JPS5669833A - Fine processing method of thin film - Google Patents

Fine processing method of thin film

Info

Publication number
JPS5669833A
JPS5669833A JP14516079A JP14516079A JPS5669833A JP S5669833 A JPS5669833 A JP S5669833A JP 14516079 A JP14516079 A JP 14516079A JP 14516079 A JP14516079 A JP 14516079A JP S5669833 A JPS5669833 A JP S5669833A
Authority
JP
Japan
Prior art keywords
film
separating space
fine separating
fine
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14516079A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5719571B2 (enExample
Inventor
Masakazu Shiozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14516079A priority Critical patent/JPS5669833A/ja
Publication of JPS5669833A publication Critical patent/JPS5669833A/ja
Publication of JPS5719571B2 publication Critical patent/JPS5719571B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP14516079A 1979-11-09 1979-11-09 Fine processing method of thin film Granted JPS5669833A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14516079A JPS5669833A (en) 1979-11-09 1979-11-09 Fine processing method of thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14516079A JPS5669833A (en) 1979-11-09 1979-11-09 Fine processing method of thin film

Publications (2)

Publication Number Publication Date
JPS5669833A true JPS5669833A (en) 1981-06-11
JPS5719571B2 JPS5719571B2 (enExample) 1982-04-23

Family

ID=15378807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14516079A Granted JPS5669833A (en) 1979-11-09 1979-11-09 Fine processing method of thin film

Country Status (1)

Country Link
JP (1) JPS5669833A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5893343A (ja) * 1981-11-30 1983-06-03 Toshiba Corp 半導体集積回路の分離領域形成方法
JPS5952848A (ja) * 1982-09-20 1984-03-27 Mitsubishi Electric Corp 半導体装置の製造方法
JPS5978542A (ja) * 1982-10-27 1984-05-07 Nippon Telegr & Teleph Corp <Ntt> 半導体装置の製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6211241U (enExample) * 1985-07-02 1987-01-23

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5893343A (ja) * 1981-11-30 1983-06-03 Toshiba Corp 半導体集積回路の分離領域形成方法
JPS5952848A (ja) * 1982-09-20 1984-03-27 Mitsubishi Electric Corp 半導体装置の製造方法
JPS5978542A (ja) * 1982-10-27 1984-05-07 Nippon Telegr & Teleph Corp <Ntt> 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5719571B2 (enExample) 1982-04-23

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