JPS54158445A - Sintering of photosensitive resin - Google Patents

Sintering of photosensitive resin

Info

Publication number
JPS54158445A
JPS54158445A JP6801478A JP6801478A JPS54158445A JP S54158445 A JPS54158445 A JP S54158445A JP 6801478 A JP6801478 A JP 6801478A JP 6801478 A JP6801478 A JP 6801478A JP S54158445 A JPS54158445 A JP S54158445A
Authority
JP
Japan
Prior art keywords
sintering
heated
wafer
hot plate
inert gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6801478A
Other languages
English (en)
Inventor
Masaaki Sadamori
Tetsuro Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6801478A priority Critical patent/JPS54158445A/ja
Publication of JPS54158445A publication Critical patent/JPS54158445A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Drying Of Semiconductors (AREA)
JP6801478A 1978-06-05 1978-06-05 Sintering of photosensitive resin Pending JPS54158445A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6801478A JPS54158445A (en) 1978-06-05 1978-06-05 Sintering of photosensitive resin

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6801478A JPS54158445A (en) 1978-06-05 1978-06-05 Sintering of photosensitive resin

Publications (1)

Publication Number Publication Date
JPS54158445A true JPS54158445A (en) 1979-12-14

Family

ID=13361546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6801478A Pending JPS54158445A (en) 1978-06-05 1978-06-05 Sintering of photosensitive resin

Country Status (1)

Country Link
JP (1) JPS54158445A (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5735319A (en) * 1980-08-13 1982-02-25 Hitachi Ltd Heat treatment device
JPS57166339U (ja) * 1981-04-13 1982-10-20
JPS5821332A (ja) * 1981-05-15 1983-02-08 ジ−・シ−・エ−・コ−ポレ−シヨン 半導体ウエハにレジストをベ−キングする装置
JPS5881934U (ja) * 1981-11-30 1983-06-03 株式会社日立製作所 自動連続式ベ−ク炉
JPS64738A (en) * 1988-05-20 1989-01-05 Hitachi Ltd Heat treatment of semiconductor wafer
US6559071B2 (en) * 1998-08-31 2003-05-06 Alliedsignal Inc. Process for producing dielectric thin films

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5735319A (en) * 1980-08-13 1982-02-25 Hitachi Ltd Heat treatment device
JPH0313735B2 (ja) * 1980-08-13 1991-02-25 Hitachi Ltd
JPS57166339U (ja) * 1981-04-13 1982-10-20
JPS6214684Y2 (ja) * 1981-04-13 1987-04-15
JPS5821332A (ja) * 1981-05-15 1983-02-08 ジ−・シ−・エ−・コ−ポレ−シヨン 半導体ウエハにレジストをベ−キングする装置
JPS5881934U (ja) * 1981-11-30 1983-06-03 株式会社日立製作所 自動連続式ベ−ク炉
JPS64738A (en) * 1988-05-20 1989-01-05 Hitachi Ltd Heat treatment of semiconductor wafer
JPH0424855B2 (ja) * 1988-05-20 1992-04-28 Hitachi Ltd
US6559071B2 (en) * 1998-08-31 2003-05-06 Alliedsignal Inc. Process for producing dielectric thin films

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