JPS54140883A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS54140883A JPS54140883A JP4894878A JP4894878A JPS54140883A JP S54140883 A JPS54140883 A JP S54140883A JP 4894878 A JP4894878 A JP 4894878A JP 4894878 A JP4894878 A JP 4894878A JP S54140883 A JPS54140883 A JP S54140883A
- Authority
- JP
- Japan
- Prior art keywords
- polycrystalline silicon
- insulation film
- wiring layer
- concave part
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To eliminate a break of a metallic wiring layer by providing a polycrystalline silicon film where a concave part is provided to a semiconductor substrate and by reducing a step by reducing a difference in height between the polycrystalline silicon film and the insulation film on the substrate surface.
CONSTITUTION: In silicon substrate 11, a concave part is formed. In the concave part, polycrystalline silicon films 14 and 14' are formed with their top surfaces nearly equal to insulation film 12. Next, diffusion region 16 and insulation film 15 are formed. Then, metallic wiring layer 17 is made. As a result, a difference in height between the polycrystalline silicon film and the insulation film of the substrate surface becomes small, so that a break of the metallic wiring layer will never occur which is caused by its step.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4894878A JPS54140883A (en) | 1978-04-24 | 1978-04-24 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4894878A JPS54140883A (en) | 1978-04-24 | 1978-04-24 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54140883A true JPS54140883A (en) | 1979-11-01 |
Family
ID=12817491
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4894878A Pending JPS54140883A (en) | 1978-04-24 | 1978-04-24 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54140883A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4594606A (en) * | 1982-06-10 | 1986-06-10 | Nec Corporation | Semiconductor device having multilayer wiring structure |
-
1978
- 1978-04-24 JP JP4894878A patent/JPS54140883A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4594606A (en) * | 1982-06-10 | 1986-06-10 | Nec Corporation | Semiconductor device having multilayer wiring structure |
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