JPS5284965A - Fixing method for semiconductor substrates and supporting paltes - Google Patents
Fixing method for semiconductor substrates and supporting paltesInfo
- Publication number
- JPS5284965A JPS5284965A JP13950976A JP13950976A JPS5284965A JP S5284965 A JPS5284965 A JP S5284965A JP 13950976 A JP13950976 A JP 13950976A JP 13950976 A JP13950976 A JP 13950976A JP S5284965 A JPS5284965 A JP S5284965A
- Authority
- JP
- Japan
- Prior art keywords
- supporting
- paltes
- fixing method
- semiconductor substrates
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Thyristors (AREA)
- Die Bonding (AREA)
Abstract
PURPOSE: To prevent the variation in Vf characteristic of elements by making an SB layer only on the N type layer of an Si substrate, and heat-treating said layer through the Al layer covered on the substrate surface thereby fixing the substrate to a supporting layer.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13950976A JPS5284965A (en) | 1976-11-22 | 1976-11-22 | Fixing method for semiconductor substrates and supporting paltes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13950976A JPS5284965A (en) | 1976-11-22 | 1976-11-22 | Fixing method for semiconductor substrates and supporting paltes |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5646272A Division JPS4918269A (en) | 1972-06-08 | 1972-06-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5284965A true JPS5284965A (en) | 1977-07-14 |
Family
ID=15246943
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13950976A Pending JPS5284965A (en) | 1976-11-22 | 1976-11-22 | Fixing method for semiconductor substrates and supporting paltes |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5284965A (en) |
-
1976
- 1976-11-22 JP JP13950976A patent/JPS5284965A/en active Pending
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