CN1079577C - 半导体晶圆片用的竖直支架 - Google Patents

半导体晶圆片用的竖直支架 Download PDF

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Publication number
CN1079577C
CN1079577C CN96193695A CN96193695A CN1079577C CN 1079577 C CN1079577 C CN 1079577C CN 96193695 A CN96193695 A CN 96193695A CN 96193695 A CN96193695 A CN 96193695A CN 1079577 C CN1079577 C CN 1079577C
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CN
China
Prior art keywords
wafer
support
wafers
area
vertical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN96193695A
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English (en)
Chinese (zh)
Other versions
CN1183854A (zh
Inventor
约翰·A·托马诺维什
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Ceramics and Plastics Inc
Original Assignee
Saint Gobain Industrial Ceramics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Industrial Ceramics Inc filed Critical Saint Gobain Industrial Ceramics Inc
Publication of CN1183854A publication Critical patent/CN1183854A/zh
Application granted granted Critical
Publication of CN1079577C publication Critical patent/CN1079577C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/12—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H10P72/127—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterised by the substrate support

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Chemical Vapour Deposition (AREA)
CN96193695A 1995-05-05 1996-05-03 半导体晶圆片用的竖直支架 Expired - Fee Related CN1079577C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US43593195A 1995-05-05 1995-05-05
US08/435,931 1995-05-05

Publications (2)

Publication Number Publication Date
CN1183854A CN1183854A (zh) 1998-06-03
CN1079577C true CN1079577C (zh) 2002-02-20

Family

ID=23730415

Family Applications (1)

Application Number Title Priority Date Filing Date
CN96193695A Expired - Fee Related CN1079577C (zh) 1995-05-05 1996-05-03 半导体晶圆片用的竖直支架

Country Status (8)

Country Link
US (1) US5865321A (https=)
EP (1) EP0826233A1 (https=)
JP (2) JPH10510680A (https=)
KR (1) KR100278731B1 (https=)
CN (1) CN1079577C (https=)
CA (1) CA2218518C (https=)
MX (1) MX9708506A (https=)
WO (1) WO1996035228A1 (https=)

