JPS54150074A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS54150074A JPS54150074A JP5917778A JP5917778A JPS54150074A JP S54150074 A JPS54150074 A JP S54150074A JP 5917778 A JP5917778 A JP 5917778A JP 5917778 A JP5917778 A JP 5917778A JP S54150074 A JPS54150074 A JP S54150074A
- Authority
- JP
- Japan
- Prior art keywords
- diffusion
- semiconductor device
- layer
- sio
- minutes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Light Receiving Elements (AREA)
Abstract
PURPOSE: To reduce the lamination defect by giving the B diffusion from the main surface opposite to the surface where the semiconductor device is formed.
CONSTITUTION: SiO22 is laminated on Si substrate 1, and layer 2 on back surface 1b where no element is formed is removed. And then the B diffusion is given for 10 minutes at about 1000°C to form diffusion layer 3 featuring the surface density of 1020cm-3. Then CVDSiO24 is coated to prevent the rediffusion outside B. With the treatment of about 5 minutes at 1200°C higher than the B diffusion, the lamination defect occurring under the SiO2 layer on surface 1a can be eliminated. Thus, a good semiconductor device can be obtained by forming the element on surface 1a. The ion injection method is also available, and the heat treatment can also be carried out in the inactive gas in the course of the manufacturing processes.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5917778A JPS54150074A (en) | 1978-05-18 | 1978-05-18 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5917778A JPS54150074A (en) | 1978-05-18 | 1978-05-18 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54150074A true JPS54150074A (en) | 1979-11-24 |
Family
ID=13105845
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5917778A Pending JPS54150074A (en) | 1978-05-18 | 1978-05-18 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54150074A (en) |
-
1978
- 1978-05-18 JP JP5917778A patent/JPS54150074A/en active Pending
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