JPH10510680A - 滑りのない垂直架台構造 - Google Patents

滑りのない垂直架台構造

Info

Publication number
JPH10510680A
JPH10510680A JP8533552A JP53355296A JPH10510680A JP H10510680 A JPH10510680 A JP H10510680A JP 8533552 A JP8533552 A JP 8533552A JP 53355296 A JP53355296 A JP 53355296A JP H10510680 A JPH10510680 A JP H10510680A
Authority
JP
Japan
Prior art keywords
wafer
vertical
gantry
cradle
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8533552A
Other languages
English (en)
Japanese (ja)
Inventor
エー． トマノビチ，ジョン
Original Assignee
サン−ゴバン インダストリアル セラミックス，インコーポレイティド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by サン−ゴバン インダストリアル セラミックス，インコーポレイティド filed Critical サン−ゴバン インダストリアル セラミックス，インコーポレイティド
Publication of JPH10510680A publication Critical patent/JPH10510680A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/12—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H10P72/127—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterised by the substrate support

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Chemical Vapour Deposition (AREA)
JP8533552A 1995-05-05 1996-05-03 滑りのない垂直架台構造 Pending JPH10510680A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US43593195A 1995-05-05 1995-05-05
US08/435,931 1995-05-05
PCT/US1996/006294 WO1996035228A1 (en) 1995-05-05 1996-05-03 Slip free vertical rack design

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2003119003A Division JP2004006841A (ja) 1995-05-05 2003-04-23 滑りのない垂直架台構造

Publications (1)

Publication Number Publication Date
JPH10510680A true JPH10510680A (ja) 1998-10-13

Family

ID=23730415

Family Applications (2)

Application Number Title Priority Date Filing Date
JP8533552A Pending JPH10510680A (ja) 1995-05-05 1996-05-03 滑りのない垂直架台構造
JP2003119003A Pending JP2004006841A (ja) 1995-05-05 2003-04-23 滑りのない垂直架台構造

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2003119003A Pending JP2004006841A (ja) 1995-05-05 2003-04-23 滑りのない垂直架台構造

Country Status (8)

Country Link
US (1) US5865321A (https=)
EP (1) EP0826233A1 (https=)
JP (2) JPH10510680A (https=)
KR (1) KR100278731B1 (https=)
CN (1) CN1079577C (https=)
CA (1) CA2218518C (https=)
MX (1) MX9708506A (https=)
WO (1) WO1996035228A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006046348A1 (ja) * 2004-10-27 2006-05-04 Shin-Etsu Handotai Co., Ltd. 熱処理用縦型ボートおよび熱処理方法
JP2009076621A (ja) * 2007-09-20 2009-04-09 Covalent Materials Corp 熱処理用縦型ボート

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US5874767A (en) * 1996-05-14 1999-02-23 Mitsubishi Denki Kabushiki Kaisha Semiconductor device including a lateral power device
DE69738020T2 (de) * 1996-06-28 2008-07-31 Sumco Corp. Verfahren und anordnung zur thermischen behandlung eines einkristallinischen plättchens, einkristallinisches plättchen und verfahren zur herstellung eines einkristallinischen plättchens
US6001499A (en) * 1997-10-24 1999-12-14 General Motors Corporation Fuel cell CO sensor
US5931666A (en) * 1998-02-27 1999-08-03 Saint-Gobain Industrial Ceramics, Inc. Slip free vertical rack design having rounded horizontal arms
US6171400B1 (en) 1998-10-02 2001-01-09 Union Oil Company Of California Vertical semiconductor wafer carrier
US6099645A (en) * 1999-07-09 2000-08-08 Union Oil Company Of California Vertical semiconductor wafer carrier with slats
US20020130061A1 (en) * 2000-11-02 2002-09-19 Hengst Richard R. Apparatus and method of making a slip free wafer boat
US6835039B2 (en) * 2002-03-15 2004-12-28 Asm International N.V. Method and apparatus for batch processing of wafers in a furnace
US7256375B2 (en) * 2002-08-30 2007-08-14 Asm International N.V. Susceptor plate for high temperature heat treatment
US7022192B2 (en) * 2002-09-04 2006-04-04 Tokyo Electron Limited Semiconductor wafer susceptor
US6799940B2 (en) 2002-12-05 2004-10-05 Tokyo Electron Limited Removable semiconductor wafer susceptor
US20040173597A1 (en) * 2003-03-03 2004-09-09 Manoj Agrawal Apparatus for contacting gases at high temperature
US7033126B2 (en) * 2003-04-02 2006-04-25 Asm International N.V. Method and apparatus for loading a batch of wafers into a wafer boat
US7749196B2 (en) * 2003-07-02 2010-07-06 Cook Incorporated Small gauge needle catheterization apparatus
US7181132B2 (en) 2003-08-20 2007-02-20 Asm International N.V. Method and system for loading substrate supports into a substrate holder
US20060027171A1 (en) * 2004-08-06 2006-02-09 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer boat for reducing wafer warpage
US20060065634A1 (en) * 2004-09-17 2006-03-30 Van Den Berg Jannes R Low temperature susceptor cleaning
US20060060145A1 (en) * 2004-09-17 2006-03-23 Van Den Berg Jannes R Susceptor with surface roughness for high temperature substrate processing
TWI327761B (en) * 2005-10-07 2010-07-21 Rohm & Haas Elect Mat Method for making semiconductor wafer and wafer holding article
US7661544B2 (en) * 2007-02-01 2010-02-16 Tokyo Electron Limited Semiconductor wafer boat for batch processing
US8602239B2 (en) * 2010-08-16 2013-12-10 Robert L. Thomas, JR. Decorative paper plate storage units
CN103060774A (zh) * 2011-10-24 2013-04-24 北京北方微电子基地设备工艺研究中心有限责任公司 腔室装置及具有其的基片处理设备
US9153466B2 (en) * 2012-04-26 2015-10-06 Asm Ip Holding B.V. Wafer boat
WO2017023621A1 (en) 2015-07-31 2017-02-09 Viasat, Inc. Flexible capacity satellite constellation
JP6770461B2 (ja) * 2017-02-21 2020-10-14 クアーズテック株式会社 縦型ウエハボート
CN114136422A (zh) 2020-09-03 2022-03-04 长鑫存储技术有限公司 称重装置
KR102709165B1 (ko) * 2021-10-29 2024-09-24 솔믹스 주식회사 웨이퍼 보트