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US5874767A (en) * 1996-05-14 1999-02-23 Mitsubishi Denki Kabushiki Kaisha Semiconductor device including a lateral power device
DE69738020T2 (de) * 1996-06-28 2008-07-31 Sumco Corp. Verfahren und anordnung zur thermischen behandlung eines einkristallinischen plättchens, einkristallinisches plättchen und verfahren zur herstellung eines einkristallinischen plättchens
US6001499A (en) * 1997-10-24 1999-12-14 General Motors Corporation Fuel cell CO sensor
US5931666A (en) * 1998-02-27 1999-08-03 Saint-Gobain Industrial Ceramics, Inc. Slip free vertical rack design having rounded horizontal arms
US6171400B1 (en) 1998-10-02 2001-01-09 Union Oil Company Of California Vertical semiconductor wafer carrier
US6099645A (en) * 1999-07-09 2000-08-08 Union Oil Company Of California Vertical semiconductor wafer carrier with slats
US20020130061A1 (en) * 2000-11-02 2002-09-19 Hengst Richard R. Apparatus and method of making a slip free wafer boat
US6835039B2 (en) * 2002-03-15 2004-12-28 Asm International N.V. Method and apparatus for batch processing of wafers in a furnace
US7256375B2 (en) * 2002-08-30 2007-08-14 Asm International N.V. Susceptor plate for high temperature heat treatment
US7022192B2 (en) * 2002-09-04 2006-04-04 Tokyo Electron Limited Semiconductor wafer susceptor
US6799940B2 (en) 2002-12-05 2004-10-05 Tokyo Electron Limited Removable semiconductor wafer susceptor
US20040173597A1 (en) * 2003-03-03 2004-09-09 Manoj Agrawal Apparatus for contacting gases at high temperature
US7033126B2 (en) * 2003-04-02 2006-04-25 Asm International N.V. Method and apparatus for loading a batch of wafers into a wafer boat
US7749196B2 (en) * 2003-07-02 2010-07-06 Cook Incorporated Small gauge needle catheterization apparatus
US7181132B2 (en) 2003-08-20 2007-02-20 Asm International N.V. Method and system for loading substrate supports into a substrate holder
US20060027171A1 (en) * 2004-08-06 2006-02-09 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer boat for reducing wafer warpage
US20060065634A1 (en) * 2004-09-17 2006-03-30 Van Den Berg Jannes R Low temperature susceptor cleaning
US20060060145A1 (en) * 2004-09-17 2006-03-23 Van Den Berg Jannes R Susceptor with surface roughness for high temperature substrate processing
JP2006128316A (ja) * 2004-10-27 2006-05-18 Shin Etsu Handotai Co Ltd 熱処理用縦型ボートおよび熱処理方法
TWI327761B (en) * 2005-10-07 2010-07-21 Rohm & Haas Elect Mat Method for making semiconductor wafer and wafer holding article
US7661544B2 (en) * 2007-02-01 2010-02-16 Tokyo Electron Limited Semiconductor wafer boat for batch processing
JP2009076621A (ja) * 2007-09-20 2009-04-09 Covalent Materials Corp 熱処理用縦型ボート
US8602239B2 (en) * 2010-08-16 2013-12-10 Robert L. Thomas, JR. Decorative paper plate storage units
CN103060774A (zh) * 2011-10-24 2013-04-24 北京北方微电子基地设备工艺研究中心有限责任公司 腔室装置及具有其的基片处理设备
US9153466B2 (en) * 2012-04-26 2015-10-06 Asm Ip Holding B.V. Wafer boat
WO2017023621A1 (en) 2015-07-31 2017-02-09 Viasat, Inc. Flexible capacity satellite constellation
JP6770461B2 (ja) * 2017-02-21 2020-10-14 クアーズテック株式会社 縦型ウエハボート
CN114136422A (zh) 2020-09-03 2022-03-04 长鑫存储技术有限公司 称重装置
KR102709165B1 (ko) * 2021-10-29 2024-09-24 솔믹스 주식회사 웨이퍼 보트

Citations (3)

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Publication number Priority date Publication date Assignee Title
US5219079A (en) * 1991-10-11 1993-06-15 Rohm Co., Ltd. Wafer jig
JPH06168902A (ja) * 1992-11-27 1994-06-14 Toshiba Ceramics Co Ltd 縦型ボート
JPH06169010A (ja) * 1992-11-30 1994-06-14 Toshiba Ceramics Co Ltd 縦型ボート及びその製造方法

