JPS5284965A - Fixing method for semiconductor substrates and supporting paltes - Google Patents

Fixing method for semiconductor substrates and supporting paltes

Info

Publication number
JPS5284965A
JPS5284965A JP13950976A JP13950976A JPS5284965A JP S5284965 A JPS5284965 A JP S5284965A JP 13950976 A JP13950976 A JP 13950976A JP 13950976 A JP13950976 A JP 13950976A JP S5284965 A JPS5284965 A JP S5284965A
Authority
JP
Japan
Prior art keywords
supporting
paltes
fixing method
semiconductor substrates
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13950976A
Other languages
Japanese (ja)
Inventor
Hiroshi Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13950976A priority Critical patent/JPS5284965A/en
Publication of JPS5284965A publication Critical patent/JPS5284965A/en
Pending legal-status Critical Current

Links

Landscapes

  • Thyristors (AREA)
  • Die Bonding (AREA)

Abstract

PURPOSE: To prevent the variation in Vf characteristic of elements by making an SB layer only on the N type layer of an Si substrate, and heat-treating said layer through the Al layer covered on the substrate surface thereby fixing the substrate to a supporting layer.
COPYRIGHT: (C)1977,JPO&Japio
JP13950976A 1976-11-22 1976-11-22 Fixing method for semiconductor substrates and supporting paltes Pending JPS5284965A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13950976A JPS5284965A (en) 1976-11-22 1976-11-22 Fixing method for semiconductor substrates and supporting paltes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13950976A JPS5284965A (en) 1976-11-22 1976-11-22 Fixing method for semiconductor substrates and supporting paltes

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP5646272A Division JPS4918269A (en) 1972-06-08 1972-06-08

Publications (1)

Publication Number Publication Date
JPS5284965A true JPS5284965A (en) 1977-07-14

Family

ID=15246943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13950976A Pending JPS5284965A (en) 1976-11-22 1976-11-22 Fixing method for semiconductor substrates and supporting paltes

Country Status (1)

Country Link
JP (1) JPS5284965A (en)

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