JPH11214293A5 - - Google Patents

Info

Publication number
JPH11214293A5
JPH11214293A5 JP1998024043A JP2404398A JPH11214293A5 JP H11214293 A5 JPH11214293 A5 JP H11214293A5 JP 1998024043 A JP1998024043 A JP 1998024043A JP 2404398 A JP2404398 A JP 2404398A JP H11214293 A5 JPH11214293 A5 JP H11214293A5
Authority
JP
Japan
Prior art keywords
aspherical surface
lens group
refractive power
optical system
projection optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1998024043A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11214293A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP10024043A priority Critical patent/JPH11214293A/ja
Priority claimed from JP10024043A external-priority patent/JPH11214293A/ja
Priority to DE19902336A priority patent/DE19902336A1/de
Priority to US09/234,969 priority patent/US6259508B1/en
Publication of JPH11214293A publication Critical patent/JPH11214293A/ja
Priority to US09/722,506 priority patent/US6700645B1/en
Publication of JPH11214293A5 publication Critical patent/JPH11214293A5/ja
Withdrawn legal-status Critical Current

Links

JP10024043A 1998-01-22 1998-01-22 投影光学系及び該光学系を備えた露光装置並びにデバイス製造方法 Withdrawn JPH11214293A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP10024043A JPH11214293A (ja) 1998-01-22 1998-01-22 投影光学系及び該光学系を備えた露光装置並びにデバイス製造方法
DE19902336A DE19902336A1 (de) 1998-01-22 1999-01-21 Optisches Projektionssystem und dieses verwendende Belichtungsvorrichtung und Belichtungsverfahren
US09/234,969 US6259508B1 (en) 1998-01-22 1999-01-21 Projection optical system and exposure apparatus and method
US09/722,506 US6700645B1 (en) 1998-01-22 2000-11-28 Projection optical system and exposure apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10024043A JPH11214293A (ja) 1998-01-22 1998-01-22 投影光学系及び該光学系を備えた露光装置並びにデバイス製造方法

Publications (2)

Publication Number Publication Date
JPH11214293A JPH11214293A (ja) 1999-08-06
JPH11214293A5 true JPH11214293A5 (enExample) 2005-09-15

Family

ID=12127467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10024043A Withdrawn JPH11214293A (ja) 1998-01-22 1998-01-22 投影光学系及び該光学系を備えた露光装置並びにデバイス製造方法

Country Status (3)

Country Link
US (1) US6259508B1 (enExample)
JP (1) JPH11214293A (enExample)
DE (1) DE19902336A1 (enExample)

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US6906866B2 (en) 2003-10-15 2005-06-14 Carl Zeiss Smt Ag Compact 1½-waist system for sub 100 nm ArF lithography
US20080151365A1 (en) 2004-01-14 2008-06-26 Carl Zeiss Smt Ag Catadioptric projection objective
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KR101391470B1 (ko) 2004-05-17 2014-05-07 칼 짜이스 에스엠티 게엠베하 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈
JP4700953B2 (ja) * 2004-11-17 2011-06-15 日東光学株式会社 投写用ズームレンズおよびプロジェクタ装置
US7403344B2 (en) * 2005-02-28 2008-07-22 Siimpel Corporation Lens Assembly
JP4687194B2 (ja) * 2005-03-30 2011-05-25 株式会社ニコン ズームレンズ
JP4747645B2 (ja) * 2005-04-11 2011-08-17 コニカミノルタオプト株式会社 広角レンズ、及び、撮像装置
TWI269061B (en) * 2005-11-24 2006-12-21 Young Optics Inc Zoom lens
TWM296983U (en) * 2005-12-28 2006-09-01 Genius Electronic Optical Co Ltd Imaging lens set
JP2007219316A (ja) * 2006-02-17 2007-08-30 Nikon Corp ズームレンズとこれを具備する光学装置
US7515352B2 (en) * 2006-02-17 2009-04-07 Nikon Corporation Zoom lens system and optical device using thereof
JP4908887B2 (ja) * 2006-03-23 2012-04-04 キヤノン株式会社 フィッシュアイアタッチメント
JP2008122900A (ja) * 2006-03-30 2008-05-29 Fujinon Corp 撮像レンズ
TWI299408B (en) * 2006-08-31 2008-08-01 Asia Optical Co Inc Zoom lens system
JP2008129238A (ja) * 2006-11-20 2008-06-05 Olympus Imaging Corp ズームレンズ及びそれを用いた撮像装置
KR100882621B1 (ko) * 2006-11-22 2009-02-06 엘지이노텍 주식회사 줌 렌즈
JP2008145967A (ja) * 2006-12-13 2008-06-26 Sony Corp ズームレンズ及び撮像装置
JP5037963B2 (ja) * 2007-02-09 2012-10-03 富士フイルム株式会社 撮像レンズ
JP4931136B2 (ja) * 2007-05-22 2012-05-16 オリンパスイメージング株式会社 ズームレンズ
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KR20090033754A (ko) * 2007-10-01 2009-04-06 삼성테크윈 주식회사 광각 줌 광학계
CN101430417B (zh) * 2007-11-05 2010-04-07 鸿富锦精密工业（深圳）有限公司 广角镜头及成像装置
US7917671B2 (en) * 2007-12-18 2011-03-29 Nvidia Corporation Scalable port controller architecture supporting data streams of different speeds
TWI395992B (zh) * 2008-07-25 2013-05-11 Largan Precision Co 四片式攝影光學鏡組
CN101819316B (zh) * 2009-02-27 2011-11-09 富士迈半导体精密工业（上海）有限公司 变焦镜头
KR101586025B1 (ko) 2009-08-11 2016-01-15 엘지이노텍 주식회사 촬상 렌즈
JP2011237588A (ja) * 2010-05-10 2011-11-24 Sony Corp ズームレンズ及び撮像装置
JP2011252962A (ja) * 2010-05-31 2011-12-15 Olympus Imaging Corp 結像光学系及びそれを備えた撮像装置
TWI497146B (zh) * 2013-12-27 2015-08-21 Ability Opto Electronics Technology Co Ltd 七片式光學影像擷取鏡頭與七片式光學影像擷取模組

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