JPS5451785A - Manufacture of mos-type semiconductor - Google Patents

Manufacture of mos-type semiconductor

Info

Publication number
JPS5451785A
JPS5451785A JP11785477A JP11785477A JPS5451785A JP S5451785 A JPS5451785 A JP S5451785A JP 11785477 A JP11785477 A JP 11785477A JP 11785477 A JP11785477 A JP 11785477A JP S5451785 A JPS5451785 A JP S5451785A
Authority
JP
Japan
Prior art keywords
mask
electrode
gate
film
overlap margin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11785477A
Other languages
English (en)
Other versions
JPS5927098B2 (ja
Inventor
Hiroyuki Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP52117854A priority Critical patent/JPS5927098B2/ja
Publication of JPS5451785A publication Critical patent/JPS5451785A/ja
Publication of JPS5927098B2 publication Critical patent/JPS5927098B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP52117854A 1977-10-03 1977-10-03 Ｍｏｓ型半導体集積回路の製造方法 Expired JPS5927098B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52117854A JPS5927098B2 (ja) 1977-10-03 1977-10-03 Ｍｏｓ型半導体集積回路の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52117854A JPS5927098B2 (ja) 1977-10-03 1977-10-03 Ｍｏｓ型半導体集積回路の製造方法

Publications (2)

Publication Number Publication Date
JPS5451785A true JPS5451785A (en) 1979-04-23
JPS5927098B2 JPS5927098B2 (ja) 1984-07-03

Family

ID=14721924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52117854A Expired JPS5927098B2 (ja) 1977-10-03 1977-10-03 Ｍｏｓ型半導体集積回路の製造方法

Country Status (1)

Country Link
JP (1) JPS5927098B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5650533A (en) * 1979-10-01 1981-05-07 Hitachi Ltd Semiconductor device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145285A (en) * 1975-06-09 1976-12-14 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS5261960A (en) * 1975-11-18 1977-05-21 Fujitsu Ltd Production of semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145285A (en) * 1975-06-09 1976-12-14 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS5261960A (en) * 1975-11-18 1977-05-21 Fujitsu Ltd Production of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5650533A (en) * 1979-10-01 1981-05-07 Hitachi Ltd Semiconductor device

Also Published As

Publication number Publication date
JPS5927098B2 (ja) 1984-07-03

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