JPS55165649A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS55165649A JPS55165649A JP7351479A JP7351479A JPS55165649A JP S55165649 A JPS55165649 A JP S55165649A JP 7351479 A JP7351479 A JP 7351479A JP 7351479 A JP7351479 A JP 7351479A JP S55165649 A JPS55165649 A JP S55165649A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- polycrystalline
- wirings
- laminated
- integration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000004065 semiconductor Substances 0.000 title 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 230000010354 integration Effects 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/761—PN junctions
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Bipolar Integrated Circuits (AREA)
- Local Oxidation Of Silicon (AREA)
- Bipolar Transistors (AREA)
- Element Separation (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7351479A JPS55165649A (en) | 1979-06-13 | 1979-06-13 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7351479A JPS55165649A (en) | 1979-06-13 | 1979-06-13 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55165649A true JPS55165649A (en) | 1980-12-24 |
JPS6241422B2 JPS6241422B2 (enrdf_load_stackoverflow) | 1987-09-02 |
Family
ID=13520423
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7351479A Granted JPS55165649A (en) | 1979-06-13 | 1979-06-13 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55165649A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS585356U (ja) * | 1981-07-02 | 1983-01-13 | 三洋電機株式会社 | 抵抗素子 |
JPS62279679A (ja) * | 1986-05-29 | 1987-12-04 | Fujitsu Ltd | 論理用半導体装置 |
DE4309898B4 (de) * | 1992-03-30 | 2005-11-03 | Rohm Co. Ltd. | Verfahren zur Herstellung eines Bipolartransistors mit einer Polysiliziumschicht zwischen einem Halbleiterbereich und einem Oberflächenelektrodenmetall |
-
1979
- 1979-06-13 JP JP7351479A patent/JPS55165649A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS585356U (ja) * | 1981-07-02 | 1983-01-13 | 三洋電機株式会社 | 抵抗素子 |
JPS62279679A (ja) * | 1986-05-29 | 1987-12-04 | Fujitsu Ltd | 論理用半導体装置 |
DE4309898B4 (de) * | 1992-03-30 | 2005-11-03 | Rohm Co. Ltd. | Verfahren zur Herstellung eines Bipolartransistors mit einer Polysiliziumschicht zwischen einem Halbleiterbereich und einem Oberflächenelektrodenmetall |
Also Published As
Publication number | Publication date |
---|---|
JPS6241422B2 (enrdf_load_stackoverflow) | 1987-09-02 |
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