JPS52134376A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52134376A
JPS52134376A JP5173676A JP5173676A JPS52134376A JP S52134376 A JPS52134376 A JP S52134376A JP 5173676 A JP5173676 A JP 5173676A JP 5173676 A JP5173676 A JP 5173676A JP S52134376 A JPS52134376 A JP S52134376A
Authority
JP
Japan
Prior art keywords
substrate
production
semiconductor device
sio
prevented
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5173676A
Other languages
Japanese (ja)
Inventor
Shigeru Watari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5173676A priority Critical patent/JPS52134376A/en
Publication of JPS52134376A publication Critical patent/JPS52134376A/en
Pending legal-status Critical Current

Links

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  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: The distortion of a Si substrate owing to the difference in the coefficient of thermal expansion between the Si substrate and the SiO2 film formed thereon is prevented and the warpage occuring in the difference in the film thickness of the SiO2 film formed on the Si substrate through high temperature oxidation at the time of producing ICs, etc. is prevented.
COPYRIGHT: (C)1977,JPO&Japio
JP5173676A 1976-05-06 1976-05-06 Production of semiconductor device Pending JPS52134376A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5173676A JPS52134376A (en) 1976-05-06 1976-05-06 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5173676A JPS52134376A (en) 1976-05-06 1976-05-06 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52134376A true JPS52134376A (en) 1977-11-10

Family

ID=12895175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5173676A Pending JPS52134376A (en) 1976-05-06 1976-05-06 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52134376A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5854637A (en) * 1981-09-29 1983-03-31 Fujitsu Ltd Semiconductor device
JPS59107525A (en) * 1982-12-13 1984-06-21 Nec Corp Semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5854637A (en) * 1981-09-29 1983-03-31 Fujitsu Ltd Semiconductor device
JPS59107525A (en) * 1982-12-13 1984-06-21 Nec Corp Semiconductor device

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