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US3660886A (en) * 1969-02-20 1972-05-09 Ginori Ceramica Ital Spa Method of making firing setters for tiles and other ceramic articles
DE2349512C3 (de) * 1973-10-02 1978-06-08 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen von Halterungen aus Silicium oder Siliciumcarbid für Diffusions- und Temperprozesse
US3964957A (en) * 1973-12-19 1976-06-22 Monsanto Company Apparatus for processing semiconductor wafers
US4153164A (en) * 1978-06-13 1979-05-08 Kasper Instruments, Inc. Carrier for semiconductive wafers
US4228902A (en) * 1979-02-21 1980-10-21 Kasper Instruments, Inc. Carrier for semiconductive wafers
US4504224A (en) * 1980-05-22 1985-03-12 Hewitt David K Kiln furniture
US4412812A (en) * 1981-12-28 1983-11-01 Mostek Corporation Vertical semiconductor furnace
EP0106919B1 (de) * 1982-10-21 1987-08-19 Naamloze Vennootschap Koninklijke Sphinx Aus losen Einzelteilen zusammengesetztes Traggestell für in einem Ofen zu brennende Fliesen oder dergleiche Gegenstände
DE3419866C2 (de) * 1984-05-28 1986-06-26 Heraeus Quarzschmelze Gmbh, 6450 Hanau Trägerhorde aus Quarzglas für scheibenförmige Substrate
US4949848A (en) * 1988-04-29 1990-08-21 Fluoroware, Inc. Wafer carrier
US4911308A (en) * 1988-11-07 1990-03-27 Saxvikens Mat Ab Mobile plate stand
KR0153250B1 (ko) * 1990-06-28 1998-12-01 카자마 겐쥬 종형 열처리 장치
US5310339A (en) * 1990-09-26 1994-05-10 Tokyo Electron Limited Heat treatment apparatus having a wafer boat
GB9021873D0 (en) * 1990-10-09 1990-11-21 Groom Bryan Ltd Ware support apparatus
JP3204699B2 (ja) * 1990-11-30 2001-09-04 株式会社東芝 熱処理装置
US5188240A (en) * 1991-07-05 1993-02-23 Robert K. Hanson Storage unit for recording-media boxes
US5199577A (en) * 1991-08-27 1993-04-06 Russ Bassett Company File rack
JP3234617B2 (ja) * 1991-12-16 2001-12-04 東京エレクトロン株式会社 熱処理装置用基板支持具
US5492229A (en) * 1992-11-27 1996-02-20 Toshiba Ceramics Co., Ltd. Vertical boat and a method for making the same
JP3280438B2 (ja) * 1992-11-30 2002-05-13 東芝セラミックス株式会社 縦型ボート
JP3245246B2 (ja) * 1993-01-27 2002-01-07 東京エレクトロン株式会社 熱処理装置
JPH06349758A (ja) * 1993-06-03 1994-12-22 Kokusai Electric Co Ltd 縦型半導体製造装置用ボート
JP2888409B2 (ja) * 1993-12-14 1999-05-10 信越半導体株式会社 ウェーハ洗浄槽
US5560499A (en) * 1994-01-04 1996-10-01 Dardashti; Shahriar Storage and display assembly for compact discs and the like
US5515979A (en) * 1994-07-05 1996-05-14 Salvail; Napoleon P. Simplified jewel case management and opening for compact disk storage systems
US5679168A (en) * 1995-03-03 1997-10-21 Silicon Valley Group, Inc. Thermal processing apparatus and process
US5618351A (en) * 1995-03-03 1997-04-08 Silicon Valley Group, Inc. Thermal processing apparatus and process
US5534074A (en) * 1995-05-17 1996-07-09 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5219079A (en) * 1991-10-11 1993-06-15 Rohm Co., Ltd. Wafer jig
JPH06168902A (ja) * 1992-11-27 1994-06-14 Toshiba Ceramics Co Ltd 縦型ボート
JPH06169010A (ja) * 1992-11-30 1994-06-14 Toshiba Ceramics Co Ltd 縦型ボート及びその製造方法

Also Published As

Publication number Publication date
CA2218518C (en) 2002-10-01
KR100278731B1 (ko) 2001-03-02
US5865321A (en) 1999-02-02
CN1183854A (zh) 1998-06-03
JP2004006841A (ja) 2004-01-08
WO1996035228A1 (en) 1996-11-07
CA2218518A1 (en) 1996-11-07
EP0826233A1 (en) 1998-03-04
MX9708506A (es) 1998-06-30
JPH10510680A (ja) 1998-10-13
KR19990008205A (ko) 1999-01-25

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C53 Correction of patent of invention or patent application
CB02 Change of applicant information

Applicant after: Saint-Gobain Industrial Ceramics Inc.

Applicant before: Saint-Gobain/Norton industrial Ceramics Corp.

COR Change of bibliographic data

Free format text: CORRECT: APPLICANT; FROM: SAINT-GOBAIN/NORTON INDUSTRIAL CERAMICS CORP. TO: ST. GOEBEN CERAMIC + PLASTIC STOCKS CO., LTD.

C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20020220

Termination date: 20120503