379A priority Critical patent/JPS5638842A/ja
Publication of JPS5638842A publication Critical patent/JPS5638842A/ja
Publication of JPS6230494B2 publication Critical patent/JPS6230494B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W20/01—

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP11502379A 1979-09-07 1979-09-07 Manufacture of semiconductor device Granted JPS5638842A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11502379A JPS5638842A (en) 1979-09-07 1979-09-07 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11502379A JPS5638842A (en) 1979-09-07 1979-09-07 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5638842A JPS5638842A (en) 1981-04-14
JPS6230494B2 true JPS6230494B2 (enExample) 1987-07-02

Family

ID=14652313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11502379A Granted JPS5638842A (en) 1979-09-07 1979-09-07 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5638842A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08312625A (ja) * 1995-05-19 1996-11-26 Takashi Nakao ナット装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58147046A (ja) * 1982-02-25 1983-09-01 Nippon Denso Co Ltd 半導体装置の製造方法
JPH0626235B2 (ja) * 1984-06-20 1994-04-06 株式会社日立製作所 半導体集積回路装置
JP2512900B2 (ja) * 1986-05-22 1996-07-03 三菱電機株式会社 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08312625A (ja) * 1995-05-19 1996-11-26 Takashi Nakao ナット装置

Also Published As

Publication number Publication date
JPS5638842A (en) 1981-04-14

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