JPS5453863A - Forming method of insulation films - Google Patents
Forming method of insulation filmsInfo
- Publication number
- JPS5453863A JPS5453863A JP12034877A JP12034877A JPS5453863A JP S5453863 A JPS5453863 A JP S5453863A JP 12034877 A JP12034877 A JP 12034877A JP 12034877 A JP12034877 A JP 12034877A JP S5453863 A JPS5453863 A JP S5453863A
- Authority
- JP
- Japan
- Prior art keywords
- film
- hole
- substrate
- coated
- etched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009413 insulation Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 3
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000001816 cooling Methods 0.000 abstract 2
- 239000000853 adhesive Substances 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 239000000498 cooling water Substances 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 150000004985 diamines Chemical class 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000009998 heat setting Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 229920001721 polyimide Polymers 0.000 abstract 1
- 239000002952 polymeric resin Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229920003002 synthetic resin Polymers 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12034877A JPS5453863A (en) | 1977-10-05 | 1977-10-05 | Forming method of insulation films |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12034877A JPS5453863A (en) | 1977-10-05 | 1977-10-05 | Forming method of insulation films |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5453863A true JPS5453863A (en) | 1979-04-27 |
| JPS6126217B2 JPS6126217B2 (en:Method) | 1986-06-19 |
Family
ID=14784001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12034877A Granted JPS5453863A (en) | 1977-10-05 | 1977-10-05 | Forming method of insulation films |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5453863A (en:Method) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5831558A (ja) * | 1981-08-18 | 1983-02-24 | Fujitsu Ltd | 半導体装置の製造方法 |
| JPS616843A (ja) * | 1984-06-20 | 1986-01-13 | Sanyo Electric Co Ltd | 半導体装置のコンタクトホ−ル形成方法 |
| JPS6248044A (ja) * | 1985-08-28 | 1987-03-02 | Oki Electric Ind Co Ltd | 多層配線形成方法 |
| JPH04229627A (ja) * | 1990-04-27 | 1992-08-19 | Hughes Aircraft Co | 電気中継部構造およびその形成方法 |
-
1977
- 1977-10-05 JP JP12034877A patent/JPS5453863A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5831558A (ja) * | 1981-08-18 | 1983-02-24 | Fujitsu Ltd | 半導体装置の製造方法 |
| JPS616843A (ja) * | 1984-06-20 | 1986-01-13 | Sanyo Electric Co Ltd | 半導体装置のコンタクトホ−ル形成方法 |
| JPS6248044A (ja) * | 1985-08-28 | 1987-03-02 | Oki Electric Ind Co Ltd | 多層配線形成方法 |
| JPH04229627A (ja) * | 1990-04-27 | 1992-08-19 | Hughes Aircraft Co | 電気中継部構造およびその形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6126217B2 (en:Method) | 1986-06-19 |
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