JPS5719571B2 - - Google Patents
Info
- Publication number
- JPS5719571B2 JPS5719571B2 JP14516079A JP14516079A JPS5719571B2 JP S5719571 B2 JPS5719571 B2 JP S5719571B2 JP 14516079 A JP14516079 A JP 14516079A JP 14516079 A JP14516079 A JP 14516079A JP S5719571 B2 JPS5719571 B2 JP S5719571B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P50/00—
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14516079A JPS5669833A (en) | 1979-11-09 | 1979-11-09 | Fine processing method of thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14516079A JPS5669833A (en) | 1979-11-09 | 1979-11-09 | Fine processing method of thin film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5669833A JPS5669833A (en) | 1981-06-11 |
| JPS5719571B2 true JPS5719571B2 (enExample) | 1982-04-23 |
Family
ID=15378807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14516079A Granted JPS5669833A (en) | 1979-11-09 | 1979-11-09 | Fine processing method of thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5669833A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6211241U (enExample) * | 1985-07-02 | 1987-01-23 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5893343A (ja) * | 1981-11-30 | 1983-06-03 | Toshiba Corp | 半導体集積回路の分離領域形成方法 |
| JPS5952848A (ja) * | 1982-09-20 | 1984-03-27 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
| JPS5978542A (ja) * | 1982-10-27 | 1984-05-07 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置の製造方法 |
-
1979
- 1979-11-09 JP JP14516079A patent/JPS5669833A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6211241U (enExample) * | 1985-07-02 | 1987-01-23 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5669833A (en) | 1981-06-11 |