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US3660886A (en) * 1969-02-20 1972-05-09 Ginori Ceramica Ital Spa Method of making firing setters for tiles and other ceramic articles
DE2349512C3 (de) * 1973-10-02 1978-06-08 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen von Halterungen aus Silicium oder Siliciumcarbid für Diffusions- und Temperprozesse
US3964957A (en) * 1973-12-19 1976-06-22 Monsanto Company Apparatus for processing semiconductor wafers
US4153164A (en) * 1978-06-13 1979-05-08 Kasper Instruments, Inc. Carrier for semiconductive wafers
US4228902A (en) * 1979-02-21 1980-10-21 Kasper Instruments, Inc. Carrier for semiconductive wafers
US4504224A (en) * 1980-05-22 1985-03-12 Hewitt David K Kiln furniture
US4412812A (en) * 1981-12-28 1983-11-01 Mostek Corporation Vertical semiconductor furnace
EP0106919B1 (de) * 1982-10-21 1987-08-19 Naamloze Vennootschap Koninklijke Sphinx Aus losen Einzelteilen zusammengesetztes Traggestell für in einem Ofen zu brennende Fliesen oder dergleiche Gegenstände
DE3419866C2 (de) * 1984-05-28 1986-06-26 Heraeus Quarzschmelze Gmbh, 6450 Hanau Trägerhorde aus Quarzglas für scheibenförmige Substrate
US4949848A (en) * 1988-04-29 1990-08-21 Fluoroware, Inc. Wafer carrier
US4911308A (en) * 1988-11-07 1990-03-27 Saxvikens Mat Ab Mobile plate stand
KR0153250B1 (ko) * 1990-06-28 1998-12-01 카자마 겐쥬 종형 열처리 장치
US5310339A (en) * 1990-09-26 1994-05-10 Tokyo Electron Limited Heat treatment apparatus having a wafer boat
GB9021873D0 (en) * 1990-10-09 1990-11-21 Groom Bryan Ltd Ware support apparatus
JP3204699B2 (ja) * 1990-11-30 2001-09-04 株式会社東芝 熱処理装置
US5188240A (en) * 1991-07-05 1993-02-23 Robert K. Hanson Storage unit for recording-media boxes
US5199577A (en) * 1991-08-27 1993-04-06 Russ Bassett Company File rack
JPH05102056A (ja) * 1991-10-11 1993-04-23 Rohm Co Ltd ウエハー支持具
JP3234617B2 (ja) * 1991-12-16 2001-12-04 東京エレクトロン株式会社 熱処理装置用基板支持具
JP3280437B2 (ja) * 1992-11-27 2002-05-13 東芝セラミックス株式会社 縦型ボート
US5492229A (en) * 1992-11-27 1996-02-20 Toshiba Ceramics Co., Ltd. Vertical boat and a method for making the same
JP3332168B2 (ja) * 1992-11-30 2002-10-07 東芝セラミックス株式会社 縦型ボート及びその製造方法
JP3280438B2 (ja) * 1992-11-30 2002-05-13 東芝セラミックス株式会社 縦型ボート
JP3245246B2 (ja) * 1993-01-27 2002-01-07 東京エレクトロン株式会社 熱処理装置
JPH06349758A (ja) * 1993-06-03 1994-12-22 Kokusai Electric Co Ltd 縦型半導体製造装置用ボート
JP2888409B2 (ja) * 1993-12-14 1999-05-10 信越半導体株式会社 ウェーハ洗浄槽
US5560499A (en) * 1994-01-04 1996-10-01 Dardashti; Shahriar Storage and display assembly for compact discs and the like
US5515979A (en) * 1994-07-05 1996-05-14 Salvail; Napoleon P. Simplified jewel case management and opening for compact disk storage systems
US5679168A (en) * 1995-03-03 1997-10-21 Silicon Valley Group, Inc. Thermal processing apparatus and process
US5618351A (en) * 1995-03-03 1997-04-08 Silicon Valley Group, Inc. Thermal processing apparatus and process
US5534074A (en) * 1995-05-17 1996-07-09 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006046348A1 (ja) * 2004-10-27 2006-05-04 Shin-Etsu Handotai Co., Ltd. 熱処理用縦型ボートおよび熱処理方法
JP2006128316A (ja) * 2004-10-27 2006-05-18 Shin Etsu Handotai Co Ltd 熱処理用縦型ボートおよび熱処理方法
JP2009076621A (ja) * 2007-09-20 2009-04-09 Covalent Materials Corp 熱処理用縦型ボート

Also Published As

Publication number Publication date
CN1079577C (zh) 2002-02-20
CA2218518C (en) 2002-10-01
KR100278731B1 (ko) 2001-03-02
US5865321A (en) 1999-02-02
CN1183854A (zh) 1998-06-03
JP2004006841A (ja) 2004-01-08
WO1996035228A1 (en) 1996-11-07
CA2218518A1 (en) 1996-11-07
EP0826233A1 (en) 1998-03-04
MX9708506A (es) 1998-06-30
KR19990008205A (ko) 1999-01-25

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